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Technical Notes

Technical notes on vibration isolation: fundamentals, VC criteria, active vs passive systems and site requirements for SEM, TEM, AFM and semiconductor tools.

πŸ“š 21 Technical Documents🌐 English/KoreanπŸ”¬ Expert Knowledge

Fundamentals of Vibration

Learn the basic principles and theory of vibration isolation systems. Covers classification of vibration, measurement units, natural frequency, resonance, and more.

ClassificationMeasurement UnitsNatural FrequencyResonanceIsolation Theory
Fundamentals of Vibration

Generic Vibration Criteria

Understand the globally recognized VC curve standards. Explains equipment-specific vibration criteria and octave band analysis methods.

VC CurvesOctave BandsISO StandardsEquipment CriteriaMeasurement
Generic Vibration Criteria

Active Vibration Isolation System

Discover active isolation technology using sensors and actuators. Explains feedback/feedforward control algorithms and 6-DOF control.

Feedback ControlFeed-Forward6-DOFLow FrequencyActuators
Active Vibration Isolation System

Passive Vibration Isolation System

Learn the principles of passive isolation using springs and dampers. Explains the relationship between transmissibility, natural frequency, and damping ratio.

TransmissibilityNatural FrequencyDamping RatioPneumatic SpringHarmonic Oscillator
Passive Vibration Isolation System

Active vs. Passive Vibration Isolation

Transmissibility intuition, the damping trade-off, and a floor-survey decision checklist for choosing between active and passive isolation.

TransmissibilityDamping Trade-offFloor SurveyDecision ChecklistHybrid Labs
Active vs. Passive Vibration Isolation

How Active Vibration Cancellation Works

A walk through the signal chain β€” sensing, DSP control, and actuation β€” including low-frequency sensing, loop stability, and 6-DOF control.

Signal ChainGeophone SensingDSP ControlLoop Stability6-DOF
How Active Vibration Cancellation Works

Vibration Isolation for SEM & AFM

How floor vibration corrupts SEM images and AFM data, how to read VC criteria, and how to match isolation platforms to each instrument.

SEM BlurAFM Z-NoiseColumn LeverVC CriteriaPlatform Matching
Vibration Isolation for SEM & AFM

How to Choose a Vibration Isolation Platform

Passive or active, table or platform β€” the order in which the selection decision actually gets made, and the five questions to put to a supplier before you sign.

Site SurveyPassive vs ActiveInstrument MatchingLoad & GeometrySupplier Questions
How to Choose a Vibration Isolation Platform

How to Choose an Optical Table

From honeycomb structure to table grades, breadboard trade-offs, support matching, and sizing β€” a practical guide to the buying decision.

Honeycomb CoreTable GradesBreadboardsSupport ChoiceSizing
How to Choose an Optical Table

Faraday Cage Limits in Precision Labs

Where shielding ends β€” magnetic fields and floor vibration β€” and why electron microscopes pair EMI control with magnetically quiet active isolation.

How Shielding WorksE-field vs B-field0.05 ΞΌT EmissionIsolation PairingDVIA Bridge
Faraday Cage Limits in Precision Labs

Vibration Isolation for Semiconductor Metrology

Why metrology tools are vibration-limited, which VC criteria apply, the raised-floor problem, and choosing active-pneumatic vs. base platforms.

CD-SEM & InspectionVC CriteriaFab FloorsDVIA-PDVIA-MB
Vibration Isolation for Semiconductor Metrology

Electron Microscopes: How They Work

How electron microscopes work, SEM vs. TEM, the installation environment that limits real-world resolution, and matching DVIA isolation.

How It WorksSEM vs TEMResolution LimitsVC CriteriaDVIA-ML
Electron Microscopes: How They Work

Vibration Isolators: Types & Selection

A field guide to vibration isolators β€” the physics every type shares, where elastomer, spring, and pneumatic mounts fit, and when only active isolation will do.

Vibration IsolatorsTransmissibilityPneumatic IsolatorsActive IsolationVC Criteria
Vibration Isolators: Types & Selection

Feedforward Control Explained

How feedforward control cancels a disturbance before it arrives, why it always pairs with feedback, and where it earns its keep in active vibration isolation.

Feedforward ControlFeedback ControlActive IsolationTransfer PathLow Frequency
Feedforward Control Explained

Vibration Sensors: How They Work

A practical guide to vibration sensors: how accelerometers, geophones, and non-contact probes work, and how closed-loop active isolation platforms put them to work.

Vibration SensorsAccelerometersGeophonesSensor SelectionActive Isolation
Vibration Sensors: How They Work

Electron Microscope Room Requirements

What the site survey checks β€” vibration, magnetic fields, acoustics, airflow β€” with a pre-installation checklist built from 1,000+ installations.

Site SurveyVC LimitsMagnetic FieldsAcousticsChecklist
Electron Microscope Room Requirements

How Much Floor Vibration Can an SEM Tolerate?

The SEM floor vibration spec explained β€” which VC curve applies, one-third-octave measurement, vendor spec sheets, and what to do when the floor fails.

VC-D LimitFloor SurveySpec SheetsFloor ChoiceRemedies
How Much Floor Vibration Can an SEM Tolerate?

Vibration Isolation for AFM

Why AFM is the most vibration-sensitive instrument you own, where Z-noise comes from, and how to pick between tabletop and modular active platforms.

Z-NoiseTip-Sample GapSite LimitsDVIA-TDVIA-ULF
Vibration Isolation for AFM

FIB-SEM Vibration Isolation

FIB-SEM milling turns vibration into machined error, not just blur β€” site requirements, the low-frequency gap, and real Crossbeam, Helios and Amber installations.

Dual-BeamMachined ErrorLow-Frequency GapDVIA-MLDVIA-ULF
FIB-SEM Vibration Isolation

TEM & Cryo-EM Vibration Isolation

What TEM and cryo-EM vibration requirements actually specify β€” VC criteria, the low-frequency problem, and how DVIA-ML, DVIA-MB and DVIA-ULF close the gap.

Krios & GlaciosVC-E/VC-FLow-FrequencyDVIA-MLDVIA-ULF
TEM & Cryo-EM Vibration Isolation

Benchtop & Tabletop Vibration Isolation

Benchtop (tabletop) isolation for compact SEMs, AFMs and balances β€” why the low-frequency problem follows the instrument onto the bench, and how the DVIA-T solves it.

BenchtopCompact SEMBalancesNo Compressed AirDVIA-T
Benchtop & Tabletop Vibration Isolation

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