Vibration Isolation Table
A vibration isolation table is a platform that keeps floor vibration from reaching precision instruments. This guide by DAEIL SYSTEMS — building vibration isolation systems since 1989 — covers how isolation works, the main types, and how to select one for your instrument.
Why vibration isolation matters
Instruments that resolve nanometer-scale features — SEM, TEM, AFM, interferometers, semiconductor metrology tools — are disturbed by floor vibration far below human perception. Tool vendors specify permissible site vibration as VC (Vibration Criterion) curves; failing them degrades imaging and repeatability. See our guide to generic vibration criteria and 1,000+ installation case studies.
Types of vibration isolation tables
Active vibration isolation
Sensors detect vibration and actuators cancel it in real time, effective from 0.5 Hz with no resonance amplification — the standard for electron microscopes and semiconductor metrology. See the DVIA series and the tabletop DVIA-T.
Passive pneumatic isolation
Air springs lower the system natural frequency to block transmission — simple, power-free, and effective above a few hertz, as in DVIM pneumatic isolators.
Optical tables and platforms
Honeycomb-core DVIO optical tables provide a large rigid work surface for laser and optics work; DVIF isolated foundations and DVIP-B low-profile platforms handle fab-floor and heavy-load installations.
Selecting a vibration isolation table
Check five things in order: payload and platform size; measured site vibration; the tool vendor's site specification (VC class); active isolation when the problem band is low-frequency (1–5 Hz); and post-installation verification by measurement. Our selection guide walks through each step.
FAQ
What is the difference between a vibration isolation table and an anti-vibration table?
In practice the terms refer to the same equipment. What matters when selecting one is whether it uses active or passive isolation and which frequency band it controls.
How much does a vibration isolation table cost?
Price varies widely with load capacity, platform size, isolation type (active or passive), and the vibration specification required — from compact tabletop units to large systems for semiconductor metrology. Share your instrument model and site conditions for a tailored quotation.
Is an optical table a vibration isolation table?
Yes — an optical table is a type of vibration isolation table that places a honeycomb-core tabletop on pneumatic isolation supports, used where a large rigid working surface is needed.
Which instruments need a tabletop vibration isolation platform?
Benchtop precision instruments such as AFMs, optical and confocal microscopes, precision balances, and profilometers. When low-frequency vibration is the limiting factor, an active tabletop platform such as DVIA-T controls vibration from 0.5 Hz.
Need the right isolation platform?
Tell us your instrument and site conditions — we'll propose the optimal configuration, vibration survey included.