Tabletop Platform
DVIA-T
Nanoscale precision on any desk. 80–90% isolation at 1 Hz.
Tabletop Microscopy
Active Vibration Isolation System
Explore the lineup.
OEM Isolation Module
DVIA-M
Seamlessly embedded. Instruments that refuse to shake.
OEM Integration
custom active platform
DVIA-ML
Active control from 0.5 Hz. Multi-axis. Uncompromising.
SEM · TEM · E-Beam
Custom active platform for Thermo Fisher
DVIA-MLP
Large-scale stability. Engineered for the most demanding payloads.
THERMO FISHER SEM
modular active isolator
DVIA-ULF
80–90% at 1 Hz, without power. Pure mechanical elegance.
SEM · AFM · Laser
active isolation system for semiconductor
DVIA-P
Purpose-built for semiconductor metrology. Clean-room ready.
CD-SEM, DR-SEM, Photomask Inspection
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Applications
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Discover our vibration solutions.
Find the vibration isolation system engineered for your application domain.
MICROSCOPY
SEM
High-magnification imagingSub-nanometer resolution
MICROSCOPY
TEM
Atomic-resolution imagingHRTEM & STEM modes
METROLOGY
Semiconductor Metrology
CD-SEMMask AlignerDR-SEMPhotomask QualificationE-Beam Wafer MetrologyPhotomask RepairE-Beam LithographyReticle Inspection
MICROSCOPY
Tabletop Microscopy
Atomic Force MicroscopyConfocal MicroscopyHolotomographyScanning Probe Microscopy
METROLOGY
Surface Metrology
Interferometry3D Optical Profilers
METROLOGY
X-Ray Metrology
Sub-micron precisionDiffraction, reflectometry, fluorescence
SPECTROSCOPY
Laser Spectroscopy
Quantum Cascade LasersInfrared Spectroscopy
MICROSCOPY
Automated AFM
Picometer-scale topographyIn-line 3D AFM
SPECTROSCOPY
NMR Spectroscopy
Superconducting magnets600–1200 MHz systems
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