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DVIA-M Series

Built In.Perfect Imaging.

DVIA-M Series Built-In Active Vibration Isolation System

Seamless integration into electron microscopes.

Active vibration isolation module purpose-built for integration into the world's most advanced electron microscopes.

Built into the world's most demanding microscopes.

Achieving vibration criteria up to VC-G, the DVIA-M sets new standards across all supported microscope categories. Every instrument demands a bespoke isolation strategy. The DVIA-M is engineered to match.

SEM

Scanning Electron Microscopy

Nano-surface imaging without drift

Floor vibrations cause image drift and blur at magnifications above 50,000×. The DVIA-M cancels disturbances from 0.5 Hz, keeping electron beams precisely on target for artifact-free SEM imaging.

Supported Manufacturers

Thermo Fisher · Zeiss · JEOL · Tescan · Hitachi · CIQTEK

TEM

Transmission Electron Microscopy

Atomic resolution. Zero mechanical noise

HRTEM and STEM modes demand sub-angstrom stability. Building vibrations — even imperceptible ones — destroy lattice fringe contrast. The DVIA-M provides the mechanical silence these instruments require.

Supported Manufacturers

Thermo Fisher · JEOL · Hitachi · Tescan · CIQTEK

AFM

Atomic Force Microscopy

Picometer topography. Tip stays true.

AFM measures surface topography by physical contact between cantilever tip and sample. Any relative motion becomes measurement noise. At sub-angstrom probe sensitivity, building vibration becomes the dominant error source. The DVIA-M removes the floor as a noise source so the cantilever sees only the surface.

Supported Manufacturers

Bruker · Semilab · Oxford Instruments

Outperforms. Everything.

Transmissibility Graph

Isolation from 0.5 Hz.

Up to90% at 1 Hz.Up toVC-G

Feedback corrects. Feedforward anticipates.

Feedback measures vibration on the isolated mass and counters it in real time. Feedforward reads the floor and cancels disturbances before they arrive. Together, they deliver exceptional low-frequency isolation. Your instruments operate as if the vibration doesn't exist.

DVIA-M Series Isolation Dynamics

How it works

Passive Isolation (Spring & Damper):

Without active controls, the spring (k) and damper try to absorb shocks. However, at low frequencies, they can actually amplify the floor disturbance (d), causing the mass to resonate.

Feedforward Control:

Leverages ground sensor data to proactively command the actuators, nullifying floor vibrations before they reach the isolated mass.

Feedback Control:

Continuously measures the isolated mass's residual vibration (y) and uses the actuators to counteract it in real time.

Together, these advanced control mechanisms significantly enhance isolation performance, keeping the mass nearly perfectly still!

System Controls

Active

Floor Disturbance

Feedforward Control

Feedback Control

Every detail engineered
for nanoscale precision.

RAW INPUT
Micro-vibrations missed
HARDWARE AMP
Boosts gain
SOFTWARE FILTER
Isolates down to 0.3 Hz

Stage 1: Raw Input

Extremely subtle micro-vibrations are captured by the sensors. Due to their low amplitude, they are easily lost amidst ambient noise.

Stage 2: Hardware Amp

The DVIA-M unit applies analog gain to boost the entire signal. Both the desired low-frequency wave and the high-frequency noise are amplified.

Stage 3: Software Filter

Advanced digital algorithms isolate and retain only frequencies down to 0.3 Hz, entirely stripping away the noise to leave a clean, readable sine wave.

Detection from 0.3 Hz.

A hardware amplifier boosts low-frequency gain.A digital filter refines the signal. Together, they extendaccurate detection and isolation down to 0.3 Hz.

SensorActive Isolation ActuatorsEquipmentDSP1800 MFLOPSMAX PROCESSINGINPUT SIGNALRandom VibrationHIGH FREQUENCYSurge DetectedRESPONSE TIME0.5 msLIVE CANCELINGACTIVE - MAX DSP

Responds before you notice.

A floating-point DSP delivering 1800 MFLOPSprocesses vibration data in real time.Response time: 0.5 ms. By the time vibrations reachyour microscope, it's already been cancelled.

Detects the imperceptible.

11 Geophone velocity sensors with 2.55 V/in/s sensitivity and just 0.15% distortion. They capture low frequency vibrations other systems miss entirely so the DVIA-M can cancel what it can't ignore.

Six axes. Zero compromise.

The DVIA-M controls all six degrees of freedom. Three translational, three rotational. No vibration path goes uncorrected. Its algorithm decouples each axis independently, eliminating cross-coupling. Sub-micron translational and sub-microradian angular stability, maintained simultaneously.

Magnetically silent.

Less than 0.05 μT magnetic field. Electron beams are sensitive to the smallest magnetic interference. The DVIA-M is engineered to be magnetically silent — your beam stays true, your images stay sharp.

User Interface. Monitor. Log. Verify data.

The DVIA-M UI displays real-time vibration levels, actuator response, and sensor output across all six axes. Every data can be automatically logged. Review historical trends, export reports, or verify isolation performance at any time. No hidden processes. No black-box algorithms. Your facility team sees exactly what the system is doing, why it's responding, and how it's performing against specification.

Transmissibility Curve

Auto Spectrum

VC Curves

Sensors and Actuators

Specifications

Specifications

DVIA-M1000
Dimensions
Customizable
Maximum Load Capacity
1700 kg
DVIA-M3000
Dimensions
Customizable
Maximum Load Capacity
3000 kg
Common Specs· all models
Vibration Isolation Technology
Feedback and Feedforward Control
Degrees of Freedom
6 (X, Y, Z, θx, θy, θz)
Active Isolation Bandwidth
0.5 – 200 Hz
Vibration Isolation
80 – 90% at 1 Hz
Actuator
Electromagnetic Actuator
Maximum Actuator Force
Vertical 40 N, Horizontal 20 N
Vibration Sensor
Geophone, Sensitivity: 2.55 V/in/s (100.4 V/m/s) ± 10%
Leveling Repeatability
Repeatability: ± 0.1 mm
Controller
Built-in
Environmental Protection
CE and TUV
Power Requirements
Line Voltage: 100 – 260 V AC, Line Frequency: 50/60 Hz
Air Requirements
Air Pressure: 4 – 6 bar, Air Delivery: 10 L/min
Environmental Requirements
Temperature: 5 – 50 °C, Humidity: 20 – 90 %

Verified on-site. All performance claims are measured under controlled conditions and confirmed during installation. Dimensions and load capacity are customizable per instrument specification.

2D CAD Drawings

Download technical drawings for integration planning and facility layout.

DWG

DVIA-M1000

DWG · 0.8 MB

DWG

DVIA-M3000

DWG · 0.9 MB