Installation Report

09-11-2026

ASE Korea TESCAN FIB-SEM SOLARIS X2 GMH DVIA-ML1000 Installation Report

DVIA-M Series

Installation Report

ASE Korea

Electron Microscopy Laboratory

TESCAN

FIB-SEM

SOLARIS X2 GMH

DVIA-ML1000

260622R4

ASE Korea PB1

Overview

Following the installation of DVIA-ML1000 at ASE Korea PB1, 1CMD QO Lab, Electron Microscopy Room, tuning and vibration measurement were performed.

Inspection and vibration measurement were conducted with the equipment in the IDLE state.

Data is represented in VC Curve format and reference material on the vibration level is provided.

Vibration Isolation System Information

Model: DVIA-ML1000

Serial Number: 260622R4

Engineer

Gyumin Park · DAEIL SYSTEMS

Tuning Date

2026.09.11

Site

ASE Korea PB1, 1CMD QO Lab, Electron Microscopy Room

End User

ASE Korea

Customer Equipment

Manufacturer: TESCAN

Equipment: FIB-SEM

Model: SOLARIS X2 GMH

Vibration Specification

Horizontal

Frequency [Hz]	Spec [µm/s RMS]
1	10
30	10
30	20
100	20

Vertical

Frequency [Hz]	Spec [µm/s RMS]
1	10
30	10
30	20
100	20

Equipment Condition

IDLE

Vibration Measurement Equipment

10.1) Measurement Equipment

Hardware: B&K Front End Type 3040-A-040

Software: B&K Pulse Labshop22 Version

10.2) Accelerometer

PCB 393B05

Vibration Measurement Setup

F Span: 200 Hz

Lines: 2400

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Conclusion

As a result of tuning the vibration isolation platform below the TESCAN FIB-SEM equipment in the ASE Paju microscopy laboratory and performing the vibration measurement, all axes met the reference specification and achieved a "PASS" rating. The measurement results showed that the vertical axis improved from VC-B to VC-E, the left-to-right axis from VC-E to VC-G, and the front-to-back axis from VC-B to VC-F. After tuning, the equipment image performance was verified and no abnormalities were finally confirmed, establishing an optimal vibration environment for high-precision analysis.

Measurement Data Summary

Measurement Location	Vibration Spec	Measured Axis	Measurement Result
Measurement Location	Vibration Spec	Measured Axis	Floor	DVIA-ML1000
1. Floor 2. DVIA-ML1000	See Section 8	Vertical (Z-axis)	✓ PASS	✓ PASS
		Left to Right (X-axis)	✓ PASS	✓ PASS
		Front to Back (Y-axis)	✓ PASS	✓ PASS

Measurement Data

Vertical (Z-axis)

Z-axis — Autospectrum

Image 1 — ASE Korea TESCAN FIB-SEM SOLARIS X2 GMH DVIA-ML1000 Installation Report

Z-axis — VC Curves

Image 2 — ASE Korea TESCAN FIB-SEM SOLARIS X2 GMH DVIA-ML1000 Installation Report

Left to Right (X-axis)

X-axis — Autospectrum

Image 3 — ASE Korea TESCAN FIB-SEM SOLARIS X2 GMH DVIA-ML1000 Installation Report

X-axis — VC Curves

Image 4 — ASE Korea TESCAN FIB-SEM SOLARIS X2 GMH DVIA-ML1000 Installation Report

Front to Back (Y-axis)

Y-axis — Autospectrum

Image 5 — ASE Korea TESCAN FIB-SEM SOLARIS X2 GMH DVIA-ML1000 Installation Report

Y-axis — VC Curves

Image 6 — ASE Korea TESCAN FIB-SEM SOLARIS X2 GMH DVIA-ML1000 Installation Report

Reference

The table below classifies vibration levels based on IEST-RP-CC012.2.

Criterion Curve	Description	Amplitude (μm/s) (μin/s)	Detail Size (μm)
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances. Usually adequate for computer equipment, hospital recovery rooms, semiconductor probe test equipment, and microscopes less than 40x.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable in most instances for surgical suites, microscopes to 100x and for other equipment of low sensitivity.	100 (4,000)	25
VC-A	Adequate in most instances for optical microscopes to 400x, microbalances, optical balances, proximity and projection aligners, etc.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment (including steppers) to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate standard for optical microscopes to 1000x, lithography and inspection equipment (including moderately sensitive electron microscopes) to 1μm detail size. TFT-LCD stepper/scanner processes.	12.5 (500)	1-3
VC-D	Suitable in most instances for demanding equipment, including many electron microscopes (SEMs and TEMs) and E-Beam systems.	6.25 (250)	0.1-0.3
VC-E	A challenging criterion to achieve. Assumed to be adequate for the most demanding of sensitive systems including long path, laser-based, small target systems, E-Beam lithography systems working at nanometer scales, and other systems requiring extraordinary dynamic stability.	3.12 (125)	<0.1
VC-F	Appropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.	1.56 (62.5)	N/A
VC-G	Appropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.	0.78 (31.3)	N/A

Notes:

1. As measured in one-third octave bands of frequency over the frequency 8 to 80 Hz (VC-A and VC-B) or 1 to 80 Hz (VC-C through VC-G).

2. The detail size refers to the width in the case of microelectronics fabrication, the particle (cell) size in the case of medical and pharmaceutical research, etc. It is to imaging associated with probe technologies, AFMs, and nanotechnology.

The information given in this table is for guidance only. In most instances, it is recommended that the advice of someone knowledgeable about applications and vibration requirements of the equipment and processes be sought.