TESCAN Korea LeWest City TESCAN Amber FIB-SEM DVIA-ML1000 Installation Report
Overview
LeWest City B2, TESCAN Korea demo room — TESCAN Amber FIB-SEM on DVIA-ML1000 (SN 260212R2-1). Measurements with equipment turned on/IDLE. The TESCAN Amber cooling fan on the table was running during tuning and measurement; it can affect measured levels.
Vibration Isolation System Info
Model: DVIA-ML1000
Serial number: 260212R2-1
Engineer
Chaewon Lee — DAEIL SYSTEMS
Tuning date
March 12, 2026
Report written date
March 13, 2026
Installation site
LeWest City, Building B, 2F, TESCAN Korea demo room
Equipment
Manufacturer: TESCAN — FIB-SEM — Model: Amber
Vibration specification
Up to 30 Hz: 12 µm/s
Above 30 Hz: 24 µm/s
Equipment status
Installed, turned on/IDLE
Measurement device
Data Physics DAQ: QUATTRO (SN 22436), SignalCalc ACE
Accelerometer: PCB 393B05
Measurement setup
F span 200 Hz, 3200 lines, m/s, Hanning, FFT spectrum averaging, exponential, 40 averages
Conclusion
In some frequency ranges, levels on the DVIA-ML1000 can read higher than the floor because of the cooling fan on the tool — that is tool vibration, not a fault of the isolation platform.
All directions meet the vibration specification.
Measurement summary
(1/3-octave, equipment on/IDLE; values per report)
| Location | State | Direction | Vibration spec | Measured (floor) | Measured (DVIA-ML1000) | Result |
|---|---|---|---|---|---|---|
| TESCAN Korea DEMO | On/IDLE | Vertical | up to 30: 12 / above 30: 24 µm/s (VC ref.) | (see curves) | VC-C @ 31.5 Hz / VC-E @ 31.5 Hz | ✓ PASS / ✓ PASS |
| L–R | per spec | (see curves) | VC-F @ 3.15 / VC-G @ 3.15 | ✓ PASS / ✓ PASS | ||
| F–B | per spec | (see curves) | VC-E @ 20 / VC-G @ 20 | ✓ PASS / ✓ PASS |
Data and Image
Vertical — VC curves, narrow-band autospectrum, transmissibility
Left to Right — VC curves, narrow-band autospectrum, transmissibility
Front to Back — VC curves, narrow-band autospectrum, transmissibility
Vertical VC Curves
Vertical Narrow Band
Vertical Transmissibility
Left to Right VC Curves
Left to Right Narrow Band
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Narrow Band
Front to Back Transmissibility
Reference
Generic Vibration Criteria
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
Share this Case Study
Case Study Information
Related Case Studies
Jiasheng Advanced Technology TESCAN Amber FIB-SEM DVIA-ML1000 (251117R7) Installation Report
TESCAN Solaris GMH FIB-SEM DVIA-M1000 (230509R6-3) — Pengxin Micro, 2024-01-31
