Installation Report

DVIA-M Series

10-31-2025

STATSCHIPPACK Korea TESCAN SOLARIS X FIB-SEM DVIA-ML1000 (250824R1) Installation Report

DVIA-M Series

Installation Report

STATSCHIPPACK

TESCAN

FIB-SEM

SOLARIS X

DVIA-ML1000

Overview

Tuning and vibration measurement were performed for the DVIA-ML1000 installed in the STATSCHIPPACK Korea laboratory.

Vibration measurement and tuning were conducted with the equipment installed and in the Turned on state.

An active vibration isolation platform was installed inside the equipment mounted on top of the isolator, and airflow and vibration from the equipment were present. These may affect tuning and vibration measurement.

Data are presented as VC curves, and reference material on vibration levels is provided.

Vibration Isolation System Info

Model: DVIA-ML1000

Serial Number: 250824R1

Engineer

Donggyu Park, DAEIL SYSTEMS Development Team

Tuning Date

October 24, 2025

Report written date

October 31, 2025

End User

STATSCHIPPACK Korea

Number of Tuning Trial

N/A

Location

STATSCHIPPACK Korea laboratory

Equipment

Manufacturer: TESCAN

Equipment: FIB-SEM

Model: SOLARIS X

Equipment Status

Turned on

Measurement Device

10.1) Data Physics DAQ

-Hardware: QUATTRO, Serial Number: 22436

-Software: SignalCalc ACE

10.2) Accelerometer

PCB Accelerometer

Model: 393B05

Vibration specification

10 um/s<30 Hz

20 um/s>30 Hz

Vibration measurement setup

F Span: 200

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Average Mode: Exponential, 40

Tuning Request

N/A

Measurement Summary

Measurement location	Status	Direction	Floor vibration	DVIA-ML1000	Floor result	Platform result
STATSCHIPPACK Korea laboratory	Equipment installed / Turned on	Vertical	VC-E @ 31.5 Hz	VC-F @ 31.5 Hz	✓ PASS	✓ PASS
STATSCHIPPACK Korea laboratory	Equipment installed / Turned on	Left to Right	VC-F @ 63 Hz	VC-G @ 31.5 Hz	✓ PASS	✓ PASS
STATSCHIPPACK Korea laboratory	Equipment installed / Turned on	Front to Back	VC-C @ 31.5 Hz	VC-F @ 31.5 Hz	✓ PASS	✓ PASS

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Reference

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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