DVIA-ML Series
Active Control.Absolute Stillness.
90% vibration isolation at 1 Hz in 6 Degrees of Freedom. Engineered for electron microscopes that image at the nano scale.90% vibration isolation at 1 Hz in 6 Degrees of Freedom. Engineered for electron microscopes that image at the nano scale.
Your electron microscope deserves zero disturbance.
The DVIA-ML doesn't just reduce vibration. It eliminates it. Advanced sensors detect floor disturbances as low as 0.3 Hz. Adaptive algorithms respond in 0.5 ms. And electromagnetic actuators generate the exact opposing force so your imaging stays flawless, every time.The DVIA-ML doesn't just reduce vibration. It eliminates it. Advanced sensors detect floor disturbances as low as 0.3 Hz. Adaptive algorithms respond in 0.5 ms. And electromagnetic actuators generate the exact opposing force so your imaging stays flawless, every time.
Engineered for the world's most demanding instruments.Engineered for the world's
most demanding instruments.
The DVIA-ML series delivers VC-B to VC-G vibration criteria across all four supported metrology domains. Every application demands a different isolation strategy — the DVIA-ML series adapts to each.The DVIA-ML series delivers VC-B to VC-G vibration criteria across all four supported metrology domains.
Every application demands a different isolation strategy — the DVIA-ML series adapts to each.
SEM
Scanning Electron Microscopy
Nano-surface imaging without drift
Floor vibrations cause image drift and blur at magnifications above 50,000×. The DVIA-ML cancels disturbances from 0.5 Hz, keeping electron beams precisely on target for artifact-free SEM imaging.Floor vibrations cause image drift and blur at magnifications above 50,000×. The DVIA-ML cancels disturbances from 0.5 Hz, keeping electron beams precisely on target for artifact-free SEM imaging.
Supported Manufacturers
Thermo Fisher · Zeiss · JEOL · Tescan · Hitachi · CIQTEK
TEM
Transmission Electron Microscopy
Atomic resolution. Zero mechanical noise
HRTEM and STEM modes demand sub-angstrom stability. Building vibrations — even imperceptible ones — destroy lattice fringe contrast. The DVIA-ML provides the mechanical silence these instruments require.HRTEM and STEM modes demand sub-angstrom stability. Building vibrations — even imperceptible ones — destroy lattice fringe contrast. The DVIA-ML provides the mechanical silence these instruments require.
Supported Manufacturers
Thermo Fisher · JEOL · Hitachi · Tescan · CIQTEK
XRM
X-Ray Metrology
Precision diffraction. Clean peaks
X-ray diffraction, reflectometry, and fluorescence all require vibration-free sample positioning. The low-frequency vibrations broaden diffraction peaks and distort thin-film measurements. The DVIA-ML restores data integrity.X-ray diffraction, reflectometry, and fluorescence all require vibration-free sample positioning. The low-frequency vibrations broaden diffraction peaks and distort thin-film measurements. The DVIA-ML restores data integrity.
Supported Manufacturers
Bruker · Zeiss
EBL
Electron Beam Lithography
Precision lithography. Flawless patterns.
Electron beam lithography requires vibration-free sample positioning. Micro-vibrations cause beam drift, increasing line-edge roughness and distorting nanoscale patterns. The DVIA-ML ensures exact pattern transfer and pattering integrity.Electron beam lithography requires vibration-free sample positioning. Micro-vibrations cause beam drift, increasing line-edge roughness and distorting nanoscale patterns. The DVIA-ML ensures exact pattern transfer and pattering integrity.
Supported Manufacturers
Raith · JEOL
NMR
NMR Spectroscopy
Magnets protected. Spectra preserved
Superconducting magnets at 600–1200 MHz are hypersensitive to building vibrations. Floor motion degrades shim stability and spectral resolution. The DVIA-ML isolates the entire magnet assembly from floor vibration at all frequencies.Superconducting magnets at 600–1200 MHz are hypersensitive to building vibrations. Floor motion degrades shim stability and spectral resolution. The DVIA-ML isolates the entire magnet assembly from floor vibration at all frequencies.
Supported Manufacturers
Bruker · Jeol
DVIA-ML Installation Guide
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Feedback corrects. Feedforward anticipates.
Feedback measures vibration on the isolated mass and counters it in real time. Feedforward reads the floor and cancels disturbances before they arrive. Together, they deliver exceptional low-frequency isolation. Your instruments operate as if the vibration doesn't exist.
How it works
Passive Isolation (Spring & Damper):
Without active controls, the spring (k) and damper try to absorb shocks. However, at low frequencies, they can actually amplify the floor disturbance (d), causing the mass to resonate.
Feedforward Control:
Leverages ground sensor data to proactively command the actuators, nullifying floor vibrations before they reach the isolated mass.
Feedback Control:
Continuously measures the isolated mass's residual vibration (y) and uses the actuators to counteract it in real time.
Together, these advanced control mechanisms significantly enhance isolation performance, keeping the mass nearly perfectly still!
System Controls
Toggle to observe how feedback and feedforward mechanisms counteract low-frequency floor vibrations.
Floor Disturbance
Simulate low-frequency vibration
Feedforward Control
Proactive floor sensing
Feedback Control
Reactive mass correction
Outperforms. Everything.
Isolation from 0.5 Hz.
User Interface. Monitor. Log. Verify data.User Interface.
Monitor. Log. Verify data.
The DVIA-ML UI displays real-time vibration levels, actuator response, and sensor output across all six axes. Every data can be automatically logged. Review historical trends, export reports, or verify isolation performance at any time. No hidden processes. No black-box algorithms. Your facility team sees exactly what the system is doing, why it's responding, and how it's performing against specification.
Transmissibility Curve
Auto Spectrum
VC Curves
Sensors and Actuators
Your microscope. Your platform.
Every electron microscope is different. The DVIA-ML is engineered to match yours. We review your instrument specifications, floor conditions, and facility constraints. Dimensions, weight distribution, mounting interfaces, load paths, and cable routing are configured before manufacturing begins. No on-site modifications. No compromises to isolation performance.Every electron microscope is different. The DVIA-ML is engineered to match yours.
We review your instrument specifications, floor conditions, and facility constraints. Dimensions, weight distribution, mounting interfaces, load paths, and cable routing are configured before manufacturing begins. No on-site modifications. No compromises to isolation performance.
Glacios 2
Thermo Fisher Scientific
Tecnai TF20
Thermo Fisher Scientific
Krios G4
Thermo Fisher Scientific
Spectra
Thermo Fisher Scientific
Specifications
| Model | DVIA-ML1000 | DVIA-ML3000 | DVIA-ML6000 |
|---|---|---|---|
| Dimensions | Customizable | ||
| Maximum Load Capacity | 1700kg | 3000kg | 6000kg |
| Vibration Isolation Technology | Feedback and Feedforward Control | ||
| Degrees of Freedom | 6 (X, Y, Z, θx, θy, θz) | ||
| Active Isolation Bandwidth | 0.5 – 200 Hz | ||
| Vibration Isolation | 80 – 90% at 1 Hz | ||
| Actuator | Electromagnetic Actuator | ||
| Maximum Actuator Force | Vertical 40 N, Horizontal 20 N | Vertical 40 N, Horizontal 20 N | Vertical 80 N, Horizontal 40 N |
| Vibration Sensor | Geophone, Sensitivity: 2.55 V/in/s (100.4 V/m/s) ± 10% | ||
| Leveling Repeatability | Repeatability: ± 0.1 mm | ||
| Response Time | < 0.5 ms | ||
| Controller | Built-in | ||
| Environmental Protection | CE and TUV | ||
| Power Requirements | Line Voltage: 100 – 260V AC, Line Frequency: 50/60 Hz | Line Voltage: 100 – 260V AC, Line Frequency: 50/60 Hz | Line Voltage: 100 – 240V AC (Single-phase), Power: 100 W |
| Air Requirements | Air Pressure: 4 – 6 bar, Air Delivery: 10 L/min | Air Pressure: 4 – 6 bar, Air Delivery: 10 L/min | Air Pressure: 5 – 6 bar, Air Delivery: 250 L/min |
| Environmental Requirements | Temperature: 5 – 50 °C, Humidity: 20 – 90 % | ||
Case Studies
Proven in the field. Installed in the world's most advanced semiconductor, aerospace, and research facilities. Every system measured and verified on-site.Proven in the field. Installed in the world's most advanced semiconductor, aerospace, and research facilities.
Every system measured and verified on-site.
YOUSHIZE TECH ZEISS GeminiSEM 360 FIB-SEM DVIA-ML1000 Installation Report
YOUSHIZE TECH ZEISS GeminiSEM 360 FIB-SEM DVIA-ML1000 installation report — following installation at Yancheng for end user Yancheng High-tech Zone, the DVIA-ML1000 active vibration isolation platform was tuned and measured with the equipment in the IDLE state, with the floor and the DVIA-ML1000 platform both passing on the vertical, left-to-right, and front-to-back axes. The tuning request, vibration specification, per-axis Autospectrum plots, and the installation photo are published.
YIMO TECH Thermo Fisher Scientific Apreo 2S SEM DVIA-ML1000 Installation Report
YIMO TECH Thermo Fisher Scientific Apreo 2S SEM DVIA-ML1000 installation report — following installation at Shizuishan for end user Ningxia Orient Tantalum Industry Co. Ltd., the DVIA-ML1000 active vibration isolation platform meets the VC-F vibration specification (the floor fails on vertical, left-to-right, and front-to-back, while the DVIA-ML1000 platform passes all three axes). The tuning request form, per-axis VC Curves, and the installation photo are published.
Tier-1 Semiconductor Giheung ZEISS Xradia 520 Versa DVIA-ML3000 (260319R2) Installation Report
DVIA-ML3000 (260319R2) installation report at Tier-1 Semiconductor Giheung campus S1 Line, 1F laboratory — ZEISS X-ray Microscope Xradia 520 Versa. VC-C equipment spec; B&K Front End Type 3040-A-040 with Pulse Labshop22 and a PCB 393B05 accelerometer; per-axis VC Curves and Autospectrum for vertical, left-to-right, and front-to-back; standard Reference vibration criteria as a markdown table.
YDRICQS Thermo Fisher Scientific Helios 5CX FIB-SEM DVIA-ML1000 Installation Report
YDRICQS (Quantum Science and Technology Yangtze River Delta Industrial Innovation Center, Suzhou, China) Thermo Fisher Scientific Helios 5CX FIB-SEM DVIA-ML1000 installation report — the active isolation platform meets the VC-F vibration specification on all axes (floor fails only on vertical; the DVIA-ML1000 platform passes vertical, left-to-right, and front-to-back). Per-axis Auto Spectrum and VC curves, the client tuning request form, and the installation photo are published.
Changdi New Materials Technology Hitachi High-Tech SU3800SE FE-SEM DVIA-ML1000 Installation Report
Changdi New Materials Technology (Shanghai, China) Hitachi High-Tech SU3800SE FE-SEM DVIA-ML1000 installation report — the active isolation platform meets the vibration specification on all axes (floor fails on vertical while passing left-to-right and front-to-back; the DVIA-ML1000 platform passes all axes); vertical/left-to-right/front-to-back autospectrum and equipment photo published.
BIEL Crystal Thermo Fisher Scientific Helios 5 FIB-SEM DVIA-ML1000 Installation Report
BIEL Crystal (Huizhou, Guangdong, China) Thermo Fisher Scientific Helios 5 FIB-SEM DVIA-ML1000 installation report — the active isolation platform meets the vibration specification on all axes (floor fails only on vertical while the DVIA-ML1000 platform passes vertical, left-to-right, and front-to-back). Vertical/Left-to-Right/Front-to-Back VC curves and the client tuning request form are published.