DVIA-ML Series
Active Control.Absolute Stillness.
90% vibration isolation at 1 Hz in 6 Degrees of Freedom. Engineered for electron microscopes that image at the nano scale.
Your electron microscope deserves zero disturbance.
The DVIA-ML doesn't just reduce vibration. It eliminates it. Advanced sensors detect floor disturbances as low as 0.3 Hz. Adaptive algorithms respond in 0.5 ms. And electromagnetic actuators generate the exact opposing force so your imaging stays flawless, every time.
Engineered for the world's
most demanding instruments.
The DVIA-ML series delivers VC-B to VC-G vibration criteria across all four supported metrology domains.
Every application demands a different isolation strategy — the DVIA-ML series adapts to each.
SEM
Scanning Electron Microscopy
Nano-surface imaging without drift
Floor vibrations cause image drift and blur at magnifications above 50,000×. The DVIA-ML cancels disturbances from 0.5 Hz, keeping electron beams precisely on target for artifact-free SEM imaging.
Supported Manufacturers
Thermo Fisher · Zeiss · JEOL · Tescan · Hitachi · CIQTEK
TEM
Transmission Electron Microscopy
Atomic resolution. Zero mechanical noise
HRTEM and STEM modes demand sub-angstrom stability. Building vibrations — even imperceptible ones — destroy lattice fringe contrast. The DVIA-ML provides the mechanical silence these instruments require.
Supported Manufacturers
Thermo Fisher · JEOL · Hitachi · Tescan · CIQTEK
XRM
X-Ray Metrology
Precision diffraction. Clean peaks
X-ray diffraction, reflectometry, and fluorescence all require vibration-free sample positioning. The low-frequency vibrations broaden diffraction peaks and distort thin-film measurements. The DVIA-ML restores data integrity.
Supported Manufacturers
Bruker · Zeiss
EBL
Electron Beam Lithography
Precision lithography. Flawless patterns.
Electron beam lithography requires vibration-free sample positioning. Micro-vibrations cause beam drift, increasing line-edge roughness and distorting nanoscale patterns. The DVIA-ML ensures exact pattern transfer and pattering integrity.
Supported Manufacturers
Raith · JEOL
NMR
NMR Spectroscopy
Magnets protected. Spectra preserved
Superconducting magnets at 600–1200 MHz are hypersensitive to building vibrations. Floor motion degrades shim stability and spectral resolution. The DVIA-ML isolates the entire magnet assembly from floor vibration at all frequencies.
Supported Manufacturers
Bruker · Jeol
DVIA-ML Installation Guide
Loading video...
Feedback corrects. Feedforward anticipates.
Feedback measures vibration on the isolated mass and counters it in real time. Feedforward reads the floor and cancels disturbances before they arrive. Together, they deliver exceptional low-frequency isolation. Your instruments operate as if the vibration doesn't exist.
How it works
Passive Isolation (Spring & Damper):
Without active controls, the spring (k) and damper try to absorb shocks. However, at low frequencies, they can actually amplify the floor disturbance (d), causing the mass to resonate.
Feedforward Control:
Leverages ground sensor data to proactively command the actuators, nullifying floor vibrations before they reach the isolated mass.
Feedback Control:
Continuously measures the isolated mass's residual vibration (y) and uses the actuators to counteract it in real time.
Together, these advanced control mechanisms significantly enhance isolation performance, keeping the mass nearly perfectly still!
System Controls
Toggle to observe how feedback and feedforward mechanisms counteract low-frequency floor vibrations.
Floor Disturbance
Simulate low-frequency vibration
Feedforward Control
Proactive floor sensing
Feedback Control
Reactive mass correction
Every detail engineered
for nanoscale precision.
Stage 1: Raw Input
Extremely subtle micro-vibrations are captured by the sensors. Due to their low amplitude, they are easily lost amidst ambient noise.
Stage 2: Hardware Amp
The DVIA-ML unit applies analog gain to boost the entire signal. Both the desired low-frequency wave and the high-frequency noise are amplified.
Stage 3: Software Filter
Advanced digital algorithms isolate and retain only frequencies down to 0.3 Hz, entirely stripping away the noise to leave a clean, readable sine wave.
Detection from 0.3 Hz.
A hardware amplifier boosts low-frequency gain.
A digital filter refines the signal. Together, they extend
accurate detection and isolation down to 0.3 Hz.
Responds before you notice.
A floating-point DSP delivering 1800 MFLOPS
processes vibration data in real time.
Response time: 0.5 ms. By the time vibrations reach
your microscope, it's already been cancelled.
Detects the imperceptible.
11 Geophone velocity sensors with 2.55 V/in/s sensitivity and just 0.15% distortion. They capture low frequency vibrations other systems miss entirely so the DVIA-ML can cancel what it can't ignore.
Six axes. Zero compromise.
The DVIA-ML controls all six degrees of freedom. Three translational, three rotational. No vibration path goes uncorrected. Its algorithm decouples each axis independently, eliminating cross-coupling. Sub-micron translational and sub-microradian angular stability, maintained simultaneously.
Magnetically silent.
Less than 0.05 μT magnetic field. Electron beams are sensitive to the smallest magnetic interference. The DVIA-ML is engineered to be magnetically silent — your beam stays true, your images stay sharp.
173 mm. Full performance,
minimal footprint.
The lowest profile in its class. Full isolation performance in space-constrained EM rooms that your tallest microscopes get full clearance without compromise.
Outperforms. Everything.
Isolation from 0.5 Hz.
User Interface.
Monitor. Log. Verify data.
The DVIA-ML UI displays real-time vibration levels, actuator response, and sensor output across all six axes. Every data can be automatically logged. Review historical trends, export reports, or verify isolation performance at any time. No hidden processes. No black-box algorithms. Your facility team sees exactly what the system is doing, why it's responding, and how it's performing against specification.
Transmissibility Curve
Auto Spectrum
VC Curves
Sensors and Actuators
Your microscope. Your platform.
Every electron microscope is different. The DVIA-ML is engineered to match yours.
We review your instrument specifications, floor conditions, and facility constraints. Dimensions, weight distribution, mounting interfaces, load paths, and cable routing are configured before manufacturing begins. No on-site modifications. No compromises to isolation performance.
Glacios 2
Thermo Fisher Scientific
Tecnai TF20
Thermo Fisher Scientific
Krios G4
Thermo Fisher Scientific
Spectra
Thermo Fisher Scientific
Specifications
| Model | DVIA-ML1000 | DVIA-ML3000 |
|---|---|---|
| Dimensions | Customizable | |
| Maximum Load Capacity | 1700kg | 3000kg |
| Vibration Isolation Technology | Feedback and Feedforward Control | |
| Degrees of Freedom | 6 (X, Y, Z, θx, θy, θz) | |
| Active Isolation Bandwidth | 0.5 – 200 Hz | |
| Vibration Isolation | 80 – 90% at 1 Hz | |
| Actuator | Electromagnetic Actuator | |
| Maximum Actuator Force | Vertical 40 N, Horizontal 20 N | |
| Vibration Sensor | Geophone, Sensitivity: 2.55 V/in/s (100.4 V/m/s) ± 10% | |
| Leveling Repeatability | Repeatability: ± 0.1 mm | |
| Controller | Built-in | |
| Environmental Protection | CE and TUV | |
| Power Requirements | Line Voltage: 100 – 260V AC, Line Frequency: 50/60 Hz | |
| Air Requirements | Air Pressure: 4 – 6 bar, Air Delivery: 10 L/min | |
| Environmental Requirements | Temperature: 5 – 50 °C, Humidity: 20 – 90 % | |
Case Studies
Proven in the field. Installed in the world's most advanced semiconductor, aerospace, and research facilities.
Every system measured and verified on-site.
YIMO Naura Nanchang Hitachi SU8600 DVIA-ML1000 (240513R2) Installation Report
DVIA-ML1000 installation report (serial 240513R2) for Hitachi SU8600 FE-SEM via YIMO, Nanchang, for Naura Microelectronicst.
NM-TECH Moscow Thermo Fisher Helios Nanolab 450 DVIA-ML1000 (240719R3-2) Installation Report
DVIA-ML1000 installation report (serial 240719R3-2) for Thermo Fisher Helios Nanolab 450 FIB-SEM at NM-TECH, Moscow Zelenograd.
GUANGZHOU GRG Metrology Thermo Fisher Scientific Talos TEM DVIA-ML3000 Installation Report
DVIA-ML3000 vibration isolation tuning and vibration measurement report for a Thermo Fisher Scientific Talos TEM (serial 260128R4) for GUANGZHOU GRG METROLOGY & TEST CO., LTD. in Zhejiang, China.
Hitachi SU8700 FE-SEM DVIA-ML1000 (230320R1) Installation Report
DVIA-ML1000 installation report (serial 230320R1) for a Hitachi SU8700 FE-SEM at Shanghai Jiao Tong University, Shanghai, China. Overview states the platform is appropriately installed and functioning as intended. Vibration specification is given as a diagram; tuning request N/A; measurement summary compares floor vs DVIA-ML1000 with equipment turned on/IDLE; UI-program VC, autospectrum, and transmissibility plots per axis; equipment photo; Reference uses the standard Generic Vibration Criteria markdown table.
Kunshan DeKaiYiTe ZEISS Sigma 360 DVIA-ML1000 (260110R1-2) Installation Report
DVIA-ML1000 installation report (serial 260110R1-2) for ZEISS FE-SEM Sigma 360 at Kunshan DeKaiYiTe. Tuning March 20, 2026; report April 7, 2026. Engineer Chaewon Lee (DAEIL SYSTEMS). Equipment condition per report: The equipment is turned on/IDLE. Measurement summary: floor FAIL vs platform PASS all axes; vibration specification per UI (item 9). Published: vibration specification capture, VC / Autospectrum / Transmissibility per axis, equipment photo. Reference is the standard Generic Vibration Criteria markdown table only.
Tier-1 Semiconductor Hwaseong ZEISS Xradia 730 Versa DVIA-ML3000 (251107R2) Installation Report
DVIA-ML3000 (251107R2) installation report at Tier-1 Semiconductor Hwaseong campus — ZEISS X-ray Microscope Xradia 730 Versa. VC-C equipment spec; UI VC / Autospectrum / Transmissibility for vertical, left-to-right, and front-to-back; standard Reference vibration criteria as a markdown table.
KYKY SEM EM-8200 DVIA-ML1000 (250107R5) Installation Report
DVIA-ML1000 installation report (serial 250107R5).
Gränges Aluminum Thermo Fisher Spectra 200 DVIA-ML3000 (250211R4-1) Installation Report
DVIA-ML3000 installation report for Thermo Fisher Scientific Cryo-STEM Spectra 200 at Gränges Aluminum in Shanghai, China (serial 250211R4-1). UI-program VC, autospectrum, and transmissibility plots for vertical, left-to-right, and front-to-back axes; measurement summary includes PASS/FAIL versus VC criteria.
TESCAN Korea LeWest City TESCAN Amber FIB-SEM DVIA-ML1000 Installation Report
TESCAN Korea Demo room — TESCAN Amber FIB-SEM on DVIA-ML1000 (SN 260212R2-1).
Hitachi SU3800 SEM DVIA-ML1000 (241016R4) Installation Report
DVIA-ML1000 installation report (serial 241016R4) for Hitachi SU3800 SEM. Overview states the platform is appropriately installed and functioning as intended. Prepared for and location are N/A on the form; measurement summary compares floor vs DVIA-ML1000 with equipment turned on/IDLE. Vibration specification is given as a diagram; tuning request N/A; UI-program VC, autospectrum, and transmissibility plots per axis; equipment photo; Reference uses the standard Generic Vibration Criteria markdown table.
Thermo Fisher Scientific Helios 5 FIB-SEM DVIA-ML1000 Installation Report
TFS Helios 5 on DVIA-ML1000 (250904R2) — see report for HWL / VC spec summary.
Covis Technology AID Robotics DVIA-ML1000S & DVIP-B Installation Report
AID Robotics 1F — DVIA-ML1000S and DVIP-B (SN 260108R1).
Hitachi SEM Hitachi SU3800SEPlus DVIA-ML1000 (250304R4) Installation Report
DVIA-ML1000 installation report (serial 250304R4).
QRT DVIA-ML3000 (251111R3) Installation Report — 2026.01.26
DVIA-ML3000 (serial 251111R3) at Korea Institute of Nano Technology, 1F QRT lab, for customer QRT. Measurement date and report date 26.01.26; engineer 이채원. Equipment installed and Turned Off during the reported work; B&K LAN-XI 3050 and PCB 393B05 accelerometer; VC / Autospectrum / Transmissibility plots vertical, left-to-right, and front-to-back; equipment specification as published figure; measurement summary table; Reference as a markdown Generic Vibration Criteria table.
Hitachi HT7800 TEM DVIA-ML1000 Installation Report (2nd visit 2026-01-21)
SN 250912R5 — 2nd tuning; Hitachi HT7800 TEM. UI program plots (7 figures).
ZEISS Sigma 300 FE-SEM DVIA-ML1000 Installation Report (YIMO, 2026-01-13)
YIMO-format report — SN 250923R2, ZEISS Sigma 300 FE-SEM. Vibration spec diagram, UI Autospectrum and Transmissibility (Z / L–R / F–B) plus equipment photo.
YIMO ZEISS FIB-SEM Crossbeam 550 DVIA-ML1000 (240603R6) Installation Report
DVIA-ML1000 installation report (serial 240603R6) for ZEISS FIB-SEM Crossbeam 550 via YIMO. Overview matches the published form. Equipment condition: The equipment is turned on/IDLE. The source has no measurement summary table. Tuning Request field is blank (N/A). Published figures: vibration specification UI capture plus vertical, left-to-right, and front-to-back autospectrum and transmissibility from the UI program; decorative header raster omitted. Equipment picture is marked Photo Not Allowed in the handout (no equipment image published). Reference uses the standard Generic Vibration Criteria markdown table only (reference EMF not republished).
ZEIS FIB-SEM Crossbeam 550 DVIA-ML1000 (241104R1) Installation Report
DVIA-ML1000 installation report (serial 241104R1).
Tier-1 Semiconductor Cheonan C5 ZEISS Versa Xradia 630 Versa DVIA-ML3000 (250917R1) Installation Report
DVIA-ML3000 installation report (serial 250917R1) for the ZEISS X-ray microscope Versa Xradia 630 Versa at Tier-1 Semiconductor Cheonan campus C5 Analysis Room 3. Tuning and vibration checks ran with the tool Turned On / IDLE; vibration curves are omitted from the customer-facing report under export restrictions, but the published equipment vibration specification capture from the handout is included. Reference uses the standard Generic Vibration Criteria markdown table only.
Tier-1 Semiconductor Cheonan C5 ZEISS Versa Gemini SEM 460 DVIA-ML1000 Installation Report
Tier-1 Semiconductor Cheonan C5 — ZEISS Versa Gemini SEM 460 on DVIA-ML1000 (SN 251015R4). Per customer data-handling policy, the public case is text only: no measurement plots and no report imagery.
Tier-1 Semiconductor Icheon ZEISS Xradia 730 Versa DVIA-ML3000 (250903R5) Installation Report
DVIA-ML3000 (250903R5) installation report at Tier-1 Semiconductor Icheon campus P&T1 — ZEISS X-ray Microscope Versa 730. Equipment specification diagram from the report UI; VC / Autospectrum / Transmissibility for vertical, left-to-right, and front-to-back; standard vibration criteria as a markdown table.
Safran JEOL JSM-IT800 DVIA-ML1000 Installation Report
Safran Transmission System LAB, Colombes — JEOL JSM-IT800 on DVIA-ML1000 (250829R2).
ZEISS Sigma 360 FE-SEM DVIA-ML1000 Installation Report (Transmissibility)
DVIA-ML1000 SN 250828R5 — ZEISS Sigma 360; report contains transmissibility plots (Z/X/Y).
Nano Convergence Technology Institute ZEISS X-ray Microscope Versa 630 Installation Report
DVIA-ML3000 (serial 250805R2) installation report for the Nano Convergence Technology Institute 4F Line with a ZEISS X-ray Microscope Versa 630. Equipment specification is shown as a diagram; measurement summary compares floor versus DVIA-ML3000 in Turned on/IDLE state. VC, autospectrum, and transmissibility plots per axis; Reference uses the standard Generic Vibration Criteria markdown table.
Wuxi YIDONG YF-1801 FE-SEM DVIA-ML1000 Installation Report (2025-12-09)
YIMO partner site — YIDONG YF-1801; DVIA-ML1000 250912R5 (1st). Transmissibility-focused set.
ZEISS FE-SEM Sigma 360 DVIA-ML1000 (241108R2-1) Installation Report
DVIA-ML1000 installation report (serial 241108R2-1).
Hitachi SU8600 FE-SEM DVIA-ML1000 Installation Report (YIMO, 2025-12-01)
YIMO-format report — SN 250912R6, Hitachi SU8600 FE-SEM. Transmissibility plots (Z / L–R / F–B); equipment photo not permitted on site.
Gedeon Richter JEOL JSM-IT500HR DVIA-ML1000 Installation Report
Gedeon Richter lab — JEOL SEM JSM-IT500HR on DVIA-ML1000 (250829R1).
YIMO ZEISS FE-SEM Sigma 560 DVIA-MB1000 (231220R2) Installation Report
DVIA-MB1000 installation report — ZEISS FE-SEM Sigma 560 (serial 231220R2) via YIMO. Overview states the platform is appropriately installed and functioning as intended. Prepared for, end user, and location are not filled on the published form (N/A). Equipment condition: The equipment is installed/IDLE. Tuning request field is blank (N/A). Transmissibility plots (vertical, left to right, front to back), on-site equipment photo, and Reference with Generic Vibration Criteria as a markdown table (reference EMF omitted).
DVIA-ML1000 (241016R7) Installation Report
DVIA-ML1000 installation report (serial 241016R7).
Institute of Microsystems Thermo Fisher Scientific Talos F200 DVIA-M3000 (250708R7) Installation Report
DVIA-M3000 (250708R7) installation report at the Institute of Microsystems with a Thermo Fisher Scientific Talos F200 TEM: tuning request capture, transmissibility results for vertical, left-to-right, and front-to-back axes, equipment photo, and generic vibration criteria as a markdown table.
Tier-1 Semiconductor Raith Voyager Installation Report
DVIA-ML3000 installation and vibration measurement for a Raith Voyager electron beam lithography system.
Tier-1 Semiconductor Thermo Fisher Scientific S/TEM Spectra 300 DVIA-ML3000 (241119R1) Installation Report
DVIA-ML3000 installation report (serial 241119R1) for Thermo Fisher Scientific S/TEM Spectra 300 via YIMO at Tier-1 Semiconductor, Beijing. Overview states the platform is appropriately installed and functioning as intended. Second tuning trial; tuning and report written September 15, 2025. Equipment condition: The equipment is Turned on/IDLE. The published handout has no separate vibration specification or measurement summary table. Tuning Request field is blank (N/A). Data and Image publishes vertical, left-to-right, and front-to-back transmissibility and an on-site equipment photo; Reference uses the standard Generic Vibration Criteria markdown table only (reference vector graphic not republished).
DVIA-ML1000 (241120R5) Installation Report
DVIA-ML1000 installation report (serial 241120R5).
DVIA-ML1000 (250227R2) Installation Report
DVIA-ML1000 installation report (serial 250227R2).
Beijing Academy of Quantum Information Sciences Omicron STM DVIA-M1000 / M1000F (230905R3) Installation Report
DVIA-M1000 (serial 230905R3) with Omicron STM at Beijing Academy of Quantum Information Sciences — M1000F internal program plots for Vertical, Left to Right, and Front to Back.
Tier-1 Semiconductor DSR ZEISS Versa 630 X-ray Microscope DVIA-ML3000 (250625R2) Installation Report
DVIA-ML3000 (250625R2) installation report — Tier-1 Semiconductor DSR A Tower 5F analysis lab, ZEISS X-ray Microscope Versa 630. Equipment vibration specification as published UI capture; VC / Autospectrum / Transmissibility (merged strip pairs where required); Generic Vibration Criteria as markdown table.
Supergravity Laboratory QIYUE SS-HV800 FIB-SEM DVIA-M3000 (240612R3) Installation Report
DVIA-M3000 (240612R3) installation report — Supergravity Laboratory, Hangzhou, China; QIYUE TECHNOLOGY FIB-SEM SS-HV800. Published Transmissibility plots (Vertical, Left to Right, Front to Back), Tuning Request capture, and equipment photograph. Generic vibration criteria presented as markdown table.
Vertilite Raith E-beam Lithography DVIA-M3000 (241213R1) Installation Report
DVIA-M3000 (241213R1) installation report at Vertilite (Changzhou, China) for a Raith E-beam lithography system: tuning request capture, vertical/left-to-right/front-to-back transmissibility plots, equipment photo, and generic vibration criteria as a markdown table.
Institute of Geodesy and Geophysics Thermo Fisher TEM Spectra 300 DVIA-ML3000 Installation Report
DVIA-ML3000 (240423R5) installation report at the Institute of Geodesy and Geophysics, Beijing — Thermo Fisher TEM Sprectra 300. Report documents axis transmissibility plots and equipment photography; standard reference vibration criteria are provided as a markdown table.
Tier-1 Semiconductor Cheonan C5 ZEISS X-ray Microscope Versa 630 DVIA-ML3000 (250225R3) Installation Report
DVIA-ML3000 installation report (serial 250225R3) for ZEISS X-ray Microscope Versa 630 at Tier-1 Semiconductor Cheonan Campus C5. June 2, 2025 tuning and vibration measurement; report written June 9, 2025. Equipment condition 장비 Turned on/IDLE. Manufacturer vibration limits via specification capture; VC / Autospectrum / Transmissibility plots by axis. Distinct conclusion notes X-ray image quality before and after isolator tuning. Reference uses the standard Generic Vibration Criteria markdown table only (no separate reference graphic).
POSTECH Raith Voyager Installation Report
DVIA-ML3000 (250103R2-1) installation report at POSTECH — Raith Voyager electron-beam lithography. Equipment specification diagram, VC / Autospectrum / Transmissibility by axis, equipment photo, and standard Reference vibration criteria as a markdown table.
LSU Thermo Fisher S/TEM Spectra 200 Installation Report
DVIA-ML3000 installation report for LSU with Thermo Fisher Scientific S/TEM (model as listed in the report). Published measurement graphics: transmissibility plots per axis.
Jeonbuk National University Raith Voyager DVIA-ML3000 Installation Report
DVIA-ML3000 installation report at Jeonbuk National University with Raith Voyager electron beam lithography. Published graphics include vibration specification capture, VC/autospectrum/transmissibility plots per axis, and equipment photo.
Tier-1 Semiconductor Cheongju M11 ZEISS X-ray Microscope Xradia 630 Versa DVIA-ML3000 (250225R2) Installation Report
DVIA-ML3000 installation report (serial 250225R2) for ZEISS X-ray Microscope Xradia 630 Versa at Tier-1 Semiconductor Cheongju 3 Campus M11. March 31, 2025 tuning and vibration measurement; report written April 1, 2025. Equipment condition 장비 Turned on/IDLE. Manufacturer vibration limits via specification capture; VC / Autospectrum / Transmissibility plots by axis. Conclusion notes all axes meet specification and attributes somewhat lower measured high-frequency performance to internal motor-related vibration influences. Reference uses the standard Generic Vibration Criteria markdown table only (no separate reference graphic).
DVIA-ML1000 (241107R5) Installation Report
DVIA-ML1000 installation report (serial 241107R5).
DVIA-ML1000 (241223R3) Installation Report
DVIA-ML1000 installation report (serial 241223R3).
Fudan University JEOL STEM ARM200 DVIA-ML3000 (241021R4) Installation Report
DVIA-ML3000 installation report (serial 241021R4) at Fudan University for the JEOL STEM ARM200 in Shanghai. Tuning date March 4, 2025. Equipment condition documented as installed and turned off. The handout publishes a tuning-request capture plus vertical, left-to-right, and front-to-back transmissibility plots from the measurement UI, one on-site equipment photo, and Reference as the standard VC criteria markdown table (the reference figure is not republished).
POSTECH Raith Voyager Installation Report
DVIA-ML3000 active vibration isolation installation and vibration measurement summary for the Raith Voyager electron beam lithography system at POSTECH, including floor vs platform results and VC / autospectrum / transmissibility plots.
DVIA-ML1000S (241008R1) Installation Report
DVIA-ML1000S installation report (serial 241008R1).
Tier-1 Semiconductor Cheonan C5 ZEISS Crossbeam 550 FIB-SEM DVIA-ML1000 (240710R2) Installation Report
DVIA-ML1000 installation report (serial 240710R2) for ZEISS FIB-SEM Crossbeam 550 at Tier-1 Semiconductor Cheonan C5. Overview describes on-site tuning and vibration measurement with the tool in IDLE after placement; measurement setup and equipment vibration limit VC-E appear in the specification capture. Measurement Summary includes a vertical floor line FAIL with platform PASS; horizontal axes PASS. Published plots: vibration specification capture, VC / Autospectrum / Transmissibility by axis. Reference uses the standard Generic Vibration Criteria markdown table only (no separate reference graphic).
ZEISS Crossbeam350 FIB-SEM DVIA-M1000 (231128R3) — Tier-1 Semiconductor installation worksheet
DVIA-M1000 abbreviated worksheet for serial 231128R3. Dates on the form: setup 24.08.28 and reporting 24.09.09; measurement date 2024.08.28 (Wednesday) with operator Chaewon Lee from DAEIL SYSTEMS. Target equipment ZEISS Crossbeam350 FIB-SEM; Place of installation, END USER, Place of measurement, and Equipment Model are blank on the source form and are published as N/A. Overview follows the standard DVIA-M1000 sentence plus in-form metadata and Manufacturer / Equipment / Model lines (ZEISS / FIB-SEM / Crossbeam350). The section title reads “M1000 internal program performance measurement result”; published plots are Vertical, Left to Right, and Front to Back. Decorative graphics under “M1000_ 231128R3 Set-up” before the worksheet body are omitted from public copy.
Fuzhou University Thermo Fisher Scientific Talos TEM DVIA-M-THT3 Installation Report
Internal program performance measurement for a Thermo Fisher Scientific Talos TEM on DVIA-M-THT3 (serial 240201R4) for Fuzhou University.
TESCAN Solaris GMH FIB-SEM DVIA-M1000 (230509R6-3) — Pengxin Micro, 2024-01-31
Pengxin Micro — TESCAN Solaris GMH FIB-SEM on DVIA-M1000 serial 230509R6-3. M1000 internal program performance measurement (Z / X / Y) from the 2024.01.31 handout.
Trina Solar sigma300 DVIA-ML1000 (230602R3) Installation Report
DVIA-ML1000 handout (serial 230602R3) for sigma300 at Trina Solar, Changzhou. Published tables and overview match the form; cover/header rasters are omitted. M1000 internal program performance plots are shown for the Z, X, and Y axes. Reference uses the standard Generic Vibration Criteria markdown table only.
Jiangsu Shekoy Semiconductor New Materical NX5000En DVIA-M3000 (220919R4-2) Installation Report
DVIA-M3000 abbreviated worksheet for serial 220919R4-2 (source M3000_220919R4-2_23.09.20.docx). Target equipment NX5000En with END USER Jiangsu Shekoy Semiconductor New Materical Co., Ltd.; installation place Yixing; setup and reporting dated 23.09.20 and 23.09.21 per the form; operator Jongwon Park; measurement dated 2023.09.20 (Wednesday). Overview sentence as printed. Internal-program plots use axis labels Z axis, X axis, and Y axis under the M3000 internal program caption. Decorative bitmap embedded under the company header line was omitted from the public page.
ZEISS Crossbeam 350 DVIA-ML1000 Installation Report (221221R3, Shenzhen)
DVIA-M1000 handout (serial 221221R3) for ZEISS Crossbeam 350 at Shenzhen. Published tables and overview match the form; cover/header decoration is omitted. M1000 internal program performance plots are shown for the Z, X, and Y axes.
Shanghai University Thermo Fisher SEM DVIA-ML1000 Installation Report
Historical handout installation record (220106R8, Aug 2023): Thermofisher SEM on DVIA-ML1000 at Shanghai University — overview, setup dates, and M1000 internal-program Z/X/Y performance plots.
UNISOKU STM DVIA-M3000 Installation Report (Beijing)
Vibration measurement summary for a UNISOKU STM on a DVIA-M3000 at the Institute of Physics, Chinese Academy of Sciences (Beijing).
Shanghai Institute DVIA-MO3000 (220330R5-2) Installation Report
DVIA-MO3000 installation report (serial 220330R5-2) for a three-axis vibration exciter at Shanghai Institute of Technology and Technology, China. Includes vibration transmissibility summary table (2–10 Hz) for Z/X/Y and UI plots for vertical, left-to-right, and front-to-back transmissibility, plus on-site equipment photos.
Self-made SEM DVIA-ML1000 Installation Report (Zhejiang Qiyue Technology, 230209R1, 2023-04-21)
Zhejiang Qiyue Technology Co., Ltd., Self-made SEM, serial 230209R1. MB1000 internal program and Octave Band Result plots (Z / X / Y).
Jiangsu Longda Superalloy DVIA-M1000 (220329R4) Installation Report (2023)
Compact worksheet — DVIA-M1000 serial 220329R4 at Jiangsu Longda Superalloy. Banner decoration omitted; published set-up photograph only. MB1000 internal-program section lists Z / X / Y headings without embedded VC or spectrum images in the file set. Reference uses the standard Generic Vibration Criteria markdown table.
Zhonghuan Advanced Semiconductor Materials Cameca IMS-6f-E7 DVIA-M3000 (210506R1) Installation Report
DVIA-M3000 abbreviated worksheet for serial 210506R1 (source M3000_210506R1_23.04.17.docx). Target equipment cameca_ims-6f-e7 with END USER Zhonghuan Advanced Semiconductor Materials Co., Ltd.; installation place YIXING; setup and reporting dated 23.04.17 per the form; operator Lee, Young Ha; measurement dated 2023.04.17 (Monday); DVIA-M3000 overview sentence as printed. Internal-program plots use axis labels Z axis, X axis, and Y axis under the MB3000 internal program caption. Decorative bitmap embedded under the company header line was omitted from the public page.
Sun Yat-sen University HITACHI SU8010 DVIA-M3000 (220126R7-2) Installation Report
DVIA-M3000 abbreviated worksheet for serial 220126R7-2 (source M3000_220126R7-2_23.04.12.docx). Target equipment HITACHI SU8010 with END USER Sun Yat-sen University; installation place GUANGDONG; setup and reporting dated 23.04.12 and 23.04.19 per the form; operator Yu, Ho Sang; measurement dated 2023.04.12 (Wednesday) with DAEIL SYSTEMS, Hosang Yu. Overview sentence as printed. MB3000 internal program section publishes Z, X, and Y axis plots only; the small bitmap in the header title block was treated as decorative and omitted from the public page.
GWM SU8600 DVIA-ML1000 Installation Report (2023-03-30)
JIANGSU — SU8600 on DVIA-ML1000 (SN 220629R1). Compact internal-program summary with Z / X / Y axis plots.
Sigma300 DVIA-M1000 Installation Report (Dongguan, 220607R1, 2022)
Short-field report — DVIA-M1000 220607R1 with Sigma300 at Dongguan: site tables, set-up photograph, and MB1000 internal-program Z / X / Y performance captures (measurement dated 2022.12.23).
RIGOL Crossbeam 350 DVIA-M1000 Installation Report (Suzhou, 2022-11-29)
SN 220907R4-2, Crossbeam 350 at RIGOL Suzhou — MB1000 internal-program measurement plots (Z / X / Y) plus setup image.
Sunway Sigma300 DVIA-M1000 (220125R1) Installation Report
DVIA-M1000 handout (serial 220125R1) for Sigma300 at Sunway (Yiyang) Communication, Hunan province. Published fields follow the worksheet; banner and title-block raster photos are omitted. MB1000 internal program performance graphs are shown for the Z, X, and Y axes. Reference uses the standard Generic Vibration Criteria markdown table only.
Sigma300 DVIA-M1000 Installation Report (Dongguan, 220118R5, 2022)
Short-field report — DVIA-M1000 220118R5 with Sigma300 at Dongguan: site tables, set-up photograph, and M1000 internal-program Z / X / Y performance captures.
Liangchen Biotechnology HT7800 DVIA-ML1000 Installation Report (220707R5)
DVIA-M1000 SN 220707R5 at Suzhou — HT7800 target equipment; MB1000 internal program plots and octave-band results from the installation report.
Shanghai Aladdin Biochemical Regulus8100 DVIA-M1000 setup report — Shanghai (DVIA-M1000, SN 211220R1)
Regulus8100 on DVIA-M1000 SN 211220R1 — Shanghai onsite performance check (2022-10-17). Z / X / Y captures from the M1000 internal program.
LASENSOR SEM5000 DVIA-M1000 Setup Report — Shanghai measurement (DVIA-M1000, SN 220726R5)
LASENSOR SEM5000 on DVIA-M1000 SN 220726R5 — Shanghai onsite performance check (2022-10-19). Z / X / Y captures from the M1000 internal program.
Shanghai Synchrotron Radiation Facility DVIA-M3000 Installation Report
Installation and vibration measurement report for a DVIA-M3000 at the Shanghai Synchrotron Radiation Facility, with Z / X / Y axis program measurement plots.
CSOT Wuhan HELIOS 5 UC DVIA-ML1000 Installation Report (220401R2, 2022-09-28)
CSOT Wuhan — HELIOS 5 UC on DVIA-M1000 (SN 220401R2). MB1000 internal program plots and octave-band results.
Zeiss GeminiSEM 360 DVIA-ML1000 Installation Report (Yancheng Fudi Battery, 2022-09-13)
DVIA-M1000 serial 220630R3 — Zeiss GeminiSEM 360 at YANCHENG. MB1000 internal program performance plots for Z / X / Y.
East China University of Science and Technology STM DVIA-ML3000 (211119R4) Internal Program Performance — 2022.09.01
DVIA-ML3000 serial 211119R4 — East China University of Science and Technology, target equipment STM, Shanghai. Overview and VC-Class summary match the published form; MB3000 internal program performance plots (Z, X, Y) and Octave Band Result plots (Z, X, Y) are from the UI program. Cover and header graphics before the overview block are not republished.
SJ SEMI ZEISS CROSSBEAM 350 DVIA-ML1000 Installation Report
Jiangyin — ZEISS CROSSBEAM 350 on DVIA-ML1000 (220407R5): MB1000 programme + octave-band plots (2022-09-01).
Hitachi SU8230 DVIA-M1000 Installation Report — Shanghai University / Guangzhou (2022-08-24)
Serial 220118R7, measurement 2022.08.24 — MB1000 internal program Z / X / Y performance captures (pre-Overview DOCX graphics omitted from the public page).
ZEISS SIGMA500 (Qingdao) DVIA-ML1000 Installation Report (SN 220308R4, Aug 2022)
Confidential mainland customer — ZEISS SIGMA500 reference line, Qingdao installation. SN 220308R4, setup 2022-08-01. MB1000 internal program plots (Z/X/Y), octave-band summaries, and instrumentation setup imagery.
Zeiss Gemini SEM360 DVIA-ML1000 Installation Report (220307R1)
Zeiss Gemini SEM360 on DVIA-M1000 (220307R1) in Shanghai — VC-class floor vs active summary and MB1000 program VC / octave-band plots.
Wenzhou Medical College JEOL F200 TEM DVIA-M3000 re-tuning report
Re-tuning and internal program vibration measurement memo for DVIA-M3000 with JEOL F200 TEM at Wenzhou Medical College (2022-06-09).
Amazon Web Services Elionix EBL DVIA-M3000 (210915R2) Installation Report — 2022.04.22
DVIA-M3000 (serial 210915R2) installation report dated 22 April 2022 for Elionix EBL at Amazon Web Services (form "Prepared for: AWS"). VC and transmissibility curves for vertical, left-to-right, and front-to-back axes on floor and active isolator, vibration results summary table, and Generic Vibration Criteria as a markdown Reference table. Decorative header bitmap and the standalone Reference criteria figure from the handout were omitted in favor of the site table.
KBSI (Ochang) MC3000 P20 / 210422R1 vibration worksheet — 2021.06.18
MC3000 serial 210422R1 (program P20) worksheet at Korea Basic Science Institute (Ochang): in-house developed equipment, measurement on 2021-06-17, report dated 2021-06-18. PULSE 14 setup, VC-Class summary table (Floor vs Above Active), wide-format measurement plots, and Z/X/Y vibration criterion curves.
YIMO TESCAN DVIA-MB1000 Installation Report — onsite measurement (SN 200521R4, 2020-12-04)
TESCAN tool on DVIA-MB1000 SN 200521R4 — YIMO program, measurement 2020-12-01, report 2020-12-04. Published imagery: on-site TESCAN equipment photo, then MB1000 internal program Z / X / Y plots and transmissibility summary table.
Beijing Software Testing DVIA-MB1000 Thermo Scientific Scios 2 Remote measurement — Internal program Z/X/Y plots (SN 191211R4 · P154) — 2020.08.28
DVIA-MB1000 serial 191211R4 (project P154) remote tuning handout dated 2020.08.28 for Thermo Scientific Scios 2 installed at Beijing Software Testing & QA Center for National Application Software Testing Labs. Published items follow Word order after the structured setup block; the JPEG under the `(MB1000_191211R4(P154) Set up)` banner is treated as decorative and excluded.
Hitachi Regulus a220 DVIA-ML3000 — MB1000 program P158 / 191211R2 (report 2020-06-23)
DVIA-ML3000 platform (serial 191211R2) with Hitachi Regulus a220 per the MB1000 program handout P158: onsite measurement 2020-06-19, report 2020-06-23. VC-Class summary cells are blank in the source form; Good omnidirectional performance statement; published imagery is the installation photograph plus MB1000 internal-program Z, X, and Y plots.
FEI SEM DVIA-MB1000 Installation Report — MB1000 P142, SN 190916R4 (2020.06.04)
MB1000 program P142 worksheet for an FEI SEM on DVIA-MB1000 serial 190916R4. Setup 2020-06-03; report 2020-06-04; operator Choi, HyoungMun (Daeil System). Publishes the on-site equipment photo, VC-Class summary table as issued (empty floor / above-active cells), the “Good omnidirectional performance.” line, and MB1000 internal-program plots for Z, X, and Y.
YIMO ZEISS Gemini Sigma 300 DVIA-MB1000 Installation Report (MB1000 P155, 2020-05-08)
CHINA YIMO_TECH worksheet for ZEISS Gemini Sigma 300 on DVIA-MB1000 (MB1000 P155), setup and report 2020-05-08. Published imagery: equipment photograph, then MB1000 internal-program Z / X / Y captures. Measurement summary VC-Class cells are empty in the source form.
FIBERHOME JEOL JSM-IT500 DVIA-MB1000 Installation Report — onsite measurement (SN 190423R1, 2019-12-03)
JEOL JSM-IT500 at FIBERHOME R&D Center on DVIA-MB1000 SN 190423R1 — measurement 2019-12-03, report 2019-12-05. Published imagery: MB1000 internal program Z / X / Y screens plus octave-band Z / X / Y plots (BASE: Floor, TOP: Above Active).
Handu Package MO1000 P20 vibration survey — Hirox microscope (Incheon Namdong)
On-site vibration environment check after MO1000 isolation-table setup at Handu Package (Incheon Namdong Industrial Complex): installed workstation photograph, floor vs table-top VC-Class comparison, remarks on isolator adjustments, and Z / X / Y VC-CLASS curves (25 Oct 2019).
DVIA-MB1000 SN 190117R3 — Internal program measurement graphics (2019-07-24)
DVIA-MB1000 serial 190117R3 internal-program plots: transmissibility (Z / X / Y), 1/3-octave-band spectra, displacement spectral density (Z / X / Y), and Z-axis displacement spectral density comparison (floor–chamber top, floor–isolator top, isolator top–chamber top).
Nissan Chemical Helios G4 UC DVIA-MB1000 Installation Report (SN 190531R3, 2019-06-27)
Helios G4 UC on DVIA-MB1000 serial 190531R3 at Nissan Chemical F1 — measurement 2019-06-24, report 2019-06-27. Published imagery: equipment photograph, MB1000 internal program Z / X / Y plots, and octave band (Floor vs Above Active) plots for each axis.
Nissan Chemical Helios G4 UC DVIA-MB1000 Installation Report — MB1000 P124 (2019-06-27)
China trip report for MB1000 project P124 at Nissan Chemical F1 with Thermo Fisher Scientific Helios G4 UC. Trip date 2019-06-24; report dated 2019-06-27. Published imagery: site/equipment photograph, MB1000 internal program Z / X / Y results, and vibration environment measurement Z / X / Y plots.
Ningbo University of Technology JEOL JEM-2100F DVIA-MB1000 Installation Report — SN 190410R2 (2019-05-20)
JEOL JEM-2100F on DVIA-MB1000 SN 190410R2 at Ningbo University of Technology — measurement 2019-05-15, report 2019-05-20. Published imagery: site equipment photo, MB1000 internal program Z / X / Y results, and octave-band Z / X / Y plots (floor vs above active).
Ningbo University of Technology JEOL JEM-2100F DVIA-M3000 MB1000 P126 China trip report — 2019.05.20
Trip worksheet MB1000_P126 dated 2019-05-20 for JEOL JEM-2100F at Ningbo University of Technology (Classroom building2 F1 2-101). Business trip 2019-05-15, operator Choi, Sung-won. Published items follow the source structure: equipment photograph on DVIA-M3000 base, VC-Class summary, magnetic-field AC/DC tables, MB1000 internal-program Z/X/Y captures, 1/3-octave vibration-environment Z/X/Y plots, and magnetic-field screen captures before and after compensation. The first raster embedded under the title line in the DOCX carried no usable figure content and is omitted.
Tier-1 Semiconductor STM (Omicron) MC3000_P7 vibration worksheet — 2018.12.03
WORKSITE worksheet for MAIN YANG MC3000_P7 (measurement 2018.11.30, report dated 2018.12.03): STM (Omicron) at Tier-1 Semiconductor–class fab redacted site, engineer Choi HyoungMun (DAEIL SYSTEMS). Publishes the MC3000 internal program VC-class graphs, octave-band curves (Floor vs Above Active), and acceleration spectra by axis.
Yonsei University Unisoki Low Temperature SPM USM1200 DVIA-ML1000 (240821R5) Installation Report
DVIA-ML1000 installation report (serial 240821R5) for Unisoki Low Temperature SPM USM1200 at Yonsei University Quantum Imaging Laboratory, Advanced Science and Technology Research Building. Tuning and vibration measurement on November 19, 2024; report dated November 21, 2024. Engineer Chaewon Lee (DAEIL SYSTEMS). Equipment status: 장비 설치 및 IDLE. Brüel & Kjær LAN-XI DAQ Type 3050 and PCB 393B05 accelerometer; measurement setup 200 Hz span, 800 lines, Hanning, m/s. Conclusion states all axes meet the vibration specification and notes amplification in some bands is inherent USM1200 vibration. Measurement summary PASS all axes. Published plots: vibration specification UI, VC / Autospectrum / Transmissibility for Vertical, Left to Right, and Front to Back, plus equipment photo. Reference uses the standard Generic Vibration Criteria markdown table only (no separate reference graphic).
Tier-1 Semiconductor Cheonan C5 ZEISS GeminiSEM 460 DVIA-ML1000 (240709R2) Installation Report
DVIA-ML1000 installation report (serial 240709R2) for ZEISS FE-SEM GeminiSEM 460 at Tier-1 Semiconductor Cheonan campus C5 building. Korean handout: tuning and vibration measurement on October 24, 2024; report written October 29, 2024. Equipment condition: 장비 설치 및 IDLE. Brüel & Kjær LAN-XI DAQ and PCB 393B05 accelerometer. Manufacturer equipment vibration specification as embedded figure; UI-program VC, Autospectrum, and Transmissibility by axis; onsite equipment photo; Reference uses the standard Generic Vibration Criteria markdown table only (no separate reference graphic).
Tier-1 Semiconductor ZEISS FE-SEM GeminiSEM 560 DVIA-ML1000 (240925R4) Installation Report
DVIA-ML1000 installation report — ZEISS FE-SEM GeminiSEM 560 (serial 240925R4) at a Tier-1 fab DSR laboratory. Overview and bus-related measurement context per the report. Equipment Status: Equipment installed and IDLE. Vibration specification as published screenshot; measurement setup text; Tuning Request N/A; conclusions for Active, Passive, and isolator-off states; three measurement-summary tables; VC / Autospectrum / Transmissibility plots for Active and Passive, and VC / Autospectrum for Turned off where the report omits transmissibility curves. Generic Reference vibration criteria as a markdown table (embedded reference figure omitted).
Tier-1 Semiconductor Hitachi SEM SU7000 DVIA-ML1000 (240919R8) Installation Report
DVIA-ML1000 installation report (serial 240919R8) for Hitachi SEM SU7000 at Tier-1 Semiconductor Cheonan campus (M15 4M laboratory). Field engineer Chaewon Lee; measurement January 3, 2025; report written January 8, 2025. Equipment condition (form): 장비 설치 및 Turned off. Measurement table status: 장비 설치/ Turned off. Equipment specification text: Horizontal: VC-G, Vertical: VC-F. Nine program plots under Data and Image (VC, Autospectrum, Transmissibility per axis). Reference uses the standard Generic Vibration Criteria markdown table only (embedded reference graphic not republished). Decorative header strip omitted from the public page.
Tier-1 Semiconductor Onyang ZEISS Crossbeam 550 FIB-SEM DVIA-M1000 (240726R3) Installation Report
DVIA-M1000 installation report (serial 240726R3) for a ZEISS Crossbeam 550 FIB-SEM at a Tier-1 Semiconductor Onyang Line 4 research laboratory. The Korean handout Overview describes tuning and vibration measurement with the equipment in the Turned off state, VC-curve data presentation, and reference materials for vibration levels. Date of measurement February 12, 2025; report written February 24, 2025. Engineers Chaewon Lee and Jonghwa Seo. Equipment condition verbatim from the form: 장비 설치 및 Turned off. Vibration specification is the embedded program capture; Measurement Summary matches the table in the source; axis VC / Autospectrum / Transmissibility plots from the UI; onsite equipment photo; Reference is the standard Generic Vibration Criteria markdown table only (no separate reference figure).
YIMO ZEISS FE-SEM Sigma 360 DVIA-MB1000 (241209R2) Installation Report
DVIA-MB1000 installation report — ZEISS FE-SEM Sigma 360 (serial 241209R2) via YIMO. Overview states the platform is appropriately installed and functioning as intended. End user and location are not filled on the published form (N/A). Equipment condition: The equipment is installed/Turned off. Tuning request field is blank (N/A). Transmissibility plots (vertical, left to right, front to back), on-site equipment photo, and Reference with Generic Vibration Criteria as a markdown table (reference graphic omitted; generic criteria image only).
YIMO Zeiss Technology (Suzhou) ZEISS EVO 10 SEM DVIA-M1000 (240304R8) Installation Report
DVIA-M1000 installation report (serial 240304R8) for ZEISS SEM EVO 10 at Zeiss Technology (Suzhou) Co., Ltd., Suzhou, China, via YIMO. Overview states the platform is appropriately installed and functioning as intended. Third tuning trial; tuning November 6, 2025; report written November 11, 2025. Equipment condition: The equipment is Turned on/IDLE. The published handout has no separate vibration specification section or measurement summary table. The Tuning Request heading has no embedded figure in the source. Data and Image publishes vertical, left-to-right, and front-to-back transmissibility followed by an on-site equipment photo; Reference uses the standard Generic Vibration Criteria markdown table only (EMF reference graphic not republished).
YIMO ZEISS FIB-SEM Crossbeam 550 DVIA-M1000 (240417R5) Installation Report
DVIA-M1000 installation report — ZEISS FIB-SEM Crossbeam 550 (serial 240417R5), YIMO field package. Overview states the platform is appropriately installed and functioning as intended. End user and installation location are not filled on the published form (N/A). Equipment condition: The equipment is installed. Published figures: UI-program Transmissibility (vertical, left-to-right, front-to-back) and on-site equipment photo; Reference uses the standard Generic Vibration Criteria markdown table (no separate reference graphic). The published handout has no Tuning Request section or separate vibration specification section.
Shenghe Jingwei ZEISS Crossbeam 350 FIB-SEM DVIA-M1000 (240409R2) Installation Report
DVIA-M1000 installation report — ZEISS FIB-SEM Crossbeam 350 (serial 240409R2) for Shenghe Jingwei in Jiangyin, China. Overview states the platform is appropriately installed and functioning as intended. The published form has no separate vibration specification section or measurement summary table. Equipment condition: The equipment is installed/IDLE. Tuning request as UI-program capture; vertical, left-to-right, and front-to-back transmissibility; on-site equipment photo; Reference uses the standard Generic Vibration Criteria markdown table.
YIMO Changshu Tenglong Special Steel Thermo Fisher Scientific Apreo 2C SEM DVIA-M1000 (240501R9) Installation Report
DVIA-M1000 installation report (serial 240501R9) for Changshu Tenglong Special Steel in Changshu, China, via YIMO. Overview states the platform is appropriately installed and functioning as intended. Thermo Fisher SEM Apreo 2C; the published form has no separate vibration specification section or measurement summary table. Equipment condition: The equipment is installed / IDLE. Tuning request UI capture; vertical, left-to-right, and front-to-back transmissibility; on-site equipment photo; Reference uses the standard Generic Vibration Criteria markdown table (no separate reference graphic).
YIMO BYD Semiconductor ZEISS Crossbeam 550 FIB-SEM DVIA-M1000 (240314R6) Installation Report
DVIA-M1000 installation report — ZEISS FIB-SEM Crossbeam 550 (serial 240314R6) for BYD Semiconductor in Chengdu, China. Overview states the platform is appropriately installed and functioning as intended. The published form has no separate vibration specification section or measurement summary table. Equipment condition: The equipment is installed. Tuning request as UI-program capture; vertical, left-to-right, and front-to-back transmissibility; on-site equipment photo; Reference uses the standard Generic Vibration Criteria markdown table.
Henkel Hitachi SU3800 SEM DVIA-ML1000 (250423R3) Installation Report
DVIA-ML1000 installation report — Hitachi SEM SU3800 (serial 250423R3) at Henkel Adhesive Technologies India Private Limited, 6th floor SEM room. Overview states the DVIA-ML1000 functions properly as intended. The report embeds distinct figures under Vibration Specification and under each Data & Images subheading on the form sequence: Narrow Band displacement plots (“Vibration (Narrow Band)”), VC-referenced velocity “Vibration” plots by axis, and transmissibility by axis from the measurement software; onsite equipment portrait; Generic Vibration Criteria table as Reference.
Shanghai Jiao Tong University Hitachi SU8700 FE-SEM DVIA-ML1000 (230320R1) Installation Report
DVIA-ML1000 installation report — Hitachi FE-SEM SU8700 (serial 230320R1) at Shanghai Jiao Tong University, Shanghai. Overview states the platform is appropriately installed and functioning as intended. Vibration specification is shown as the specification figure in the form; Measurement Summary PASS for floor versus DVIA levels by axis at 3.15 Hz aligned with the table in the source report. VC / Autospectrum / Trans plots from the UI program, onsite equipment photo, and the standard VC criterion table published as Markdown in Reference.
YIMO ZEISS FE-SEM Sigma 560 DVIA-ML1000 (250611R3) Installation Report
DVIA-ML1000 installation report — ZEISS FE-SEM Sigma 560 (serial 250611R3). Overview states the platform is appropriately installed and functioning as intended. Prepared for, End User, and Location are N/A on the form. Equipment condition: The equipment is installed/IDLE; Tuning Request N/A. UI-program transmissibility (vertical, left-to-right, front-to-back), on-site equipment photo; Reference uses the standard Generic Vibration Criteria markdown table. No vibration specification section and no measurement summary table on the published form.
Thermo Fisher Scientific TFS Helios (Brigham Young University) DVIA-ML1000 (250708R4-3) Installation Report
Vibration isolation installation report for DVIA-ML1000 serial 250708R4-3 beneath a Thermo Fisher Scientific Helios platform at BYU Electron Microscopy Facility: VC-F vertical and VC-G horizontal vibration criteria; floor versus DVIA comparison plots with transmissibility; onsite installation and serial photos.
YIMO Thermo Fisher Scientific SEM Apreo 2S DVIA-MB1000 (250421R8) Installation Report
DVIA-MB1000 installation report — Thermo Fisher Scientific SEM Apreo 2S (serial 250421R8) via YIMO. Overview states the platform is appropriately installed and functioning as intended. End user, location, and tuning request are not filled on the published form (N/A). Equipment condition: The equipment is installed/Turned off. Transmissibility plots (vertical, left to right, front to back), on-site equipment photo, and Reference section with Generic Vibration Criteria as a markdown table (no separate reference graphic).
Shanghai Jiao Tong University Hitachi SU8600 FE-SEM DVIA-M1000 (250320R3) Installation Report
DVIA-M1000 installation report — Hitachi FE-SEM SU8600 (serial 250320R3) at Shanghai Jiao Tong University, Shanghai. Overview states the platform is appropriately installed and functioning as intended. The vibration specification appears as the uploaded specification figure, paired with the Measurement Summary VC levels by axis. Equipment condition, VC / Autospectrum / Trans plots from the measurement UI program, PASS lines in the summary table (matching the report), equipment photo; Reference uses the standard Generic Vibration Criteria markdown table.
Ningbo Institute of Materials EVAN Scanning Auger Electron Spectrometer DVIA-M1000 (250526R4) Installation Report
DVIA-M1000 installation report — EVAN Scanning Auger Electron Spectrometer (serial 250526R4) for Ningbo Institute of Materials, Hangzhou. Overview confirms the platform is appropriately installed and functioning as intended. No vibration specification section on the published form. Equipment condition: The equipment is installed/Turned off. Tuning screenshot, vertical and horizontal transmissibility, equipment photo; Reference presents Generic Vibration Criteria as a markdown table (no separate reference graphic).
Hitachi SEM SU8230 DVIA-M1000 (250421R6) Installation Report
DVIA-M1000 installation report — Hitachi SEM model SU8230 (serial 250421R6). Overview states the platform is appropriately installed and functioning as intended. Vibration specification Vertical: VC-F, Horizontal: VC-G. End user and location N/A. Equipment condition The equipment is turned on/IDLE; tuning request N/A. Published plots are VC curves, Autospectrum, and Transmissibility (vertical, left-to-right, front-to-back) from the UI program, plus equipment photo. The source form has no measurement summary table; reference uses the standard generic vibration criteria table.
YIMO Ciqtek HEM6000 High Speed SEM DVIA-MB1000 (250514R3) Installation Report
DVIA-MB1000 installation report — Ciqtek High Speed SEM HEM6000 (serial 250514R3), YIMO field package. Overview states the platform is appropriately installed and functioning as intended. The published form has no vibration specification section and no measurement summary table. End user and location fields are blank in the report; tuning request section has no content. Equipment condition: The equipment is installed/Turned off. Published figures: vertical, left-to-right, and front-to-back transmissibility; on-site equipment photo; Reference uses the standard Generic Vibration Criteria markdown table.
YIMO Tianjin Institute of Hematology ZEISS Crossbeam 550 FIB-SEM DVIA-M1000 (250530R5-2) Installation Report
DVIA-M1000 installation report — ZEISS FIB-SEM Crossbeam 550 (serial 250530R5-2) for Tianjin Institute of Hematology in Tianjin. Overview states the platform is appropriately installed and functioning as intended. The published form has no separate vibration specification section. Equipment condition: The equipment is installed/Turned off. Tuning request as UI-program capture; vertical, left-to-right, and front-to-back transmissibility; on-site equipment photo; Reference uses the standard Generic Vibration Criteria markdown table. Report written date taken from the cover block.
Tongji University Raith Voyager MAX EBL DVIA-M1000 (250402R6) Installation Report
DVIA-M1000 installation report — Raith Electron Beam Lithography Voyager MAX (serial 250402R6) at Tongji University, Shanghai, China. The report includes tuning-request UI capture, transmissibility plots (vertical, left to right, front to back) via the measurement UI, and an equipment photo; it does not include a measurement summary table or VC / Autospectrum plots. Vibration specification N/A. Equipment condition: The equipment is installed/Turned off.
Peking University Shenzhen Graduate School Thermo Fisher Helios 5 CX FIB-SEM DVIA-M1000 (250613R3) Installation Report
DVIA-M1000 installation report — Thermo Fisher Scientific FIB-SEM Helios 5 CX (serial 250613R3) for Peking University Shenzhen Graduate School in Shenzhen, China. Overview states the platform is appropriately installed and functioning as intended. The publication follows the on-site form: no vibration specification or measurement summary table; equipment condition The equipment is installed/Turned off. Published figures: tuning-request UI capture, vertical / left-to-right / front-to-back transmissibility plots, on-site equipment photo; Reference uses the standard Generic Vibration Criteria markdown table.
Jiaxing Xindong Technology ZEISS Sigma 360 FE-SEM DVIA-M1000 (250318R5) Installation Report
DVIA-M1000 installation report — ZEISS FE-SEM model Sigma 360 (serial 250318R5) for Jiaxing Xindong Technology in Jiaxing. Overview states the platform is appropriately installed and functioning as intended. Vibration specification N/A on the form; equipment condition The equipment is installed/IDLE. Published figures: tuning-request UI capture, vertical / left-to-right / front-to-back transmissibility plots, on-site equipment photo; Reference section uses the standard VC criterion table.
YIMO Hitachi FE-SEM SU8600 DVIA-ML1000 (250822R5) Installation Report
DVIA-ML1000 installation report — Hitachi FE-SEM model SU8600 (serial 250822R5). Overview states the platform is appropriately installed and functioning as intended. Vibration specification N/A; End user and location N/A. Measurement summary compares floor vs on DVIA-ML1000 with SU8600 turned on/IDLE. UI-program VC curves, Autospectrum, and Transmissibility (vertical, left-to-right, front-to-back) and equipment photo.
Gränges Aluminium Thermo Fisher Apreo 2 C SEM DVIA-ML1000 (251218R1-2) Installation Report
DVIA-ML1000 installation report — Thermo Fisher Scientific SEM Apreo 2 C (serial 251218R1-2) for Gränges Aluminium in Shanghai, China. Overview states the platform is appropriately installed and functioning as intended. Vibration specification as UI capture; equipment condition The equipment is turned on/IDLE; tuning request N/A. Measurement summary compares floor vs DVIA-ML1000 with PASS/FAIL per axis. UI-program VC curves, Autospectrum, Transmissibility (vertical, left to right, front to back) and equipment photo.
YIMO ZEISS Crossbeam 550L FIB-SEM DVIA-ML1000 (250806R3) Installation Report
DVIA-ML1000 installation report — ZEISS Crossbeam 550L FIB-SEM (serial 250806R3). Overview states the platform is appropriately installed and functioning as intended. Vibration-spec UI capture under Vibration specification; Prepared for / End User / Location N/A. Manufacturer line in the report form reads ZEIS. Equipment Condition Turned on/IDLE; Tuning Request N/A. UI-program Autospectrum and Transmissibility per axis. Equipment picture not published (report: Photo Not Allowed).
Jiasheng Advanced Technology TESCAN Amber FIB-SEM DVIA-ML1000 (251117R7) Installation Report
DVIA-ML1000 installation report — TESCAN Amber FIB-SEM (serial 251117R7) for Jiasheng Advanced Technology, Suzhou, China. Overview states the platform is appropriately installed and functioning as intended. Vibration specification as text (12 um/s up to 30 Hz, 24 um/s above 30 Hz); equipment turned on/IDLE; tuning request N/A. Measurement summary PASS on floor and on DVIA-ML1000 for vertical, left-to-right, and front-to-back. UI-program VC curves, Autospectrum, Transmissibility per axis and equipment photo.
YIMO ZEISS FE-SEM Sigma 360 DVIA-ML1000 (250828R5) Installation Report
DVIA-ML1000 installation report — ZEISS FE-SEM Sigma 360 (serial 250828R5). Overview states the platform is appropriately installed and functioning as intended. Prepared for, End User, and Location are N/A on the form. Equipment Condition The equipment turned on/IDLE; Tuning Request N/A. UI-program transmissibility (vertical, left-to-right, front-to-back) and equipment photo. No vibration-spec screen capture and no measurement summary table on the published form.
Gedeon Richter JEOL SEM JSM-IT500HR DVIA-ML1000 (250829R1) Installation Report
DVIA-ML1000 installation report — JEOL SEM model JSM-IT500HR (serial 250829R1) at Gedeon Richter Laboratory. Vibration specification is published as the UI capture under Vibration specification; End User N/A on the form. Equipment status and measurement summary (floor vs DVIA-ML1000) per the report; Conclusion notes floor vibration within specification on all axes after installation. VC curves, Autospectrum, and Transmissibility plots per axis from the measurement UI program.
STATSCHIPPACK Korea TESCAN SOLARIS X FIB-SEM DVIA-ML1000 (250824R1) Installation Report
DVIA-ML1000 installation report — TESCAN SOLARIS X FIB-SEM (serial 250824R1) at STATSCHIPPACK Korea laboratory. Overview describes tuning and vibration measurement, equipment-mounted nested isolator with airflow and vibration from the tool. Vibration limits 10 µm/s (<30 Hz) and 20 µm/s (>30 Hz); measurement setup with Data Physics QUATTRO and PCB 393B05. Measurement summary PASS all axes; VC curves, Autospectrum, and Transmissibility per axis.
YIMO ZEISS Crossbeam 350 FIB-SEM DVIA-ML1000 (250806R2) Installation Report
DVIA-ML1000 installation report — ZEISS Crossbeam 350 FIB-SEM (serial 250806R2). Overview states the platform is appropriately installed and functioning as intended. Vibration-spec UI capture under Vibration Specification; Prepared for / End User / Location N/A. Manufacturer line in the report form reads ZEIS. Equipment Condition Turned on/IDLE; Tuning Request N/A. UI-program Autospectrum and Transmissibility per axis and equipment photo.
YIMO JEOL SEM JSM-IT800 DVIA-ML1000 (250801R2) Installation Report
DVIA-ML1000 installation report — JEOL SEM model JSM-IT800 (serial 250801R2). Overview states the platform is appropriately installed and functioning as intended. Vibration-spec field form (Tuning Request) as screen capture, with N/A in the form text; Prepared for / End User / Location N/A. UI-program Autospectrum and Transmissibility (vertical, left-to-right, front-to-back) and equipment photo.
YIMO Beijing University of Aeronautics and Astronautics Unisoku STM DVIA-ML1000 (250730R1-2) Installation Report
DVIA-ML1000 installation report — Beijing University of Aeronautics and Astronautics Unisoku STM (serial 250730R1-2). Overview states the platform is appropriately installed and functioning as intended. Transmissibility plots (vertical, left-to-right, front-to-back), tuning-request capture, and equipment photo.
YIMO Beijing University of Aeronautics and Astronautics Unisoku STM DVIA-ML1000 (250730R1-1) Installation Report
DVIA-ML1000 installation report — Beijing University of Aeronautics and Astronautics Unisoku STM (serial 250730R1-1). Overview documents Z-axis VCM issues (Dec 3 / Dec 11 visit), interim tuning with Z2 off and Z3/Z4 matrix sign reversal, and acceptable overall performance with slight horizontal-axis degradation pending full VCM repair. Transmissibility plots (vertical, left-to-right, front-to-back), tuning-request capture, and equipment photo.
YIMO Changping P3 Laboratory Thermo Fisher Arctis Cryo-Plasma FIB-SEM DVIA-ML1000 (250715R9) Installation Report
DVIA-ML1000 installation report at Changping P3 Laboratory — Thermo Fisher Scientific Cryo-Plasma FIB-SEM Arctis (serial 250715R9). Vertical, left-to-right, and front-to-back transmissibility plots, tuning-request capture, and on-site equipment photo.
YIMO SINANO Ultrafast Pump–Probe STM DVIA-ML1000 (250715R6) Installation Report
DVIA-ML1000 installation report — Suzhou Institute of Nano-Tech and Nano-Bionics Ultrafast Pump–Probe scanning tunneling microscope (250715R6). The overview notes table-mounted equipment rigidly tied to the floor and horizontal-axis performance below target in some frequency bands. Form vibration specification N/A; measurement summary compares floor vs on DVIA-ML1000 at dominant frequencies. UI-program VC / Autospectrum / Trans plots and equipment photo.
YIMO Ciqtek SEM5000X DVIA-ML1000 (251113R6) Installation Report
DVIA-ML1000 installation report — Ciqtek SEM5000X (251113R6). The active vibration isolation platform is appropriately installed and functioning as intended. Measurements with SEM5000X Turned on / IDLE; vibration specification N/A on the form; measurement summary compares floor vs on DVIA-ML1000 at dominant frequencies. UI-program plots and equipment photo.
Shanghai Silicon Power PXB-BE-200HV DVIA-ML1000 (251023R6) Installation Report
DVIA-ML1000 second tuning in Shanghai (serial 251023R6): DSP board issue diagnosed, board replaced, then re-tuned — first visit 2025-01-13, second visit January 19, 2026. PXB-BE-200HV (Turned on / IDLE). Field form lists N/A for vibration specification; measurement summary compares floor vs DVIA-ML1000 VC at dominant frequencies. VC, Autospectrum, Transmissibility per axis; on-site equipment shown as one vertically stacked composite image.
Thermo Fisher Scientific Apreo 2S SEM DVIA-ML1000 (251023R5) Installation Report
DVIA-ML1000 tuning and vibration measurement with Thermo Fisher Scientific Apreo 2S SEM (Turned on / IDLE). Manufacturer vibration-spec diagram, VC / Autospectrum / Transmissibility; measurement summary: floor points FAIL, on-isolator PASS per axis in the table.
Tier-1 Semiconductor Pyeongtaek P1 ZEISS Gemini SEM 460 DVIA-ML1000 Installation Report
Tier-1 Semiconductor Pyeongtaek P1 1F — ZEISS Gemini SEM 460 on DVIA-ML1000. Includes manufacturer equipment-vibration spec diagram, VC/Autospectrum/Transmissibility.
Jeonbuk National University Raith Voyager Installation Report
Jeonbuk National University Raith Voyager Installation Report
National Enterprise for nanoScience and nonoTechnology DVIA-ML3000 Installation Report
Nest Labs Raith Voyager Installation Report
YIMO(Huahong) ASML Wafer inspection system eScan460 Installation Report
YIMO(Huahong) ASML Wafer inspection system eScan460 Installation Report