Installation Report

09-05-2026

YIMOTECH Resonac Electronic Materials ZEISS Sigma 360 FE-SEM DVIA-ML1000 Installation Report

DVIA-M Series

Installation Report

YIMOTECH

Resonac Electronic Materials

ZEISS

Sigma 360

FE-SEM

DVIA-ML1000

251212R2

Guangzhou

Overview

Following the installation of DVIA-ML1000 at Guangzhou, tuning and vibration measurements were performed.

Vibration measurement was conducted with the equipment in the Turned off state.

Data is represented in auto-spectrum format and reference material on the vibration level is provided.

Vibration Isolation System Information

Model: DVIA-ML1000

Serial Number: 251212R2

Engineer

Taehun Kim · DAEIL SYSTEMS

Tuning Date

2026.08.12

Report Written Date

2026.08.12

End User

Resonac Electronic Materials

Number of Tuning Trial

2nd

Site

Guangzhou

Equipment

Manufacturer: ZEISS

Equipment: FE-SEM

Model: Sigma 360

Vibration Specification

Horizontal

Frequency [Hz]	Allowable [mm/s² RMS]
1	0.04
10	0.04
10	0.17
20	0.17
20	0.3
70	0.3
70	2
100	2

Vertical

Frequency [Hz]	Allowable [mm/s² RMS]
1	0.03
8	0.03
8	0.15
45	0.15
45	2
100	2

Equipment Condition

Turned off

Tuning Request

Image 1 — YIMOTECH Resonac Electronic Materials ZEISS Sigma 360 FE-SEM DVIA-ML1000 Installation Report

Conclusion

The measurement results confirm that the vibration levels, which did not meet the equipment’s vibration specification prior to installation, now comply with the specification after applying the DVIA-ML1000 and completing the re-tuning process.

Measurement Summary

Measurement Point	Vibration Specifications	Axis	Result
Measurement Point	Vibration Specifications	Axis	Floor	DVIA-ML1000
1. Floor 2. DVIA-ML1000	See Section 9	Vertical	✗ FAIL	✓ PASS
		Left to Right	✓ PASS	✓ PASS
		Front to Back	✗ FAIL	✓ PASS

Measurement Data Obtained via UI Program

Vertical — Autospectrum

Image 2 — YIMOTECH Resonac Electronic Materials ZEISS Sigma 360 FE-SEM DVIA-ML1000 Installation Report

Left to Right — Autospectrum

Image 3 — YIMOTECH Resonac Electronic Materials ZEISS Sigma 360 FE-SEM DVIA-ML1000 Installation Report

Front to Back — Autospectrum

Image 4 — YIMOTECH Resonac Electronic Materials ZEISS Sigma 360 FE-SEM DVIA-ML1000 Installation Report

Installation Photo

No installation photos were allowed.

Reference

The table below classifies vibration levels based on IEST-RP-CC012.2.

Criterion Curve	Description	Amplitude (μm/s) (μin/s)	Detail Size (μm)
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances. Usually adequate for computer equipment, hospital recovery rooms, semiconductor probe test equipment, and microscopes less than 40x.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable in most instances for surgical suites, microscopes to 100x and for other equipment of low sensitivity.	100 (4,000)	25
VC-A	Adequate in most instances for optical microscopes to 400x, microbalances, optical balances, proximity and projection aligners, etc.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment (including steppers) to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate standard for optical microscopes to 1000x, lithography and inspection equipment (including moderately sensitive electron microscopes) to 1μm detail size. TFT-LCD stepper/scanner processes.	12.5 (500)	1-3
VC-D	Suitable in most instances for demanding equipment, including many electron microscopes (SEMs and TEMs) and E-Beam systems.	6.25 (250)	0.1-0.3
VC-E	A challenging criterion to achieve. Assumed to be adequate for the most demanding of sensitive systems including long path, laser-based, small target systems, E-Beam lithography systems working at nanometer scales, and other systems requiring extraordinary dynamic stability.	3.12 (125)	< 0.1
VC-F	Appropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.	1.56 (62.5)	N/A
VC-G	Appropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.	0.78 (31.3)	N/A

Notes:

1. As measured in one-third octave bands of frequency over the frequency 8 to 80 Hz (VC-A and VC-B) or 1 to 80 Hz (VC-C through VC-G).

2. The detail size refers to the width in the case of microelectronics fabrication, the particle (cell) size in the case of medical and pharmaceutical research, etc. It is to imaging associated with probe technologies, AFMs, and nanotechnology.

3. The information given in this table is for guidance only. In most instances, it is recommended that the advice of someone knowledgeable about applications and vibration requirements of the equipment and processes be sought.