Installation Report

09-22-2026

Quantum Photonics Research Laboratory attocube attoDRY1000/SU Cryostat DVIA-ML1000 Installation Report

DVIA-M Series

Installation Report

Quantum Photonics Research Laboratory

attocube systems AG

Cryostat

attoDRY1000/SU

DVIA-ML1000

260725R2

Copenhagen

Overview

A DVIA-ML1000 active vibration isolation system (non-magnetic cover, external controller) was installed at Quantum Photonics Research Laboratory, Copenhagen, Denmark, followed by tuning and vibration measurement.

The isolator was verified after installation with the customer cryostat seated on the top plate, powered off and with external vibration disturbance kept to a minimum. Vibration on the isolator top plate met the customer requirement of VC-E on all axes.

Data are presented as VC curves, autospectra and transfer rate, with reference material on vibration levels.

Vibration Isolation System Information

Model: DVIA-ML1000 (non-magnetic cover, 1300 × 750 × 173H mm, External Controller)

Engineer

Kyeongdan Kim · DAEIL SYSTEMS

Installation Date

2026.09.22 – 23

Report Written Date

2026.10.05

Tuning Date

2026.09.22

Location

Copenhagen, Denmark

End User

Quantum Photonics Research Laboratory, Copenhagen, Denmark

Equipment

Manufacturer: attocube systems AG

Equipment: Closed-cycle cryostat (pulse-tube, top-loading)

Model: attoDRY1000/SU

Vibration Specification

VC-E (3.12 µm/s, 1/3-octave bands, 1–80 Hz, all axes)

— the level set by the customer, based on their experience that image quality was sufficient when measuring on a floor at VC-E.

This is a customer requirement, not a specification of the equipment manufacturer.

The VC reference curves and the values for each grade are given in Section 14, Reference.

Equipment Condition

Cryostat seated on the isolator top plate with the optical breadboard mounted; cryostat powered off, helium compressor stopped. Only the helium flex line to the service-unit cabinet was connected.

Engineering Tool & Setup

Measurement equipment

Item	UI (isolator built-in sensors)
Instrument · software	DVIA-ML1000 controller · DAEIL SYSTEMS Tuning Software DVIA-ML/ULF (6 DOF) Ver 2.0.2
Sensors	Isolator built-in velocity sensors (Top / Bottom)
Channels	Top = isolator top plate Bottom = isolator base

Measurement setup

Item	UI
Frequency span	Sampling 714.2 Hz · frequency range 250 Hz
FFT / window	FFT 4096 · Hanning
Averaging	100 · overlap 99 %
Engineering unit	m/s RMS

Axis definition

Axis	Direction
X	Along the long side of the isolator (1300 mm)
Y	Along the short side (750 mm)
Z	Vertical

Conclusion

Under the acceptance condition of 2026.09.22 (a-0), vibration on the DVIA-ML1000 top plate was VC-G on Z, VC-G on X and VC-E on Y, meeting the customer requirement of VC-E on all axes. At the same time the base measured VC-C on Z, VC-F on X and VC-F on Y.

The installation and tuning of the DVIA-ML1000 therefore satisfy the customer requirement.

Measurement Summary

Grades are based on the maximum 1/3-octave value from 1 to 80 Hz.

Measurement Point	Requirement	Axis	Measurement Data		Result (top plate)
Measurement Point	Requirement	Axis	Base	DVIA-ML1000 top plate
1. Base 2. DVIA-ML1000 top plate	VC-E	Vertical (Z)	VC-C	VC-G	✓ PASS
		Left–Right (X)	VC-F	VC-G	✓ PASS
		Front–Back (Y)	VC-F	VC-E	✓ PASS

Measurement Data

a-0: UI measurement after tuning on 09.22 (Active).

One page per axis — VC curves / autospectrum / transfer rate. Blue = Top (top plate), red = Bottom (base).

Left–Right (X, long side 1300 mm)

a-0 – X – VC curves (Top = top plate, Bottom = base)

Image 1 — Quantum Photonics Research Laboratory attocube attoDRY1000/SU Cryostat DVIA-ML1000 Installation Report

a-0 – X – Autospectrum

Image 2 — Quantum Photonics Research Laboratory attocube attoDRY1000/SU Cryostat DVIA-ML1000 Installation Report

a-0 – X – Transfer rate (gain dB · time waveform)

Image 3 — Quantum Photonics Research Laboratory attocube attoDRY1000/SU Cryostat DVIA-ML1000 Installation Report

Front–Back (Y, short side 750 mm)

a-0 – Y – VC curves (Top = top plate, Bottom = base)

Image 4 — Quantum Photonics Research Laboratory attocube attoDRY1000/SU Cryostat DVIA-ML1000 Installation Report

a-0 – Y – Autospectrum

Image 5 — Quantum Photonics Research Laboratory attocube attoDRY1000/SU Cryostat DVIA-ML1000 Installation Report

a-0 – Y – Transfer rate (gain dB · time waveform)

Image 6 — Quantum Photonics Research Laboratory attocube attoDRY1000/SU Cryostat DVIA-ML1000 Installation Report

Vertical (Z)

a-0 – Z – VC curves (Top = top plate, Bottom = base)

Image 7 — Quantum Photonics Research Laboratory attocube attoDRY1000/SU Cryostat DVIA-ML1000 Installation Report

a-0 – Z – Autospectrum

Image 8 — Quantum Photonics Research Laboratory attocube attoDRY1000/SU Cryostat DVIA-ML1000 Installation Report

a-0 – Z – Transfer rate (gain dB · time waveform)

Image 9 — Quantum Photonics Research Laboratory attocube attoDRY1000/SU Cryostat DVIA-ML1000 Installation Report

Reference

The table below classifies vibration levels based on IEST-RP-CC012.2.

Criterion Curve	Description	Amplitude µm/s (µin/s)	Detail Size µm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances. Usually adequate for computer equipment, hospital recovery rooms, semiconductor probe test equipment, and microscopes less than 40x.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable in most instances for surgical suites, microscopes to 100x and for other equipment of low sensitivity.	100 (4,000)	25
VC-A	Adequate in most instances for optical microscopes to 400x, microbalances, optical balances, proximity and projection aligners, etc.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment (including steppers) to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate standard for optical microscopes to 1000x, lithography and inspection equipment (including moderately sensitive electron microscopes) to 1μm detail size. TFT-LCD stepper/scanner processes.	12.5 (500)	1–3
VC-D	Suitable in most instances for demanding equipment, including many electron microscopes (SEMs and TEMs) and E-Beam systems.	6.25 (250)	0.1–0.3
VC-E	A challenging criterion to achieve. Assumed to be adequate for the most demanding of sensitive systems including long path, laser-based, small target systems, E-Beam lithography systems working at nanometer scales, and other systems requiring extraordinary dynamic stability.	3.12 (125)	<0.1
VC-F	Appropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.	1.56 (62.5)	N/A
VC-G	Appropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.	0.78 (31.3)	N/A

¹ As measured in one-third octave bands of frequency over the frequency 8 to 80 Hz (VC-A and VC-B) or 1 to 80 Hz (VC-C through VC-G).

² The detail size refers to the width in the case of microelectronics fabrication, the particle (cell) size in the case of medical and pharmaceutical research, etc. It is to imaging associated with probe technologies, AFMs, and nanotechnology.

The information given in this table is for guidance only. In most instances, it is recommended that the advice of someone knowledgeable about applications and vibration requirements of the equipment and processes be sought.