Installation Report

09-03-2026

FST LAZIN LODAS-B18 Photomask Blank Inspection System DVIF-FB (241001R5) Installation Report — September 2026 Re-Measurement and Upper Equipment Lower Frame Baseline

DVIF Series

Installation Report

FST

LAZIN

LODAS-B18

Photomask Blank Inspection System

DVIF-FB

DVIF-FB-1000x2000x3000H

241001R5

Osan

Overview

Tuning and vibration measurement were performed after installation of the DVIF-FB-1000x2000x3000H in the 3rd floor Clean Room of the FST Osan plant.

Inspection and vibration measurement were performed in the IDLE state.

The data is presented in VC Curve format, together with reference material on the corresponding vibration levels.

Vibration Isolation System Information

Model: DVIF-FB-1000x2000x3000H

Serial Number: 241001R5

Engineer

Gyumin Park · DAEIL SYSTEMS

Tuning Date

2026.09.03

Installation Site

3rd Floor Cleanroom, FST Osan Plant

End User

Customer: FST

Equipment

Manufacturer: LAZIN

Equipment: Photomask Blank Inspection System

Model: LODAS-B18

Vibration Specification

Horizontal

Frequency [Hz]	Specification [µm/s RMS]
1	25
100	25

Vertical

Frequency [Hz]	Specification [µm/s RMS]
1	25
100	25

Equipment Condition

IDLE

Measurement Equipment

10.1) Measurement Equipment

Hardware: B&K Front End Type 3040-A-040

Software: B&K Pulse Labshop22 Version

10.2) Accelerometer

PCB 393B05

Measurement Setup

F Span: 200 Hz

Lines: 2400

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Conclusion

DVIF-FB Top Plate vibration measurement result:

Re-measurement was carried out at the customer's request in order to verify the reliability of the existing measurement data. As with the previous data, the vertical (Z-axis) and left to right (X-axis) directions satisfied the vibration specification (PASS), while the front to back (Y-axis) direction was confirmed to exceed the specification (FAIL).

Upper equipment lower frame vibration measurement result:

Measurement was performed in order to secure baseline data before the Bilz pads are applied so that the upper equipment meets its specification (Spec-In). The results show that all axes — vertical (Z-axis), left to right (X-axis) and front to back (Y-axis) — exceed the current vibration specification (FAIL).

Follow-up actions:

The planned Bilz pad application work will be carried out in order to satisfy and reduce the vibration specification of the upper equipment lower frame, and a comparative evaluation of the data before and after application will be performed.

Measurement Summary

DVIF-FB Top Plate

Measurement Point	Vibration Specification	Axis	DVIF-FB Top Plate
1. DVIF-FB Top Plate	See Section 8	Vertical (Z-axis)	✓ PASS
		Left to Right (X-axis)	✓ PASS
		Front to Back (Y-axis)	✗ FAIL

Upper Equipment Lower Frame

Measurement Point	Vibration Specification	Axis	Upper Equipment Lower Frame
1. Upper Equipment Lower Frame	See Section 8	Vertical (Z-axis)	✗ FAIL
		Left to Right (X-axis)	✗ FAIL
		Front to Back (Y-axis)	✗ FAIL

Data and Image

DVIF-FB Top Plate — Z-axis Autospectrum

Image 1 — FST LAZIN LODAS-B18 Photomask Blank Inspection System DVIF-FB (241001R5) Installation Report — September 2026 Re-Measurement and Upper Equipment Lower Frame Baseline

DVIF-FB Top Plate — Z-axis VC Curves

Image 2 — FST LAZIN LODAS-B18 Photomask Blank Inspection System DVIF-FB (241001R5) Installation Report — September 2026 Re-Measurement and Upper Equipment Lower Frame Baseline

DVIF-FB Top Plate — X-axis Autospectrum

Image 3 — FST LAZIN LODAS-B18 Photomask Blank Inspection System DVIF-FB (241001R5) Installation Report — September 2026 Re-Measurement and Upper Equipment Lower Frame Baseline

DVIF-FB Top Plate — X-axis VC Curves

Image 4 — FST LAZIN LODAS-B18 Photomask Blank Inspection System DVIF-FB (241001R5) Installation Report — September 2026 Re-Measurement and Upper Equipment Lower Frame Baseline

DVIF-FB Top Plate — Y-axis Autospectrum

Image 5 — FST LAZIN LODAS-B18 Photomask Blank Inspection System DVIF-FB (241001R5) Installation Report — September 2026 Re-Measurement and Upper Equipment Lower Frame Baseline

DVIF-FB Top Plate — Y-axis VC Curves

Image 6 — FST LAZIN LODAS-B18 Photomask Blank Inspection System DVIF-FB (241001R5) Installation Report — September 2026 Re-Measurement and Upper Equipment Lower Frame Baseline

Upper Equipment Lower Frame — Z-axis Autospectrum

Image 7 — FST LAZIN LODAS-B18 Photomask Blank Inspection System DVIF-FB (241001R5) Installation Report — September 2026 Re-Measurement and Upper Equipment Lower Frame Baseline

Upper Equipment Lower Frame — Z-axis VC Curves

Image 8 — FST LAZIN LODAS-B18 Photomask Blank Inspection System DVIF-FB (241001R5) Installation Report — September 2026 Re-Measurement and Upper Equipment Lower Frame Baseline

Upper Equipment Lower Frame — X-axis Autospectrum

Image 9 — FST LAZIN LODAS-B18 Photomask Blank Inspection System DVIF-FB (241001R5) Installation Report — September 2026 Re-Measurement and Upper Equipment Lower Frame Baseline

Upper Equipment Lower Frame — X-axis VC Curves

Image 10 — FST LAZIN LODAS-B18 Photomask Blank Inspection System DVIF-FB (241001R5) Installation Report — September 2026 Re-Measurement and Upper Equipment Lower Frame Baseline

Upper Equipment Lower Frame — Y-axis Autospectrum

Image 11 — FST LAZIN LODAS-B18 Photomask Blank Inspection System DVIF-FB (241001R5) Installation Report — September 2026 Re-Measurement and Upper Equipment Lower Frame Baseline

Upper Equipment Lower Frame — Y-axis VC Curves

Image 12 — FST LAZIN LODAS-B18 Photomask Blank Inspection System DVIF-FB (241001R5) Installation Report — September 2026 Re-Measurement and Upper Equipment Lower Frame Baseline

Reference

The table below classifies vibration levels based on IEST-RP-CC012.2.

Criterion Curve	Description	Amplitude¹ μm/s (μin/s)	Detail Size² μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances. Usually adequate for computer equipment, hospital recovery rooms, semiconductor probe test equipment, and microscopes less than 40x.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable in most instances for surgical suites, microscopes to 100x and for other equipment of low sensitivity.	100 (4,000)	25
VC-A	Adequate in most instances for optical microscopes to 400x, microbalances, optical balances, proximity and projection aligners, etc.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment (including steppers) to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate standard for optical microscopes to 1000x, lithography and inspection equipment (including moderately sensitive electron microscopes) to 1μm detail size. TFT-LCD stepper/scanner processes.	12.5 (500)	1-3
VC-D	Suitable in most instances for demanding equipment, including many electron microscopes (SEMs and TEMs) and E-Beam systems.	6.25 (250)	0.1-0.3
VC-E	A challenging criterion to achieve. Assumed to be adequate for the most demanding of sensitive systems including long path, laser-based, small target systems, E-Beam lithography systems working at nanometer scales, and other systems requiring extraordinary dynamic stability.	3.12 (125)	< 0.1
VC-F	Appropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.	1.56 (62.5)	N/A
VC-G	Appropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.	0.78 (31.3)	N/A

Notes:

1. As measured in one-third octave bands of frequency over the frequency range 8 to 80 Hz (VC-A and VC-B) or 1 to 80 Hz (VC-C through VC-G).

2. The detail size refers to the line width in the case of microelectronics fabrication, the particle (cell) size in the case of medical and pharmaceutical research, etc. It is also applicable to imaging associated with probe technologies, AFM and nanotechnology.

3. The information provided in this table is for reference only. In most instances it is advisable to seek the advice of a specialist who is familiar with the application and the vibration requirements of the equipment and the process.