Installation Report

DVIA-M Series

08-13-2026

FST LAZIN LODAS-B18 Photomask Blank Inspection System DVIF-FB (241001R5) Installation Report — Post-Reinforcement Performance Verification

DVIF Series

Installation Report

FST

LAZIN

LODAS-B18

Photomask Blank Inspection System

DVIF-FB

DVIF-FB-1000x2000x3000H

241001R5

Osan

Overview

Vibration measurement was performed to verify performance after reinforcement work on the DVIF-FB-1000x2000x3000H in the 3rd floor Clean Room of the FST Osan plant.

Vibration measurement was performed in the IDLE state.

The data is presented in VC Curve format, together with reference material on the corresponding vibration levels.

Vibration Isolation System Information

Model: DVIF-FB-1000x2000x3000H

Serial Number: 241001R5

Engineer

Gyumin Park · DAEIL SYSTEMS

Tuning Date

2026.08.13

Installation Site

3rd Floor Cleanroom, FST Osan Plant

End User

FST

Equipment

Manufacturer: LAZIN

Equipment: Photomask Blank Inspection System

Model: LODAS-B18

Vibration Specification

Horizontal

Frequency [Hz]	Specification [µm/s RMS]
1	25
100	25

Vertical

Frequency [Hz]	Specification [µm/s RMS]
1	25
100	25

Equipment Condition

IDLE

Measurement Equipment

10.1) Measurement Equipment

Hardware: B&K Front End Type 3040-A-040

Software: B&K Pulse Labshop22 Version

10.2) Accelerometer

PCB 393B05

Measurement Setup

F Span: 200 Hz

Lines: 2400

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Conclusion

On 13 August, in the presence of the customer's representative, vibration measurement was performed after the DVIF-FB top plate reinforcement and finishing work had been completed in the 3rd floor cleanroom of the FST Osan plant.

1. Comparison before and after reinforcement

Before the structural reinforcement all three axes (vertical, left to right, front to back) exceeded SPEC (VC-B), the vibration control criterion; after the reinforcement work, results fully satisfying SPEC were secured on two axes, vertical (Z) and left to right (X).

Vertical (Z-axis): 27.7 µm/s → 17.9 µm/s (35.4% reduction) / [VC-B satisfied]

Left to Right (X-axis): 70.7 µm/s → 22.4 µm/s (68.3% reduction) / [VC-B satisfied]

Front to Back (Y-axis): 71.0 µm/s → 48.0 µm/s (32.4% reduction) / [VC-A]

A meaningful vibration reduction effect was confirmed in all directions, and in particular the front to back (Y) direction was reduced by about 32.4%.

2. Technical assessment of the front to back (Y) measurement result

The object is an upright structure more than 3 m high, and it is a structural characteristic that response amplification caused by the moment arm occurs at the upper part under horizontal excitation.

The measurement results also confirm that no amplification relative to the floor is observed in the vertical direction, whereas amplification appears only in the horizontal direction.

This reinforcement reduced such horizontal response by about 32.4% on a front to back basis, which corresponds to the practical level of improvement attainable for a structure of this shape.

The front to back direction reached the VC-A level and did not reach SPEC (VC-B).

Measurement Summary

DVIF-FB Top Plate

Measurement Point	Vibration Specification	Axis	DVIF-FB Top Plate
1. DVIF-FB Top Plate	See Section 8	Vertical (Z-axis)	✓ PASS
		Left to Right (X-axis)	✓ PASS
		Front to Back (Y-axis)	✗ FAIL

Stage

Measurement Point	Vibration Specification	Axis	Upper Equipment Stage
1. Upper Equipment Stage	See Section 8	Vertical (Z-axis)	✗ FAIL
		Left to Right (X-axis)	✗ FAIL
		Front to Back (Y-axis)	✓ PASS

Data and Image

DVIF-FB Top Plate — Z-axis VC Curves

DVIF-FB Top Plate — Z-axis VC Curves (Before Reinforcement)

DVIF-FB Top Plate — X-axis VC Curves

DVIF-FB Top Plate — X-axis VC Curves (Before Reinforcement)

DVIF-FB Top Plate — Y-axis VC Curves

DVIF-FB Top Plate — Y-axis VC Curves (Before Reinforcement)

Upper Equipment Stage — Z-axis VC Curves

Upper Equipment Stage — X-axis VC Curves

Upper Equipment Stage — Y-axis VC Curves

Reference

The table below classifies vibration levels based on IEST-RP-CC012.2.

Criterion Curve	Description	Amplitude¹ μm/s (μin/s)	Detail Size² μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances. Usually adequate for computer equipment, hospital recovery rooms, semiconductor probe test equipment, and microscopes less than 40x.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable in most instances for surgical suites, microscopes to 100x and for other equipment of low sensitivity.	100 (4,000)	25
VC-A	Adequate in most instances for optical microscopes to 400x, microbalances, optical balances, proximity and projection aligners, etc.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment (including steppers) to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate standard for optical microscopes to 1000x, lithography and inspection equipment (including moderately sensitive electron microscopes) to 1μm detail size. TFT-LCD stepper/scanner processes.	12.5 (500)	1-3
VC-D	Suitable in most instances for demanding equipment, including many electron microscopes (SEMs and TEMs) and E-Beam systems.	6.25 (250)	0.1-0.3
VC-E	A challenging criterion to achieve. Assumed to be adequate for the most demanding of sensitive systems including long path, laser-based, small target systems, E-Beam lithography systems working at nanometer scales, and other systems requiring extraordinary dynamic stability.	3.12 (125)	< 0.1
VC-F	Appropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.	1.56 (62.5)	N/A
VC-G	Appropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.	0.78 (31.3)	N/A

Notes:

1. As measured in one-third octave bands of frequency over the frequency range 8 to 80 Hz (VC-A and VC-B) or 1 to 80 Hz (VC-C through VC-G).

2. The detail size refers to the line width in the case of microelectronics fabrication, the particle (cell) size in the case of medical and pharmaceutical research, etc. It is also applicable to imaging associated with probe technologies, AFM and nanotechnology.

3. The information provided in this table is for reference only. In most instances it is advisable to seek the advice of a specialist who is familiar with the application and the vibration requirements of the equipment and the process.