Skip to main content

Case Studies

DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.

Series

Equipment Type

Manufacturer

All Case Studies

1246 case studies
Hallym University JEOL JBX-8100FS DVIA-PB2200 Installation Report

DVIA-PB2200 (serial 220926R2) SET-UP and vibration measurement at Hallym University Chuncheon cleanroom (C/R) with JEOL JBX-8100FS during equipment operation. Publishes equipment vibration specification graphics, VC curves and transmissibility by axis (no autospectrum in source), and multi-band measurement summary table.

ETRI Daejeon DVIA-P2200 Installation Report
Installation Report
DVIA-P Series
05-21-2026

ETRI Daejeon DVIA-P2200 Installation Report

DVIA-P2200 (serial 230518R9) installation report at ETRI Daejeon C/R 1F: pre-installation first test on July 28, 2023. Published figures include vertical, left-to-right, and front-to-back VC curves and transmissibility graph.

ETRI JEOL JBX-8100FS DVIA-P2200 Installation Report
Installation Report
DVIA-P Series
05-21-2026

ETRI JEOL JBX-8100FS DVIA-P2200 Installation Report

DVIA-P2200 (serial 230518R9) installation report at ETRI C/R 1F Daejeon for JEOL JBX-8100FS. Tuning September 28, 2023; engineer Youngha Lee. Published figures: Z/X/Y VC curves only. Reference uses the standard Generic Vibration Criteria markdown table.

Tier-1 Semiconductor Giheung SIX-3001 DVIA-P7000 Installation Report

Tier-1 Semiconductor Giheung 5Line C/R SIX-3001 micro focus X-ray inspection system DVIA-P7000 installation report (December 2023 tuning). Publishes Z/X/Y transmissibility and VC curves; Y-axis transmissibility was not captured in the source report.

Tier-1 Semiconductor Fabrication Facility Pyeongtaek P4 Bruker nm-VI DVIA-P4000 Installation Report

Tier-1 Semiconductor Fabrication Facility Pyeongtaek P4 3F Bruker nm-VI DVIA-P4000 Installation Report

GIS Guil Solution Factory GIS DHM Demonstration Equipment DVIA-P1000 Installation Report

GIS DHM demonstration equipment DVIA-P1000 (serial 231108R2) installation report at Guil Solution factory research laboratory—IDLE, Motor On, and Stage On measurement states with VC curves, autospectra, transmissibility (where measured), and measurement summary tables.