Vibration Isolation Case Studies

DVIA-P2200 (serial 240705R1) tuning and vibration measurement at Korea Nano Technology Institute 2F Nano Resource/Pattern Support Line with JEOL JBX-8100FS electron beam lithography. Tuning date October 29, 2024; engineer Chaewon Lee (DAEIL SYSTEMS). Published figures: equipment photo, vibration specification diagram, axis VC/Narrowband/Transmissibility plots, and Control Unit comparison curves. Reference uses the Generic Vibration Criteria markdown table only.

DVIA-C-P2200 (240927R4) tuning and vibration measurement at Tier-1 Semiconductor DSR Integrated Advanced Technology Lab before self-developed equipment installation. VC, autospectrum, and transmissibility plots by axis.

DVIA-P2200 (21223R2) tuning and vibration measurement at LB Semicon Pyeongtaek P2 line with Nordson Auto Shear Integra 4800 before equipment placement. VC, autospectrum, and transmissibility plots by axis.

Kunming Metallurgical Research Institute Co., Ltd (Kunming) ZEISS Sigma 360 FE-SEM DVIA-ULFB700 installation report — following installation of the DVIA-ULFB700, vibration measurement was performed with the equipment in the IDLE state. The Vertical axis passed on the DVIA-ULFB700 (FAIL on floor), while Left-to-Right and Front-to-Back passed on both floor and platform. Because the ZEISS Sigma 360 specification is defined in acceleration while the data was acquired in velocity, the specification was converted to an equivalent velocity criterion for the pass/fail evaluation. Per-axis Autospectrum data and an installation photo are published.

Greater Bay Area Quantum Center (Guangdong, China) ZEISS Sigma 360 FE-SEM DVIA-ULF700 installation report — after installation, vibration was measured with the equipment in the IDLE state and represented in Autospectrum format. On the DVIA-ULF700 platform all three axes (Vertical, Left-to-Right, Front-to-Back) passed; on the floor the Vertical and Front-to-Back axes failed while Left-to-Right passed. Per-axis Autospectrum data and an installation photo are published.

DVIA-ULF700 (S/N 251110R7) installation report for Greater Bay Area Quantum Center, Shenzhen, China — ZEISS FE-SEM Sigma 360. Vibration specification diagram, UI VC / Autospectrum / Transmissibility plots and equipment photo.