Vibration Isolation Case Studies

DVIA-P4000 (serial 220126R3) at Tier-1 Semiconductor Hwaseong V1 Line 10F with Hitachi CG6300. Tuning May 27, 2022; engineer Youngha Lee. Summary VC-band letters and per-axis VC curves (floor vs active isolator) from the installation report.

DVIA-P4000 (serial 220126R3) installation report with Hitachi CG6300. Tuning May 27, 2022; VC summary table and Z/X/Y floor vs active-isolation VC curves. Reference uses the standard Generic Vibration Criteria markdown table (no reference raster).

Tier-1 Semiconductor Pyeongtaek P3 line ADVANTEST E5620 with DVIA-P4000 (serial 220617R5). Tuning November 1, 2023. Summary of vibration results as VC-band letters; per-axis Transmissibility and VC curves. Reference as Generic Vibration Criteria markdown table only.

DVIA-P4000 (serial 220714R4) inspection at Sungkyunkwan University Research Building 3F cleanroom with Raith EBPG5150. Caution VIB LED and Z-axis oscillation were addressed with feedback/feedforward re-tuning on Nov. 28, 2023. Summary VC table, axis transmissibility graphs, and VC curves are published; Reference uses the Generic Vibration Criteria markdown table only.

DVIA-P4000 (serial 220714R4) inspection at Sungkyunkwan University Research Building 3F cleanroom with Raith EBPG5150. Inspection February 19, 2024; Data Physics QUATTRO / SignalCalc ACE. VC summary tables for Active on and Float off, plus axis VC curves at Floor, isolator, equipment cover, and equipment top.

DVIA-P4000 (serial 220804R2) at Tier-1 Semiconductor Hwaseong NRD Line 3F with AIMS 1x. Compact installation report with axis VC curves and transmissibility plots; Reference uses the Generic Vibration Criteria markdown table only.