Sungkyunkwan University Raith EBPG5150 DVIA-P4000 Inspection Report
Contents
Overview
During DVIA-P4000 operation, a Caution VIB LED illuminated and an inspection was requested.
During inspection, oscillation on the Z-axis was confirmed.
The contact reported that equipment parts had been replaced previously.
Oscillation is suspected due to the addition of a new resonance rod.
Feedback and feedforward re-tuning completed (performance satisfactory).
System Information
Model: DVIA-P4000
Serial Number: 220714R4
Engineer
Youngha Lee from DAEIL SYSTEMS
Prepared by: Youngha Lee (Tuning date: 23.11.28; Report written date: 23.11.30; Date of business trip: 17.12.27~17.12.29)
Inspection Date
November 28, 2023
Location
Sungkyunkwan University Research Building 3F C/R
Equipment
Raith EBPG5150
Summary of Vibration Results
| Measurement Point | Z-axis (Vertical) 1-10 Hz | Z-axis (Vertical) 12.5-80 Hz | X-axis (Left to Right) 1-10 Hz | X-axis (Left to Right) 12.5-80 Hz | Y-axis (Front to Back) 1-10 Hz | Y-axis (Front to Back) 10-80 Hz |
|---|---|---|---|---|---|---|
| Floor | D | A | F | E | E | D |
| Active | D | C | F | D | E | D |
The equipment cannot be turned off; as a result, top-plate measurements in the high-frequency band read somewhat higher.
Data and Image
Z axis Transmissibility Graph
X axis Transmissibility Graph
Y axis Transmissibility Graph
Z-axis (Vertical) VC curves
X-axis (Left to Right) VC curves
Y-axis (Front to Back) VC curves
Reference
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
Share this Case Study
Case Study Information
Related Case Studies
Sungkyunkwan University Raith EBPG5150 DVIA-P4000 Inspection Report
Sungkyunkwan University Raith EBPG5150 DVIA-P4000 Installation Report
