Installation Report

DVIA-P Series

02-03-2023

Sungkyunkwan University Raith EBPG5150 DVIA-P4000 Installation Report

DVIA-P Series

Installation Report

Sungkyunkwan University

Raith

EBPG5150

Overview

Prepared for: Sungkyunkwan University

The DVIA-P4000 active vibration isolation platform is appropriately installed and functioning as intended.

System Information

Model: DVIA-P4000

Serial Number: 220714R4

Engineer

Prepared by: Youngha Lee, Sangjae Lee (tuning date 23.02.03; report written date 23.02.03)

Date of business trip : 17.12.27~17.12.29

Yeongha Lee and Sangjae Lee from DAEIL SYSTEMS

Tuning Date

Feb. 03, 2023

Location

Sungkyunkwan University 3rd floor, Cleanroom

Equipment

Raith EBPG5150

Measurement Device

6.1) PULSE 22

Hardware: Bruel & Kjaer Type 3050-A-040

Software: LapShop Application(PULSE Lapshop)

6.2) Acceleration Sensor

PCB Accelerometer

Model: 393B05

Summary of Vibration Results

Measurement Point	Z-axis (Vertical) 1-10 Hz	Z-axis (Vertical) 10-80 Hz	X-axis (Left to Right) 1-10 Hz	X-axis (Left to Right) 10-80 Hz	Y-axis (Front to Back) 1-10 Hz	Y-axis (Front to Back) 10-80 Hz
Floor	E	B	F	E	F	E
Active	G	C	G	D	G	D

Data and Image

Due to a request from the Raith representative, the Raith equipment cannot be turned off, resulting in vibration from the upper pump occurring at around the 46 Hz band.

=> Consequently, the VC curve in the 40 Hz band shows a higher measurement on the top plate.

9.1 Pump vibration measurement

Z axis

X axis

Y axis

Transmissibility Graph

A resonance peak occurs at 20 Hz on the horizontal axis, resulting in poor performance in that frequency band.

9.3 VC Curve Graph

Z-axis (Vertical) VC-Curve

X-axis (Left to Right) VC-Curve

Y-axis (Front to Back) VC-Curve

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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