Sungkyunkwan University Raith EBPG5150 DVIA-P4000 Inspection Report
Contents
Overview
During Raith EBPG5150 equipment self-vibration measurement, vibration exceeding 5 nm was detected at 60 Hz in all directions, prompting this inspection request.
DVIA-P4000 was connected to a PC and inspected and optimized using the UI program.
A Data Physics QUATTRO vibration measurement system was used to analyze problem vibration sources and measure vibration state.
Vibration Isolation System Information
Model: DVIA-P4000
Serial Number: 220714R4
Engineer
Youngha Lee from DAEIL SYSTEMS
Prepared by: Youngha Lee, Chaewon Lee (tuning date 24.02.19; report written date 24.02.22)
Inspection Date
February 19, 2024
Report Written Date
February 22, 2024
Number of Tuning Trial
3rd trial (Setup: 1× on 2023.02.03; inspection: 1× on 2023.11.28)
Location
Sungkyunkwan University Research Building 3F C/R, Suwon
Equipment
Raith EBPG5150
Equipment Condition
Equipment is installed, Idle
Measurement Device
9.1) Data Physics
Hardware: QUATTRO, Serial Number: 22436
Software: SignalCalc ACE
9.2) Measurement Setting
Bandwidth: 1 - 80Hz
Lines: 800
Window: Hanning
Averaging: FFT Spectrum Averaging
Engineering Units: m/s
9.3) Accelerometer
PCB Accelerometer
Model: 393B05
9.4) Measurement Method
Accelerometers are attached to the top plate and floor for vibration measurement.
Vibration is measured in Vertical, Left to Right, and Front to Back directions.
Measured data are plotted on VC curve graphs.
Summary of Vibration Results
Active on
| Measurement Point | Vertical 1-10 Hz | Vertical 12.5-80 Hz | Left to Right 1-10 Hz | Left to Right 12.5-80 Hz | Front to Back 1-10 Hz | Front to Back 12.5-80 Hz |
|---|---|---|---|---|---|---|
| Floor | F | C | F | E | F | F |
| DVIA-P4000 | F | C | F | D | G | E |
| Equipment Cover | F | C | F | C | E | C |
| Equipment Top | E | F | F | F | F | F |
Float off
| Measurement Point | Vertical 1-10 Hz | Vertical 12.5-80 Hz | Left to Right 1-10 Hz | Left to Right 12.5-80 Hz | Front to Back 1-10 Hz | Front to Back 12.5-80 Hz |
|---|---|---|---|---|---|---|
| Floor | E | B | F | E | F | D |
| DVIA-P4000 | E | A | F | B | F | B |
| Equipment Cover | F | A | F | A | F | A |
| Equipment Top | E | F | F | F | G | F |
Conclusion
Inspection was performed with the equipment in IDLE state, so equipment vibration could be measured.
(Equipment Turn off is required for accurate inspection and tuning.)
Vibration measured on the DVIA-P4000 increased compared with floor vibration; the measured vibration is judged to originate from the equipment cover.
When the isolator is fully turned off (Float off), vibration on the DVIA-P4000 top plate increases, indicating the isolator is attenuating equipment vibration normally.
Vibration at the requested frequency (60 Hz) was not confirmed during isolator inspection; Raith equipment internal vibration sources and electrical noise checks are considered necessary.
Data and Image
Active on
Vertical VC curves
Floor
DVIA-P4000
Equipment Cover
Equipment Top
Left to Right VC curves
Floor
DVIA-P4000
Equipment Cover
Equipment Top
Front to Back VC curves
Floor
DVIA-P4000
Equipment Cover
Equipment Top
Float off
Vertical VC curves
Floor
DVIA-P4000
Equipment Cover
Equipment Top
Left to Right VC curves
Floor
DVIA-P4000
Equipment Cover
Equipment Top
Front to Back VC curves
Floor
DVIA-P4000
Equipment Cover
Equipment Top
Reference
Generic Vibration Criteria
Notes:
1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.
2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.
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