Vibration Isolation Case Studies

GIS DHM demonstration equipment DVIA-P1000 (serial 231108R2) installation report at Guil Solution factory research laboratory—IDLE, Motor On, and Stage On measurement states with VC curves, autospectra, transmissibility (where measured), and measurement summary tables.

DVIA-P2200 (serial 240304R5) installation report for a JEOL JBX-8100FS electron beam lithography system at Korea Nanotech Institute 2F Nano Resource/Pattern Support Line, Gwanggyo. SET-UP, tuning, and vibration measurement on July 1, 2024 with equipment Turned off; engineer Chaewon Lee (DAEIL SYSTEMS). Published figures: equipment vibration specification diagram and per-axis VC, Narrowband, and Transmissibility plots. Reference uses the Generic Vibration Criteria markdown table only.

Tier-1 Semiconductor Pyeongtaek P2 EUV line ADVANTEST E5610 with DVIA-P4000 (serial 240405R2). Tuning June 28, 2024. VC and Transmissibility plots per axis; Reference as Generic Vibration Criteria markdown table only.

DVIA-P4000 installation report (serial 240424R1) at Huahong for ASML E-beam wafer inspection system eScan 460. Tuning 2024-09-12; report written 2024-09-19. Equipment installed on the platform and turned off during measurement. Publishes vertical, left-to-right, and front-to-back VC curves. Word cover graphic omitted; Reference uses the standard Generic Vibration Criteria markdown table.

DVIA-P4000 (serial 240607R3) follow-up inspections at Toppan Photomask CLB after KLA LMS IPRO4 placement—Vib LED, image stability, and grating vibration. Publishes vibration specification graphic; measurement data referenced in conclusion were provided to the customer separately.

DVIA-P4000 (serial 240607R3) tuning and vibration measurement at Toppan Photomasks CLB with KLA LMS IPRO4 installed on the platform. Publishes vibration specification and floor vibration limit curves by axis.