Installation Report

DVIA-P Series

05-21-2026

Korea Nanotech Institute JEOL JBX-8100FS DVIA-P2200 Installation Report

DVIA-P Series

Installation Report

Korea Nanotech Institute

JEOL

JBX-8100FS

240304R5

Overview

SET-UP was performed on the DVIA-P2200 after equipment placement at Korea Nanotech Institute.

Vibration measurement and tuning were performed with the equipment Turned off.

Cables connected to the equipment were in contact with the upper part of the vibration isolation platform. This may affect DVIA-P2200 performance.

Feedback and feedforward tuning was performed through UI software by connecting the DVIA-P2200 to a laptop, and performance was verified through vibration measurement using Data Physics measurement equipment.

Data are presented as VC curves together with reference materials on vibration levels.

Vibration Isolation System Information

Model: DVIA-P2200

Serial Number: 240304R5

Engineer

Chaewon Lee from DAEIL SYSTEMS

Installation Date

July 1, 2024

Installation Site

한국나노기술원 2F 나노 리소/패턴 지원라인, 광교

Equipment Information

Manufacturer: JEOL

Equipment: Electron Beam Lithography

Model: JBX-8100FS

Equipment vibration specification

Equipment Status

Equipment Installed/Turn off

Tuning Count

1회차

Measuring Equipment

10.1) Data Physics

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

10.2) Accelerometer

PCB Accelerometer

Model: 393B05

Measuring Set-up

F Span: 200

Lines: 3200

Window: Hanning

Averaging: FFT Spectrum Averaging

Engineering Units: m/s

Conclusion

Vibration measurement results show attenuation to VC-G across all frequency bands for Vertical, Left to Right, and Front to Back.

Equipment vibration specifications are satisfied across all frequency bands.

Measurement Data

Type	Measurement site	Direction	Equipment spec	Measured value (Floor)	Measured value (DVIA-P2200)	Result (Floor)	Result (DVIA-P2200)
Vibration	나노 리소/패턴 지원라인	Vertical	3.25E-05 m/s - 5.66E-06 @ 1 Hz - 2 Hz	1.51E-06 m/s @ 1 Hz	6.15E-07 m/s @ 1 Hz	VC-F	VC-G
Vibration			5.66E-06m/s - 3.18E-06 @ 2 Hz – 3.5 Hz	4.58E-07 m/s @ 2 Hz	2.22E-07 m/s @ 2 Hz	VC-G	VC-G
Vibration			3.18E-06 m/s - 6.36E-06 @ 3.5 Hz - 9 Hz	3.24E-07 m/s @ 5 Hz	1.00E-07 m/s @ 5 Hz	VC-G	VC-G
Vibration			6.36E-06 m/s – 2.83E-06 @ 9 Hz - 10 Hz	3.92E-07 m/s @ 10 Hz	8.87E-08 m/s @ 10 Hz	VC-G	VC-G
Vibration			2.83E-06 m/s – 2.40E-06 @ 10 Hz – 12.5 Hz	5.90E-07 m/s @ 12.5 Hz	1.21E-07 m/s @ 12.5 Hz	VC-G	VC-G
Vibration			2.40E-06 m/s – 1.13E-05 @ 12.5 Hz - 16 Hz	5.36E-07 m/s @ 16 Hz	2.58E-07 m/s @ 16 Hz	VC-G	VC-G
Vibration			1.13E-05 m/s – 1.70E-06 @ 16 Hz - 100 Hz	1.27E-06 m/s @ 63 Hz	2.86E-07 m/s @ 63 Hz	VC-F	VC-G
Vibration		Left to Right	3.25E-05 m/s - 5.66E-06 @ 1 Hz - 2 Hz	1.00E-06 m/s @ 1 Hz	4.99E-07 m/s @ 1 Hz	VC-F	VC-G
Vibration			5.66E-06m/s - 3.18E-06 @ 2 Hz – 3.5 Hz	2.22E-07 m/s @ 2 Hz	2.21E-07 m/s @ 2 Hz	VC-G	VC-G
Vibration			3.18E-06 m/s - 6.36E-06 @ 3.5 Hz - 9 Hz	3.52E-07 m/s @ 8 Hz	1.12E-07 m/s @ 8 Hz	VC-G	VC-G
Vibration			6.36E-06 m/s – 2.83E-06 @ 9 Hz - 10 Hz	3.68-07 m/s @ 10 Hz	1.43E-07 m/s @ 10 Hz	VC-G	VC-G
Vibration			2.83E-06 m/s – 2.40E-06 @ 10 Hz – 12.5 Hz	5.78E-07 m/s @ 12.5 Hz	1.94E-07 m/s @ 12.5 Hz	VC-G	VC-G
Vibration			2.40E-06 m/s – 1.13E-05 @ 12.5 Hz - 16 Hz	9.50E-07m/s @ 16 Hz	3.48E-07 m/s @ 16 Hz	VC-F	VC-G
Vibration			1.13E-05 m/s – 1.70E-06 @ 16 Hz - 100 Hz	2.39E-06 m/s @ 20 Hz	7.53E-07 m/s @ 20 Hz	VC-E	VC-G
Vibration		Front to Back	3.25E-05 m/s - 5.66E-06 @ 1 Hz - 2 Hz	1.09E-06 m/s @ 1.6 Hz	2.91E-07 m/s @ 1.6 Hz	VC-F	VC-G
Vibration			5.66E-06m/s - 3.18E-06 @ 2 Hz – 3.5 Hz	9.95E-07 m/s @ 2 Hz	2.63E-07 m/s @ 2 Hz	VC-F	VC-G
Vibration			3.18E-06 m/s - 6.36E-06 @ 3.5 Hz - 9 Hz	7.18E-07 m/s @ 5 Hz	1.14E-07 m/s @ 5 Hz	VC-G	VC-G
Vibration			6.36E-06 m/s – 2.83E-06 @ 9 Hz - 10 Hz	4.72E-07 m/s @ 10 Hz	1.47E-07 m/s @ 10 Hz	VC-G	VC-G
Vibration			2.83E-06 m/s – 2.40E-06 @ 10 Hz – 12.5 Hz	7.46E-07 m/s @ 12.5 Hz	2.36E-07 m/s @ 12.5 Hz	VC-G	VC-G
Vibration			2.40E-06 m/s – 1.13E-05 @ 12.5 Hz - 16 Hz	8.36E-07 m/s @ 16 Hz	2.94E-07 m/s @ 16 Hz	VC-F	VC-G
Vibration			1.13E-05 m/s – 1.70E-06 @ 16 Hz - 100 Hz	1.58E-06 m/s @ 20 Hz	6.29E-07 m/s @ 20 Hz	VC-E	VC-G

Data and Image

Vertical VC Curves

Vertical Narrowband

Vertical Transmissibility

Left to Right VC Curves

Left to Right Narrowband

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Narrowband

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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