Installation Report

DVIA-P Series

07-01-2024

Korea Nanotechnology Institute JEOL JBX-8100FS DVIA-P2200 Installation Report

DVIA-P Series

Installation Report

Korea Nanotechnology Institute

JEOL

JBX-8100FS

240304R5

Overview

SET-UP was performed after equipment placement on the DVIA-P2200 at Korea Nanotechnology Institute.

Vibration measurement and tuning were performed with the equipment Turned on.

Cables connected to the equipment were in contact with the upper part of the vibration isolation system. This may affect DVIA-P2200 performance.

Vibration was occurring from equipment around the JBX-8100FS. This may affect DVIA-P2200 performance.

The DVIA-P2200 was connected to a laptop; feedback and feedforward tuning were performed through the UI software, and performance was checked by vibration measurement using Data Physics measurement equipment.

Data are presented as VC curves, along with reference materials on vibration levels.

Vibration Isolation System Information

Model: DVIA-P2200

Serial Number: 240304R5

Engineer

Chaewon Lee from DAEIL SYSTEMS

Measurement Date

July 1, 2024

Installation Date

July 2, 2024

Installation Site

한국나노기술원 2F 나노 리소/패턴 지원라인, 광교

End User

한국나노기술원

Equipment Information

Manufacturer: JEOL

Equipment: Electron Beam Lithography

Model: JBX-8100FS

Equipment vibration specification

Equipment Status

Equipment Installed/Turn on

Tuning Session

2nd session

Measuring Equipment

Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

Accelerometer

PCB Accelerometer

Model: 393B05

Measuring Set-up

F Span: 200

Lines: 3200

Window: Hanning

Averaging: FFT Spectrum Averaging

Engineering Units: m/s

Conclusion

Vibration measurement results show increased vibration near 40 Hz and 80 Hz in the Vertical, Left to Right, and Front to Back directions. This is presumed to be due to equipment vibration and vibration from surrounding equipment.

Equipment vibration specification is satisfied in all frequency bands.

Measurement Data

Measuring Point	Direction	Spec	Measurement Data		Result
Measuring Point	Direction	Spec	Floor	DVIA-P2200	Floor	DVIA-P2200
나노 리소/패턴 지원라인	Vertical	3.25E-05 m/s - 5.66E-06 @ 1 Hz - 2 Hz	1.10E-06 m/s @ 1 Hz	5.76E-07 m/s @ 1 Hz	VC-F	VC-G
		5.66E-06m/s - 3.18E-06 @ 2 Hz – 3.5 Hz	4.88E-07 m/s @ 2.5 Hz	1.74E-07 m/s @ 2.5 Hz	VC-G	VC-G
		3.18E-06 m/s - 6.36E-06 @ 3.5 Hz - 9 Hz	3.23E-07 m/s @ 8 Hz	1.21E-07 m/s @ 8 Hz	VC-G	VC-G
		6.36E-06 m/s – 2.83E-06 @ 9 Hz - 10 Hz	4.08E-07 m/s @ 10 Hz	1.21E-07 m/s @ 10 Hz	VC-G	VC-G
		2.83E-06 m/s – 2.40E-06 @ 10 Hz – 12.5 Hz	4.15E-07 m/s @ 12.5 Hz	1.33E-07 m/s @ 12.5 Hz	VC-G	VC-G
		2.40E-06 m/s – 1.13E-05 @ 12.5 Hz - 16 Hz	3.74E-07 m/s @ 16 Hz	3.50E-07 m/s @ 16 Hz	VC-G	VC-G
		1.13E-05 m/s – 1.70E-06 @ 16 Hz - 100 Hz	5.63E-07 m/s @ 63 Hz	2.43E-07 m/s @ 63 Hz	VC-G	VC-E
	Left to Right	3.25E-05 m/s - 5.66E-06 @ 1 Hz - 2 Hz	1.10E-06 m/s @ 1 Hz	4.67E-07 m/s @ 1 Hz	VC-F	VC-G
		5.66E-06m/s - 3.18E-06 @ 2 Hz – 3.5 Hz	4.35E-07 m/s @ 3.15 Hz	1.28E-07 m/s @ 3.15 Hz	VC-G	VC-G
		3.18E-06 m/s - 6.36E-06 @ 3.5 Hz - 9 Hz	4.55E-07 m/s @ 8 Hz	1.25E-07 m/s @ 8 Hz	VC-G	VC-G
		6.36E-06 m/s – 2.83E-06 @ 9 Hz - 10 Hz	3.64E-07 m/s @ 10 Hz	1.62E-07 m/s @ 10 Hz	VC-G	VC-G
		2.83E-06 m/s – 2.40E-06 @ 10 Hz – 12.5 Hz	4.59E-07 m/s @ 12.5 Hz	2.38E-07 m/s @ 12.5 Hz	VC-G	VC-G
		2.40E-06 m/s – 1.13E-05 @ 12.5 Hz - 16 Hz	9.67E-07m/s @ 16 Hz	3.19E-07 m/s @ 16 Hz	VC-G	VC-G
		1.13E-05 m/s – 1.70E-06 @ 16 Hz - 100 Hz	4.25E-07 m/s @ 40 Hz	2.96E-06 m/s @ 40 Hz	VC-G	VC-E
	Front to Back	3.25E-05 m/s - 5.66E-06 @ 1 Hz - 2 Hz	1.10E-06 m/s @ 1 Hz	5.20E-07 m/s @ 1.6 Hz	VC-F	VC-G
		5.66E-06m/s - 3.18E-06 @ 2 Hz – 3.5 Hz	5.91E-07 m/s @ 2 Hz	2.20E-07 m/s @ 2 Hz	VC-G	VC-G
		3.18E-06 m/s - 6.36E-06 @ 3.5 Hz - 9 Hz	8.44E-07 m/s @ 6.3 Hz	1.62E-07 m/s @ 6.3 Hz	VC-F	VC-G
		6.36E-06 m/s – 2.83E-06 @ 9 Hz - 10 Hz	5.94E-07 m/s @ 10 Hz	1.84E-07 m/s @ 10 Hz	VC-G	VC-G
		2.83E-06 m/s – 2.40E-06 @ 10 Hz – 12.5 Hz	9.08E-07 m/s @ 12.5 Hz	2.88E-07 m/s @ 12.5 Hz	VC-F	VC-G
		2.40E-06 m/s – 1.13E-05 @ 12.5 Hz - 16 Hz	7.50E-07 m/s @ 16 Hz	3.42E-07 m/s @ 16 Hz	VC-G	VC-G
		1.13E-05 m/s – 1.70E-06 @ 16 Hz - 100 Hz	3.27E-07 m/s @ 80 Hz	1.67E-06 m/s @ 80 Hz	VC-G	VC-E

Data and Image

Vertical VC Curves

Vertical Narrowband

Vertical Transmissibility

Left to Right VC Curves

Left to Right Narrowband

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Narrowband

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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