Installation Report
DVIA-P Series
05-21-2026
Toppan Photomasks CLB KLA Reticle Pattern Placement Metrology LMS IPRO4 DVIA-P4000 (240607R3) Installation Report
DVIA-P Series
Installation Report
Toppan Photomasks
KLA
LMS IPRO4
DVIA-P4000
240607R3
Contents
Vibration Isolation System Information
Model: DVIA-P4000
Serial Number: 240607R3
Engineer
Daehyun Kim
Tuning Date
October 2, 2024
Installation Site
Toppan Photomasks CLB
Equipment
Manufacturer: KLA
Equipment: Reticle Pattern Placement Metrology
Model: LMS IPRO4
Equipment Status
The equipment was installed on the DVIA-P4000 platform and under set-up
Number of Tuning Trial
4th
Measurement Device
8.1) Brüel & Kjær LAN-XI DAQ Type 3050
-Hardware: B&K Front End Type 3050-A-040
-Software: B&K Pulse Labshop 22 Version
8.2) Accelerometer
PCB Accelerometer
Model: 393B05
Measurement Setup
Bandwidth: 200 Hz
Lines: 800
Averaging: Spectrum Averaging
Engineering Units: m/s2
Window: Hanning
Overlap: Max
Vibration specification
Conclusion
The measured vibration at top (upper) pad of DVIA-P4000 satisfy the vibration specification in all axes.
Data and Image
Limits for Floor Vibrations (Z-amplitude)
Limits for Floor Vibrations (X-amplitude)
Limits for Floor Vibrations (Y-amplitude)
Share this Case Study
Case Study Information
Category
Installation Report
SeriesDVIA-P Series
Date05-21-2026
Tags
DVIA-P Series
Installation Report
Toppan Photomasks
KLA
LMS IPRO4
DVIA-P4000
240607R3
Related Case Studies
DVIA-P Series
Topan Photomask CLB KLA LMS IPRO4 DVIA-P4000 (240607R3) Inspection Report — September–October 2024
05-21-2026Read more
DVIA-P Series
YIMO Huahong FAB 9 ASML E-beam Wafer inspection system eScan460 DVIA-P4000 Installation Report
06-15-2026Read more
DVIA-P Series
Huahong ASML eScan460 DVIA-P4000 Installation Report
06-11-2026Read more