Installation Report

DVIA-P Series

08-14-2026

Tier-1 Semiconductor Texas Advantest E5620 DVIA-P4000 Installation Report

DVIA-P Series

Installation Report

Tier-1 Semiconductor

Advantest

E5620

DVIA-P4000

VC-C

260401R3-1

Report Information

Report: DVIA-P4000 Installation Report, S/N 260401R3-1

Work completed: 2026-08-14

Overview

This report provides a record of the installation activities of the DVIA-P4000 vibration isolation system supporting an Advantest E5620 on the 3rd floor of the FAB at a Tier-1 Semiconductor site in Texas, USA.

The system was rigged into position, set flush with the raised floor, levelled and seismically restrained, and vibration data were then collected to verify performance.

With the DVIA-P4000 ON, the installation PASSED the vibration specification in all three measured directions.

Vibration Isolation System

Model: DVIA-P4000

Serial Number: 260401R3-1

Software: Site-Specific Tune

Installation Site

FAB, 3rd Floor · Texas, USA

End User

Tier-1 Semiconductor

Customer Equipment

Manufacturer: Advantest

Model: E5620

Vibration Specifications

Tool	Specification	Directions
Advantest E5620	VC-C	All Directions

For stable measurement of fine patterns, the equipment manufacturer defines the allowable vibration level as VC-C, < 12.5 µm/s over 1 - 80 Hz.

Allowable Vibration Level

Scope of Work

Coordinate and guide the provided rigging assistance to position the equipment

Providing lifting services

Positioning the DVIA-P4000 flush with raised floor

Leveling the DVIA-P4000 to within .5mm

Attaching seismic restraints between the floor and the DVIA-P4000

Collecting vibration data to verify the performance

Controller and utilites disconnected and safely stored until our next visit

Measuring Equipment

Calibrated seismic accelerometers

Measuring Set-up

Bandwidth: 160 Hz

Lines: 1600

Window: Hanning

Coupling: ICP 2mA

Average Type: Stable

Duration: 10 seconds

Engineering Units: m/s (RMS)

X Axis Scaling: 1/3 Octave

Measurement Data Summary

Type	Position	Direction	Specification	Measurement	Result
Vibration	DVIA-P4000	Front-Back	VC-C	VC-C	✓ PASS
		Left-Right	VC-C	VC-C	✓ PASS
		Vertical	VC-C	VC-C	✓ PASS

Measurement Data

Front-Back VC Curves

Left-Right VC Curves

Vertical VC Curves

Reference

The table below is the vibration level classification of IEST-RP-CC012.2.

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.3)	N/A

Notes:

1. Measured in 1/3 octave bands over 8-80 Hz (VC-A and VC-B) or 1-80 Hz (VC-C through VC-G).

2. Detail size refers to line width in microelectronics manufacturing, or particle (cell) size in medical and pharmaceutical research; it corresponds to imaging related to probe technology, AFM and nanotechnology.