Topan Photomask CLB KLA LMS IPRO4 DVIA-P4000 (240607R3) Inspection Report — September–October 2024

After second tuning with the upper equipment in Turned on state, the customer reported that the controller Vib LED remained on after controller Turned off/on; site inspections were performed on 09/30 and 10/04.

The customer reported that images on the upper equipment were shaking and that vibration from nearby grating seemed to transmit through; a site inspection was performed on 10/02.

Model: DVIA-P4000

Serial Number: 240607R3

Kim Daehyun, DAEIL SYSTEMS Development Team

September 30, 2024 (Chaewon Lee accompanied)

October 2, 2024 (Hosang Yoo accompanied)

October 4, 2024 (Hosang Yoo accompanied)

Topan Photomask CLB

Manufacturer: KLA

Equipment: Reticle Pattern Placement Metrology

Model: LMS IPRO4

제진대 위에 장비 안착, 턴온 (Turned on) 및 Setup 중

For controller Vib LED illumination, gain was adjusted to increase margin; the customer was advised that while the upper equipment is in Setup, large changes in total weight or center-of-gravity position/height may cause the LED to illuminate again and that another site visit may be required.

For upper-equipment image shake, a report and measurement data confirming that pad vibration on the isolator meets the vibration spec were sent to the customer.

Removing the acrylic plate seated in the gap between the isolator and nearby grating improved vibration ingress from the grating.

1) September 30 inspection

Z-axis gain adjusted to increase margin (fine X/Y tuning for performance improvement)

2) October 2 inspection

Overall performance check and tuning followed by vibration measurement; measurement values were sent to the customer (vibration spec satisfied)

An acrylic plate on the gap between the upper pad and nearby grating was removed to assess impact; vibration ingress improved

3) October 4 inspection

Z-axis gain adjusted to increase margin (fine X/Y tuning for performance improvement)

The customer was advised that while the upper equipment is in Setup, large changes in total weight or center-of-gravity position/height on the isolator may cause Vib LED to illuminate again and that another site visit may be required