Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
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Fudan University STM DVIA-MO1000 (221114R2) Installation Report
DVIA-MO1000 installation report for an STM site in Shanghai associated with Fudan University (serial 221114R2). Measurement UI curves are not embedded in the source document; this public case publishes the onsite equipment photo plus structured field text.

TESCAN Korea LB Semicon Amber X GMH DVIA-MB1000 (221202R2) Installation Report
TESCAN Korea installation worksheet for AMBER X GMH on DVIA-MB1000 (221202R2) at LB Semicon Pyeongtaek (4F cleanroom). VC curves and transmissibility by axis.
Tier-1 Semiconductor Hwaseong ZEISS GeminiSEM 460 DVIA-MB1000 (230110R2) Installation Report
DVIA-MB1000 installation report (serial 230110R2) for ZEISS GeminiSEM 460, prepared for ZEISS KOREA, with tuning and reporting in July 2023 at Tier-1 Semiconductor Hwaseong (11Line 4F development analysis laboratory). Summary of vibration results tabulates floor vs active VC-curve grades by axis and band; Data and Image publishes Z/X/Y VC curves and transmissibility plots. Decorative header raster and the reference-line graphic are omitted; Reference uses the standard Generic Vibration Criteria markdown table only.

PXW ZEISS FIB-SEM Crossbeam550 DVIA-M1000 (230222R4) Installation Report
DVIA-M1000 installation worksheet (serial 230222R4) for ZEISS FIB-SEM Crossbeam550 — PXW, Shenzhen site. Administrative fields (operator, reporting dates), overview and measurement bullets match the abbreviated form. Published figures only: M1000 internal program measurement captures for Z, X, Y axes from the worksheet; PXW/header strip raster omitted.

DVIA-M1000 (230324R6) Set-up Report
DVIA-M1000 set-up record (serial 230324R6) from the 24.03.12 form. Site and end-user fields are not filled beyond dashes on the sheet; the report states good performance and includes M1000 internal program measurement plots for vertical, left-to-right, and front-to-back axes only (no equipment photo or Reference section in the source file).

Chinese Academy of Sciences — Institute of Metal Research ZEISS GeminiSEM360 DVIA-M1000 (230328R2) Installation Report
DVIA-M1000 abbreviated installation worksheet (serial 230328R2) at IMR Shenyang end-user site with ZEISS GeminiSEM360. Dates on the form: setup 23.09.06, reporting 23.09.15, prior business-trip line 17.12.27~17.12.29, and Overview plus measurement dated 2023.09.06 (Wednesday). The source lacks vibration specification, equipment status / tuning-request blocks, a measurement-summary table, and a Reference graphic; the plots section is titled “M1000 internal program performance measurement result” with Z / X / Y axis screenshots. Decorative header/logo bitmap from Word (image1) is omitted from the public page.