Korea Nano Technology Institute JEOL JBX-8100FS DVIA-P2200 Installation Report
Contents
Overview
Tuning and vibration measurement were performed on the DVIA-P2200 installed at Korea Nano Technology Institute.
Vibration measurement and tuning were performed with the equipment Turned on/IDLE.
The DVIA-P2200 was connected to a laptop; feedback and feedforward tuning were carried out through the UI software, and Data Physics measurement
Equipment was used for vibration measurement to verify performance.
Data are presented as VC curves along with reference materials for vibration level assessment.
Vibration Isolation System Information
Model: DVIA-P2200
Serial Number: 240705R1
Engineer
Chaewon Lee from DAEIL SYSTEMS
Tuning Date
October 29, 2024
Installation Site
한국나노기술원 2F 나노 리소/패턴 지원라인
Prepared for
JEOL KOREA
End User
한국나노기술원
Equipment Information
Manufacturer: JEOL
Equipment: Electron Beam Lithography
Model: JBX-8100FS
Equipment Photo
Equipment Vibration Specifications
Equipment Status
설치완료/Turned on
Tuning Session
1st session
Measuring Equipment
10.1) Data Physics
-Hardware: QUATTRO, Serial Number: 22436
-Software: SignalCalc ACE
10.2) Accelerometer
PCB Accelerometer
Model: 393B05
Measuring Set-up
F Span: 200
Lines: 3200
Window: Hanning
Averaging: FFT Spectrum Averaging
Engineering Units: m/s
Conclusion
Large vibration occurs near 40 Hz, 60 Hz, and 78 Hz on the control unit installed on the equipment. In particular, vibration exceeding VC-A magnitude is measured at 78 Hz. Comparing vibration between the control unit and the isolator top plate shows vibration exceeding VC-A magnitude near 78 Hz on the control unit. Excessive vibration on the isolator top is difficult to isolate.
In the Vertical, Left to Right, and Front to Back directions, equipment vibration specifications are satisfied across all frequency bands except 78 Hz.
On December 26, 2024, confirmation was received from the customer that there is no problem using the equipment on the isolator top.
Measurement Data
| Measurement site | Status | Direction | Equipment spec | Floor | DVIA-P2200 | Floor | DVIA-P2200 |
|---|---|---|---|---|---|---|---|
| 위치: 나노/리소패턴 지원라인 1.하부패드 2.DVIA-P2200 | 설치 완료 /Turned on | Vertical | 1.13E-05 m/s – 1.70E-06 m/s @ 16 Hz - 100 Hz | VC-E @ 63 Hz | VC-G @ 63 Hz | ✓ PASS | ✓ PASS |
| Left to Right | 1.13E-05 m/s – 1.70E-06 m/s @ 16 Hz - 100 Hz | VC-G @ 80 Hz | VC-D @ 80 Hz | ✓ PASS | ✗ FAIL (upper equipment vibration above 78 Hz) | ||
| Front to Back | 1.13E-05 m/s – 1.70E-06 m/s @ 16 Hz - 100 Hz | VC-G @ 80 Hz | VC-D @ 80 Hz | ✓ PASS | ✗ FAIL (upper equipment vibration above 78 Hz) |
Data and Image
Vertical VC Curves
Vertical Narrowband
Vertical Transmissibility
Left to Right VC Curves
Left to Right Narrowband
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Narrowband
Front to Back Transmissibility
Control Unit VC Curves
Control Unit Narrowband
Reference
Generic Vibration Criteria
Notes:
1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.
2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.
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