Korea Institute of Nanotechnology JEOL JBX-8100FS DVIA-P2200 Installation Report
Contents
Overview
Tuning and vibration measurement were performed on the DVIA-P2200 installed at Korea Institute of Nanotechnology.
Vibration measurement and tuning were conducted with the equipment Turned on/IDLE.
The DVIA-P2200 was connected to a laptop; feedback and feedforward tuning via UI software and vibration measurement with Data Physics equipment were performed for performance inspection.
Data are presented as VC curves, with reference materials on vibration levels.
Vibration Isolation System Information
Model: DVIA-P2200
Serial Number: 240705R1
Engineer
Chaewon Lee from DAEIL SYSTEMS
Measurement Date
October 29, 2024
Installation Site
Korea Institute of Nanotechnology 2F Nano Reso/Pattern Support Line
End User
Korea Institute of Nanotechnology
Equipment Information
Manufacturer: JEOL
Equipment: Electron Beam Lithography
Model: JBX-8100FS
Equipment Photo
Equipment vibration specification
Equipment Status
설치완료/Turned on
Tuning count
1 time
Measuring Equipment
11.1) Data Physics
Hardware: QUATTRO, Serial Number: 22436
Software: SignalCalc ACE
11.2) Accelerometer
PCB Accelerometer
Model: 393B05
Measuring Set-up
F Span: 200
Lines: 3200
Window: Hanning
Averaging: FFT Spectrum Averaging
Engineering Units: m/s
Conclusion
Large vibration occurs near 40 Hz and 78 Hz at the control unit installed on the equipment. Especially at 78 Hz, vibration exceeding VC-A magnitude is measured. Comparing vibration graphs of the control unit and isolator top plate shows vibration at 78 Hz originates from the control unit. Excessive vibration on top of the isolator is difficult to isolate.
Vertical, Left to Right, and Front to Back all satisfy equipment vibration specification in all bands except 78 Hz.
Measurement Data
| Measuring site | Equipment status | Direction | Equipment spec | Measuring data | Result | ||
|---|---|---|---|---|---|---|---|
| Floor | DVIA-P2200 | Floor | DVIA-P2200 | ||||
| Location: Nano/Reso-Pattern Support Line 1. Lower pad 2. DVIA-P2200 | 설치완료 /Turned on | Vertical | 1.13E-05 m/s – 1.70E-06 @ 16 Hz - 100 Hz | VC-E @ 63 Hz | VC-G @ 63 Hz | ✓ PASS | ✓ PASS |
| Left to Right | 1.13E-05 m/s – 1.70E-06 @ 16 Hz - 100 Hz | VC-G @ 80 Hz | VC-D @ 80 Hz | ✓ PASS | ✗ FAIL | ||
| Front to Back | 1.13E-05 m/s – 1.70E-06 @ 16 Hz - 100 Hz | VC-G @ 80 Hz | VC-D @ 80 Hz | ✓ PASS | ✗ FAIL | ||
Data and Image
Vertical VC Curves
Vertical Narrowband
Vertical Transmissibility
Left to Right VC Curves
Left to Right Narrowband
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Narrowband
Front to Back Transmissibility
Control Unit VC Curves
Control Unit Narrowband
Reference
Generic Vibration Criteria
Notes:
1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.
2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.
