Korea Nano Technology Institute JEOL JBX-8100FS DVIA-P2200 Installation Report
Contents
Overview
Tuning and vibration measurement were performed on the DVIA-P2200 installed at Korea Nano Technology Institute.
Vibration measurement and tuning were performed with the equipment Turned on/IDLE.
During tuning and vibration measurement on 24.10.29, a frequency band fell out of spec due to 78 Hz vibration from the equipment Control Unit. During this tuning and vibration measurement, the Control Unit was Turned off.
Data are presented as VC curves, along with reference materials for vibration level assessment.
Vibration Isolation System Information
Model: DVIA-P2200
Serial Number: 240705R1
Engineer
Chaewon Lee, Jonghwa Seo from DAEIL SYSTEMS
Measurement Date
January 10, 2025
Installation Site
Korea Nano Technology Institute 2F Nano Litho/Pattern Support Line
End User
Korea Nano Technology Institute
Equipment Status
장비설치/IDLE
Equipment Information
Manufacturer: JEOL
Equipment: Electron Beam Lithography
Model: JBX-8100FS
Vibration specification
no HWL - V : VC-F, H: VC-G
With HWL - V : VC-E, H: VC-F
Measuring Equipment
10.1) Data Physics DAQ
-Hardware: QUATTRO, Serial Number: 22436
-Software: SignalCalc ACE
10.2) Accelerometer
PCB Accelerometer
Model: 393B05
Measuring Set-up
F Span: 200
Lines: 3200
Engineering Units: m/s
Window: Hanning
Averaging: FFT Spectrum Averaging
Average Mode: Exponential, 40
Conclusion
Vibration specifications are satisfied in all directions.
Measurement Data
| Measuring Point | Status | Direction | Equipment Spec | Lower Pad | DVIA-P2200 | Lower Pad | DVIA-P2200 |
|---|---|---|---|---|---|---|---|
| Nano/Litho Pattern Support Line 1. Lower Pad 2. DVIA-P2200 | Equipment Turned on/IDLE | Vertical | 1.13E-05 m/s – 1.70E-06 m/s @ 16 Hz - 100 Hz | VC-E @ 63 Hz | VC-G @ 63 Hz | ✓ PASS | ✓ PASS |
| Left to Right | 1.13E-05 m/s – 1.70E-06 m/s @ 16 Hz - 100 Hz | VC-E @ 20 Hz | VC-G @ 20 Hz | ✓ PASS | ✓ PASS | ||
| Front to Back | 1.13E-05 m/s – 1.70E-06 m/s @ 16 Hz - 100 Hz | VC-E @ 63 Hz | VC-G @ 63 Hz | ✓ PASS | ✓ PASS |
Data and Image
Vertical VC Curves
Vertical Autospectrum
Vertical Transmissibility
Left to Right VC Curves
Left to Right Autospectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Autospecturm
Front to Back Transmissibility
Equipment Photo
Reference
Generic Vibration Criteria
Notes:
1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.
2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.
Share this Case Study
Case Study Information
Related Case Studies
ETRI JEOL JBX-8100FS DVIA-P2200 Installation Report
Korea Nano Technology Institute JEOL JBX-8100FS DVIA-P2200 Installation Report
