Tier-1 Semiconductor DSR Integrated Advanced Technology Lab Self-made DVIA-C-P2200 Installation Report
Contents
Overview
Tuning and vibration measurement were performed on the DVIA-C-P2200 installed at Tier-1 Semiconductor DSR Integrated Advanced Technology Lab.
Tuning and vibration measurement were conducted with the equipment not installed.
Tier-1 Semiconductor DSR plans to install self-developed equipment; there is no vibration specification criteria.
Data are presented as VC Curves, along with reference materials for vibration level assessment.
Vibration Isolation System Information
Model: DVIA-C-P2200
Serial Number: 240927R4
Engineer
Chaewon Lee from DAEIL SYSTEMS
Measurement Date
December 16, 2024
Installation Site
N/A
End User
Tier-1 Semiconductor DSR
Equipment Information
Manufacturer: Self - made
Equipment: -
Model: -
Equipment Status
장비 미설치
Measuring Equipment
9.1) Data Physics DAQ
-Hardware: QUATTRO, Serial Number: 22436
-Software: SignalCalc ACE
9.2) Accelerometer
PCB Accelerometer
Model: 393B05
Measuring Set-up
F Span: 200 Hz
Lines: 3200
Engineering Units: m/s
Window: Hanning
Averaging: FFT Spectrum Averaging
Averaging mode: Exponential, 40
Conclusion
Vertical: VC-G vibration was measured in all bands.
Left to Right, Front to Back: the highest vibration measured was VC-E. Performance in the low-frequency band is expected to improve further when tuning is performed after equipment installation.
Measurement Data
| Measurement site | State | Direction | Measurement Data | |
|---|---|---|---|---|
| Floor | DVIA-C-P2200 | |||
| Integrated Advanced Technology Lab 1. Floor 2. DVIA-C-P2200 | 장비 미설치 | Vertical | VC-A @ 100 Hz | VC-G @ 100 Hz |
| Left to Right | VC-B @ 100 Hz | VC-G @ 100 Hz | ||
| Front to Back | VC-B @ 100 Hz | VC-G @ 100 Hz | ||
Data and Image
Vertical VC Curves
Vertical Autospectrum
Vertical Transmissibility
Left to Right VC Curves
Left to Right Autospectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Autospecturm
Front to Back Transmissibility
Reference
Generic Vibration Criteria
Notes:
1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.
2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.
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