Installation Report

DVIA-P Series

05-21-2026

GIS Guil Solution Factory GIS DHM Demonstration Equipment DVIA-P1000 Installation Report

DVIA-P Series

Installation Report

GIS

Guil Solution

DHM

DVIA-P1000

231108R2

Overview

Tuning and vibration measurement were performed on the DVIA-P1000 installed at the Guil Solution factory building research laboratory.

After equipment placement, tuning and vibration measurement were performed in three states: IDLE, Motor On, and Stage On.

Data measured in IDLE state were recorded after tuning completion with the equipment in Turned off state; data measured in Motor On state were recorded after tuning in that state. Therefore, data obtained in Motor On state are adjusted more appropriately to the actual operating environment and are more reliable.

Vibration amplified in the low-frequency band is considered to be due to vibration from upper equipment.

Performance inspection was conducted through feedback and feedforward tuning via UI software with the DVIA-P1000 connected to a laptop, and vibration measurement using Data Physics measurement equipment.

Data are presented as VC curves, along with reference materials for vibration level assessment.

Vibration Isolation System Information

Model: DVIA-P1000

Serial Number: 231108R2

Engineer

Chaewon Lee, Jonghwa Seo from DAEIL SYSTEMS

Measurement Date

January 20, 2025

Installation Site

Guil Solution factory building research laboratory on site

End User

GIS

Customer Equipment

Manufacturer: GIS

Equipment: DHM demonstration equipment (Self-Made)

Model: -

Equipment Status

장비 설치 및 IDLE/Motor On

Vibration Specifications

Measuring Equipment

10.1) Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

10.2) Accelerometer

PCB Accelerometer

Model: 393B05

Measuring Set-up

F Span: 200

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

Conclusion

Equipment vibration with a 1.3 Hz period is measured from the low-frequency band. Vibration occurring on the upper part of the vibration isolation platform has limits in control, but normal isolation performance is maintained in other frequency bands except for this.

Measurement Data

IDLE

Measuring Point	Status	Direction	Lower Pad	DVIA-P1000
Guil Solution research laboratory / 1. Lower pad / 2. DVIA-P4000	장비 설치/IDLE	Vertical	VC-G / @ 100 Hz	VC-G / @ 100 Hz
		Left to Right	VC-E / @ 63 Hz	VC-G / @ 63 Hz
		Front to Back	VC-E / @ 50 Hz	VC-G / @ 50 Hz

Motor On

Measuring Point	Status	Direction	Lower Pad	DVIA-P1000
Guil Solution research laboratory / 1. Lower pad / 2. DVIA-P4000	장비 설치/Motor On	Vertical	VC-G / @ 50 Hz	VC-G / @ 50 Hz
		Left to Right	VC-F / @ 50 Hz	VC-G / @ 50 Hz
		Front to Back	VC-F / @ 50 Hz	VC-G / @50 Hz

Stage On

Measuring Point	Status	Direction	Lower Pad	DVIA-P1000
Guil Solution research laboratory / 1. Lower pad / 2. DVIA-P4000	장비 설치/Stage On	Vertical	VC-G / @ 8 Hz	VC-A / @ 8 Hz
		Left to Right	VC-E / @ 8 Hz	Operating Theatre / @ 8 Hz
		Front to Back	VC-E / @ 6.3 Hz	Operating Theatre / @ 6.3 Hz

Data and Image

Equipment IDLE

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospecturm

Front to Back Transmissibility

Equipment Motor On

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospecturm

Front to Back Transmissibility

Equipment Stage On

Vertical VC Curves

Vertical Autospectrum

Left to Right VC Curves

Left to Right Autospectrum

Front to Back VC Curves

Front to Back Autospecturm

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A