Installation Report

DVIA-P Series

07-16-2025

KIMM EL High Vacuum Chamber DVIA-P1000 Installation Report

DVIA-P Series

Installation Report

KIMM

DVIA-P1000

Overview

Tuning and vibration measurement were performed on the DVIA-P1000 installed at the Korea Institute of Machinery & Materials (KIMM) Building L2, 1st floor research laboratory.

Vibration measurement and tuning were conducted with the equipment Turned off.

The equipment has significant eccentricity, and piping at the rear connects to a pump installed on the floor; this may affect tuning and vibration measurement.

Data are presented as VC Curves, along with reference materials for vibration level assessment.

Vibration Isolation System Information

Model: DVIA-P1000

Serial Number: 250122R1-2

Engineer

Chaewon Lee from DAEIL SYSTEMS

Measurement Date

July 15, 2025

Installation Site

Korea Institute of Machinery & Materials (KIMM) Building L2, 1st floor research laboratory

End User

Korea Institute of Machinery & Materials (KIMM)

Equipment Information

Manufacturer: EL

Equipment: High vacuum chamber

Model: N/A

Equipment Status

장비설치/Turned off

Vibration Specifications

N/A

Measuring Equipment

Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

Accelerometer

PCB Accelerometer

Model: 393B05

Measuring Set-up

F Span: 200

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Average Mode: Exponential, 40

Conclusion

Vertical: At 31.5 Hz, attenuation from VC-A to VC-G.

Left to Right: At 12.5 Hz, attenuation from VC-E to VC-F.

Front to Back: At 12.5 Hz, attenuation from VC-E to VC-G.

Measurement Data

Measuring Point	Status	Direction	Floor	DVIA-P1000
Korea Institute of Machinery & Materials Building L2, 1st floor research laboratory 1. Floor 2. DVIA-P1000	장비설치/Turned off	Vertical	VC-A @ 31.5 Hz	VC-G @ 31.5 Hz
		Left to Right	VC-E @ 12.5 Hz	VC-F @ 12.5 Hz
		Front to Back	VC-E @ 12.5 Hz	VC-G @ 12.5 Hz

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Equipment Photo

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A