Installation Report

DVIA-P Series

07-15-2025

KIMM EL High Vacuum Chamber DVIA-P2200 Installation Report

DVIA-P Series

Installation Report

KIMM

High Vacuum Chamber

250122R1-1

Overview

Tuning and vibration measurement were performed on the DVIA-P2200 installed at Korea Institute for Machinery & Materials L2 building 1F laboratory.

Tuning and vibration measurement were conducted with the equipment Turned off.

Eccentric loading is pronounced; piping at the rear is connected to a pump installed on the floor. This connection may transmit disturbance vibrations into the vibration isolation system and affect tuning results and vibration measurement data.

Data are presented as VC curves, together with supplementary reference materials for interpreting vibration severity.

Vibration Isolation System Information

Model: DVIA-P2200

Serial Number: 250122R1-1

Engineer

Chaewon Lee from DAEIL SYSTEMS

Measurement Date

July 15, 2025

Installation Site

한국기계연구원 L2동 1층 연구실

End User

한국기계연구원

Equipment Information

Manufacturer: 이엘

Equipment: 고진공 챔버

Model: N/A

Equipment Status

장비설치/Turned off

Vibration Specifications

N/A

Measuring Equipment

10.1) Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

10.2) Accelerometer

PCB Accelerometer

Model: 393B05

Measuring Set-up

F Span: 200 Hz

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Average Mode: Exponential, 40

Conclusion

Vertical: Vibration attenuates from VC-B to VC-F at 20 Hz.

Left to Right: Vibration attenuates from VC-D to VC-G at 31.5 Hz.

Front to Back: Vibration attenuates from VC-D to VC-G at 31.5 Hz.

Measurement Data

Measuring site	Status	Direction	Measuring value (Floor vibration, reference frequency)	Measuring value (DVIA-P2200, reference frequency)
한국기계연구원 L2동 1층 연구실 1. Floor vibration 2. DVIA-P2200	장비 Turned off	Vertical	VC-B @ 20 Hz	VC-F @ 20 Hz
		Left to Right	VC-D @ 31.5 Hz	VC-G @ 31.5 Hz
		Front to Back	VC-D @ 31.5 Hz	VC-G @ 31.5 Hz

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Equipment Photo

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8–80 Hz, VC-C through VC-G from 1–80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

Share this Case Study

Case Study Information