KIMM EL High Vacuum Chamber DVIA-P1000 Installation Report
Contents
Overview
Tuning and vibration measurement were performed on the DVIA-P1000 installed in the 1st floor laboratory of Building L2 at Korea Institute of Machinery & Materials (KIMM).
The inspection and vibration measurement were conducted in the Turn off state.
The data are presented as VC Curves, and reference vibration-level criteria are provided.
Vibration Isolation System
Model: DVIA-P1000
Serial Number: 250122R1-2
Engineer
Seongyun Jeong, DAEIL SYSTEMS
Gyumin Park, DAEIL SYSTEMS
Tuning Date
September 22, 2026
Installation Site
Korea Institute of Machinery & Materials (KIMM), Building L2, 1st Floor Laboratory
End User
Korea Institute of Machinery & Materials (KIMM)
Customer Equipment
Manufacturer: EL
Equipment: High Vacuum Chamber
Model: N/A
Vibration Specification
N/A
Equipment Status
Idle
Vibration Measurement Equipment
Hardware: B&K Front End Type 3040-A-040
Software: B&K Pulse Labshop22 Version
Accelerometer: PCB 393B05
Vibration Measurement Setup
F Span: 200 Hz
Lines: 2400
Engineering Units: m/s
Window: Hanning
Averaging: FFT Spectrum Averaging
Conclusion
Tuning and vibration measurement were performed on the DVIA-P1000 (S/N: 250122R1-2) installed for the High Vacuum Chamber (Manufacturer: EL) in the 1st floor laboratory of Building L2 at Korea Institute of Machinery & Materials (KIMM).
Piping improvement and control stabilization: To solve the problem that previously, when multiple air pipes were bundled and placed together, a pressure difference at a specific point impeded smooth exhaust (OUT), thereby interfering with normal position (POS) control, the air pipes were reconnected as independent lines each, establishing a stable air pressure supply and a precision control environment.
Vibration measurement results: In the Turn-off state, the floor vibration and the vibration level after the vibration isolation platform (DVIA-P1000) was activated were measured by axis and comparatively analyzed as VC Curves. As a result, excellent vibration isolation performance was confirmed on all axes (vertical/left-right/front-back).
Measurement Data Summary
| Measurement Point | Vibration Specification | Measured Axis | Measurement Result | |
|---|---|---|---|---|
| Floor | DVIA-P1000 | |||
| 1. Floor 2. DVIA-P1000 | Refer to Section 8 | Vertical (Z-axis) | VC-A | VC-E |
| Left to Right (X-axis) | VC-D | VC-E | ||
| Front to Back (Y-axis) | VC-D | VC-E | ||
Measurement Data
Vertical (Z-axis)
Z-axis — Autospectrum
Z-axis — VC Curves
Left to Right (X-axis)
X-axis — Autospectrum
X-axis — VC Curves
Front to Back (Y-axis)
Y-axis — Autospectrum
Y-axis — VC Curves
Installation Photos
Reference
Notes:
1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.
2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.
