Vibration Isolation Case Studies

Tier-1 Semiconductor Suwon SAIT Cleanroom Building A: DVIA-P7000 (140416R6-1) inspection with Nikon NSR-2205i12D stepper in IDLE state. Summary VC table, transmissibility plots, and April 2023 Turn-off comparison curves.

DVIA-P2200 (serial 140416R6-4) inspection and vibration measurement at Tier-1 Semiconductor Advanced Institute SAIT Cleanroom Building A, Suwon, with CDSEM S-9220T in IDLE state (December 12, 2023). Publishes sensor checks, axis transmissibility and VC curves including 21.12.15 comparison plots; Reference uses the Generic Vibration Criteria markdown table only.

Tier-1 Semiconductor Advanced Institute SAIT Cleanroom Building A Suwon Aligner MA-200C DVIA-P2200 inspection report: operation check and vibration measurement with equipment IDLE. Transmissibility and VC curves by axis.

DVIA-P4000 (serial 180306R4) inspection at Tier-1 Semiconductor Hwasung NRD line 8F with ZEISS AIMs 32. Compares AIMs IDLE vs power-off transmissibility and VC curves by axis, displacement/accelerometer sensor graphs, and vibration summary tables.

DVIA-P4000 (serial 190724R2) at Tier-1 Semiconductor Hwasung V1 Line 3F with Advantest E5610. Compact installation report with axis VC curves and transmissibility plots; Reference uses the Generic Vibration Criteria markdown table only.

DVIA-P4000 (serial 190724R2) installation report at Tier-1 Semiconductor NRD Line 3F, Hwaseong with AIMS 1x. Publishes vibration summary (Floor/Active VC bands), axis VC curves (Top/Floor), transmissibility graph, and Generic Vibration Criteria as the standard markdown table.