Tier-1 Semiconductor Advanced Institute Aligner MA-200C DVIA-P2200 Inspection Report

Operation status inspection and vibration measurement were performed on the DVIA-P2200.

Inspection and vibration measurement were conducted with the equipment in IDLE state (typically 10–30 Hz equipment vibration).

Measurement results are uncertain due to equipment IDLE vibration, but Transmissibility graphs from the Daeil Systems program indicate correct operation.

Model: DVIA-P2200

Serial Number: 140416R6-5

Serial Number (SAC-07): 022470

Youngha Lee, Jongwon Park from DAEIL SYSTEMS

December 12, 2023

Tier-1 Semiconductor Advanced Institute Cleanroom Building A, Suwon

Aligner MA-200C

Inspection was performed with the upper equipment in IDLE state.

When the equipment is in IDLE state, equipment vibration typically occurs in the 10–30 Hz band or high-frequency bands, and such vibration may be measured on the top plate.

For accurate inspection and tuning of the vibration isolation system, the upper equipment must be completely turned off.

8.1) PULSE 22

Hardware: Bruel & Kjaer Type 3050-A-040

Software: LapShop Application(PULSE Lapshop)

8.2) Accelerometer

PCB Accelerometer

Model: 393B05

Accelerometer Sensor

Passive Transmissibility graph shows the DVIA-P resonance peak correctly below 10 Hz.

The Active Transmissibility graph shows resonance peaks with Transmissibility at or above 0 dB near 22 Hz and 60 Hz, suspected to be equipment IDLE vibration.

In all other bands, isolation operates correctly at −10 dB or better.

Passive Transmissibility graph shows the DVIA-P resonance peak correctly below 10 Hz, but the graph shape is not clean, suggesting utility influence or equipment IDLE vibration.

The Active Transmissibility graph shows Transmissibility at or above 0 dB near 2.5 Hz because vibration is very low, below −80 dB.

Resonance peaks with Transmissibility at or above 0 dB appear near 10–20 Hz, suspected to be equipment IDLE vibration.

In all other bands, isolation operates correctly at −10 dB or better.

Passive Transmissibility graph shows the DVIA-P resonance peak correctly below 10 Hz, but the graph shape is not clean, suggesting utility influence or equipment IDLE vibration.

The Active Transmissibility graph shows Transmissibility at or above 0 dB near 2.5 Hz because vibration is very low, below −80 dB.

Resonance peaks with Transmissibility at or above 0 dB appear near 20 Hz, suspected to be equipment IDLE vibration.

In all other bands, isolation operates correctly at −10 dB or better.

In the 1–8 Hz band, vibration is below VC-G and low damping is output due to proportional vibration characteristics.

In the 8–40 Hz band, the top plate measured higher vibration than the floor due to equipment vibration influence.

The Z-axis Transmissibility graph from the Daeil UI Program appears normal output, suspected to be equipment IDLE vibration.

In the 1–3 Hz band, vibration is below VC-G and low damping is output due to proportional vibration characteristics.

In the 6–15 Hz band, the top plate measured higher vibration than the floor due to equipment vibration influence, suspected to be equipment IDLE vibration or utility influence.

In the 1–3 Hz band, vibration is below VC-G and low damping is output due to proportional vibration characteristics.

In the 7–10 Hz band, the top plate measured higher vibration than the floor due to equipment vibration influence, suspected to be equipment IDLE vibration or utility influence.