Tier-1 Semiconductor Advanced Institute CDSEM S-9220T DVIA-P2200 Inspection Report

Inspection and vibration measurement of DVIA-P2200 operational status.

Inspection and vibration measurement were conducted with the equipment in IDLE state. (Typically 10-30Hz equipment vibration)

On the Z-axis, measurement results are uncertain due to equipment IDLE vibration, but the Transmissibility Graph from the Daeil Systems Program indicates correct operation.

Performance on the X and Y axes is poor; additional tuning with the equipment Turned off is required.

Model: DVIA-P2200

Serial Number: 140416R6-4

Serial Number (SAC-07): 022602

Youngha Lee, Jongwon Park from DAEIL SYSTEMS

December 12, 2023

23.12.18

17.12.27~17.12.29

Tier-1 Semiconductor Advanced Institute Cleanroom Building A, Suwon

Tier-1 Semiconductor Advanced Institute

CDSEM S-9220T

When the equipment is generally in IDLE state, equipment vibration occurs in the 10-30Hz band or high-frequency band, so that vibration may be measured on the top plate during top-plate measurement.

Complete Turn off of the upper equipment is required to accurately check isolator performance.

Performance on the X and Y axes is poor and additional tuning is required.

8.1) PULSE 22

Hardware: Bruel & Kjaer Type 3050-A-040

Software: LapShop Application(PULSE Lapshop)

8.2) Accelerometer

PCB Accelerometer

Model: 393B05

Accelerometer and displacement sensors correctly sense vibration changes and operate normally.

On the Passive Transmissibility Graph, the DVIA-P resonance peak is correctly output below 10Hz.

On the Active Transmissibility Graph, Transmissibility in the 1.5 and 2.5 Hz bands is above 0dB, but vibration is very low below -80dB, which causes this phenomenon.

In all other bands, isolator operation is correct at -10dB or better.

On the Passive Transmissibility Graph, the DVIA-P resonance peak is correctly output below 10Hz.

The Active Transmissibility Graph is similar in form to the Passive Transmissibility Graph, with Transmissibility above 0dB from 2-10Hz and no vibration attenuation occurring.

This may be due to CD SEM equipment IDLE vibration, but the form suggests the possibility is low.

Isolator tuning with the CD SEM equipment Turned off is required.

On the Passive Transmissibility Graph, the DVIA-P resonance peak is correctly output at 10Hz.

On the Active Transmissibility Graph, vibration attenuation is poor near 0dB in the 2-10Hz and 15-20Hz bands.

This may be due to CD SEM equipment IDLE vibration, but the form suggests Feedforward Gain adjustment through tuning is needed.

Isolator tuning with the CD SEM equipment Turned off is required.

In the 1-8Hz band, vibration is below VC-G, so proportional vibration characteristics produce a low attenuation rate.

In the 15-40Hz band, top-plate vibration was measured higher than the bottom plate due to equipment vibration influence.

The Z-axis Transmissibility Graph in the Daeil UI Program appears normal, suggesting equipment IDLE vibration.

As confirmed in the Daeil UI Program, proportional vibration amplification is output in the 4-13Hz low-frequency band.

This passive-form graph indicates insufficient control from settings outside normal Gain values, which can occur when utilities are added or the surrounding environment changes after initial installation tuning.

It may also be due to IDLE equipment vibration, but additional X-axis tuning with the equipment Turned off is needed to confirm.

As confirmed in the Daeil UI Program, vibration in the 2-10Hz and 15-20Hz bands is equal to or greater on the top plate than the floor.

This appears to be insufficient control from FeedForward Gain settings outside correct values.

It may be due to IDLE equipment vibration, but additional Y-axis tuning with the equipment Turned off is needed to confirm.