Tier-1 Semiconductor Hwasung ZEISS AIMs 32 DVIA-P4000 (180306R4) Inspection Report

Inspection was performed following a request to inspect three DVIA-P units installed at the Tier-1 Semiconductor Hwasung site.

Daeil UI Program Transmissibility and vibration measurement results show normal performance.

Equipment On/Off comparison inspection allows assessment of vibration impact from equipment IDLE state.

Model: DVIA-P4000

Serial Number: 180306R4

Serial Number (SAC-07): 016147

Youngha Lee from DAEIL SYSTEMS

December 14, 2023

23.12.18

Tier-1 Semiconductor Hwasung NRD line 8F

Tier-1 Semiconductor

ZEISS AIMs 32

When the equipment is in IDLE state, amplification occurs mainly in the 10–15 Hz and 20–40 Hz bands.

When the equipment is in Power off state, ground vibration is attenuated in all bands.

The accelerometer and displacement sensors correctly sense vibration changes and operate normally.

With floor excitation, Active Transmissibility Graph measurement via the Daeil UI Program shows attenuation of −10 dB or more at 3 Hz. Resonance peaks rising to 0 dB exist in the 30, 40, and 50 Hz bands. This output is presumed to be from equipment IDLE-state vibration.

With floor excitation, Active Transmissibility Graph measurement via the Daeil UI Program similarly shows attenuation of −10 dB or more at 3 Hz. No resonance peaks appear above −10 dB in the high-frequency bands. Resonance peaks in the Power on state are judged to be output from equipment IDLE-state vibration.

In the 3 Hz band, top-plate vibration is measured high at VC-C and VC-D. In the 10–15 Hz and 20–80 Hz bands, top-plate vibration is measured larger than bottom-plate vibration. These vibrations are presumed to be from equipment IDLE-state vibration.

In the 3 Hz band, top-plate vibration decreased to VC-D. Compared with Power on measurement, top-plate vibration in the 10–15 Hz and 20–80 Hz bands decreased significantly. This supports judging those vibrations as equipment IDLE-state vibration.

Active Transmissibility Graph measurement via the Daeil UI Program shows attenuation of −10 dB or more from 3 Hz. Resonance peaks rising above 0 dB exist in the 15, 27, and 40 Hz bands; these may be vibration from equipment IDLE state, but horizontal-axis excitation is not possible so that vibration cannot be confirmed. For accurate isolator performance evaluation, inspection with upper equipment Turned off is required, and performance may improve with additional tuning.

With equipment Turned off, Active Transmissibility Graph measurement via the Daeil UI Program similarly shows attenuation of −10 dB or more at 3 Hz. No resonance peaks appear above −10 dB in the high-frequency bands. Resonance peaks in the Power on state are judged to be output from equipment IDLE-state vibration.

In low-frequency bands, top-plate vibration is lower than bottom-plate vibration, but in the 10–15 Hz, 20–25 Hz, and 40–50 Hz bands, top-plate vibration is measured larger than bottom-plate vibration. These vibrations are presumed to be from equipment IDLE-state vibration.

Compared with Power on measurement, top-plate vibration in the 10–15 Hz, 20–25 Hz, and 40–50 Hz bands decreased significantly. This supports judging those vibrations as equipment IDLE-state vibration. Performance is somewhat lower than the Y-axis; additional tuning may improve performance.

Active Transmissibility Graph measurement via the Daeil UI Program shows attenuation of −10 dB or more from 3 Hz. Resonance peaks rising above 0 dB exist in the 15, 27, and 43 Hz bands; these may be vibration from equipment IDLE state, but horizontal-axis excitation is not possible so that vibration cannot be confirmed. For accurate isolator performance evaluation, inspection with upper equipment Turned off is required, and performance may improve with additional tuning.

With equipment Turned off, Active Transmissibility Graph measurement via the Daeil UI Program similarly shows attenuation of −10 dB or more at 3 Hz. No resonance peaks appear above −10 dB in the high-frequency bands. Resonance peaks in the Power on state are judged to be output from equipment IDLE-state vibration.

In low-frequency bands, top-plate vibration is lower than bottom-plate vibration, but in the 10–15 Hz and 20–40 Hz bands, top-plate vibration is measured larger than bottom-plate vibration. These vibrations are presumed to be from equipment IDLE-state vibration.

Compared with Power on measurement, top-plate vibration in the 10–15 Hz, 20–25 Hz, and 40–50 Hz bands decreased significantly. This supports judging those vibrations as equipment IDLE-state vibration.