Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
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Yimo Tech Hitachi CG6300 DVIA-P4000 (220126R3) Installation Report
DVIA-P4000 (serial 220126R3) installation report for Yimo Tech with Hitachi CG6300. Tuning May 27, 2022; VC summary table and Z/X/Y floor vs active-isolation VC curves. Reference uses the standard Generic Vibration Criteria markdown table (no reference raster).
Tier-1 Semiconductor Pyeongtaek EUV Line ADVANTEST E5620 DVIA-P4000 Installation Report
Tier-1 Semiconductor Pyeongtaek P3 line ADVANTEST E5620 with DVIA-P4000 (serial 220617R5). Tuning November 1, 2023. Summary of vibration results as VC-band letters; per-axis Transmissibility and VC curves. Reference as Generic Vibration Criteria markdown table only.

Sungkyunkwan University Raith EBPG5150 DVIA-P4000 Inspection Report
DVIA-P4000 (serial 220714R4) inspection at Sungkyunkwan University Research Building 3F cleanroom with Raith EBPG5150. Caution VIB LED and Z-axis oscillation were addressed with feedback/feedforward re-tuning on Nov. 28, 2023. Summary VC table, axis transmissibility graphs, and VC curves are published; Reference uses the Generic Vibration Criteria markdown table only.

Sungkyunkwan University Raith EBPG5150 DVIA-P4000 Inspection Report
DVIA-P4000 (serial 220714R4) inspection at Sungkyunkwan University Research Building 3F cleanroom with Raith EBPG5150. Inspection February 19, 2024; Data Physics QUATTRO / SignalCalc ACE. VC summary tables for Active on and Float off, plus axis VC curves at Floor, isolator, equipment cover, and equipment top.
Tier-1 Semiconductor Hwaseong NRD AIMS 1x DVIA-P4000 Installation Report
DVIA-P4000 (serial 220804R2) at Tier-1 Semiconductor Hwaseong NRD Line 3F with AIMS 1x. Compact installation report with axis VC curves and transmissibility plots; Reference uses the Generic Vibration Criteria markdown table only.
Tier-1 Semiconductor Hwaseong NRD Line AlMs 1x DVIA-P4000 (220804R2) Installation Report
DVIA-P4000 (serial 220804R2) installation and vibration measurement at Tier-1 Semiconductor Hwaseong NRD Line 3F — AlMs 1x. Summary table and vertical, lateral, and longitudinal VC curves with transmissibility plots.