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Vibration Isolation Case Studies

DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.

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1266 case studies
Fuyang University of Technology Thermo Fisher Apreo 2C SEM DVIA-ML1000 Installation Report

Thermo Fisher Scientific Apreo 2C SEM at Fuyang University of Technology in Fuyang, China, delivered through channel — DVIA-ML1000 installation report for the 1st tuning trial, tuned and written up on June 22, 2026. The measurement summary classifies both the floor and the DVIA-ML1000 platform as VC-G on the vertical, left to right and front to back axes. Because Thermo Fisher Scientific issues site-specific ambient vibration requirements from its own SE-Tools site survey, the applicable specification follows that survey report. The tuning request work order, the per-axis Autospectrum, VC Curves and Transmissibility plots from the UI program, and the photograph of the Apreo 2C standing on the DVIA-ML1000 are published.

Tier-1 Semiconductor Giheung Hitachi In-Line SEM XF-1000 DVIA-P10000 Installation Report

Tier-1 Semiconductor Giheung NRD K-Line 4F Hitachi In-Line SEM XF-1000 DVIA-P10000 installation report — periodic inspection with the equipment Turned on/IDLE; vertical and left-to-right axes PASS on both floor and platform, front-to-back floor FAIL while the DVIA-P10000 platform meets the requirement on all axes.

Hyundai Motor Keyence Laser Confocal Microscope VK-3000 DVIA-TD45 Installation Report

Hyundai Motor Environmental Technology Research Center Keyence Laser Confocal Microscope VK-3000 DVIA-TD45 installation report — isolator oscillation diagnosed and re-tuned to meet the VC-C requirement; the DVIA-TD45 platform passes on all axes while floor left-to-right fails, with ventilation-duct airflow noted as an additional influence.

Kunshan DeKaiYiTe ZEISS Sigma 360 SEM DVIA-ML1000 Installation Report

Kunshan DeKaiYiTe (Kunshan, China) ZEISS Sigma 360 SEM DVIA-ML1000 installation report — following installation the system was tuned and vibration was measured with the equipment in the IDLE state. On all three axes the floor fails the vibration specification while the DVIA-ML1000 active isolation platform passes. Per-axis Auto Spectrum plots and the client tuning request form are published.

Robocube Tech 6-Axis Actuator DVIA-T87 (260423R2) Installation Report

Installation report for the DVIA-T87 (serial 260423R2) supplied to Robocube Tech. After installation in the Robocube Tech assembly room, tuning and vibration measurement were carried out on 17 June 2026 with the unit in the IDLE state. All three axes — vertical (Z), left to right (X) and front to back (Y) — passed on both the floor and the DVIA-T87 top plate, and vibration on the top plate was confirmed to be attenuated relative to the floor on every axis. Per-axis Autospectrum and VC Curves measured with a B&K Front End Type 3050-A-040 and a PCB 393B05 accelerometer are published together with the IEST-RP-CC012.2 vibration criteria reference.

Tier-1 Semiconductor Pyeongtaek P4 3F Line B05 Bruker NM-VI DVIA-P4000 Installation Report

Tier-1 Semiconductor Pyeongtaek P4 3F Line B05 Bruker NM-VI DVIA-P4000 installation report — feedback controller retuning after vibration alert; VC-D met on all axes.