Case Studies

DVIA-UB700 (S/N 221024R4, 910×1140×139H mm) installation report for ZEISS SEM Sigma 300 at Hanyang University, Seoul — tuned 2022-12-15 by Seounghoon Cheon (DAEIL SYSTEMS), reported 2022-12-19. Measurement with Data Physics Quattro / SignalCalc ACE; FFT 0–80 Hz, Hanning / 800 lines. VC summary (equipment off): Floor vs Active across Z/X/Y bands as in the Summary of Vibration Results table. Publishes equipment-off Floor / Top VC and Transmissibility plots (nine figures). Decorative cover header bitmap omitted; ISO/VC reference chart replaced with markdown table.

DVIA-ULF700 (serial 250708R1-1) tuning and vibration measurement at a Tier-1 Semiconductor 2F clean booth with self-made customer equipment (equipment model field "-"). Measurement on November 4, 2025; report written November 4, 2025 on the cover block. Equipment Turned on/IDLE with a rotary pump operating on the platform top. Publishes Data Physics DAQ and UI Program measurement summary tables plus paired VC, autospectrum, and transmissibility plots for three axes. Reference VC criteria as a markdown table only.

DVIA-ULF1500 (serial 260223R2) tuning and vibration measurement at a Tier-1 Semiconductor DSR C Tower 3F research laboratory for ZEISS Xradia Versa 730 X-ray Microscope (equipment spec VC-C). Measurement on 2026-05-07 with equipment 장비 설치 및 Turned off; report written 2026-05-14. Nine-axis VC / autospectrum / transmissibility plots with PASS/FAIL measurement summary vs VC-C spec. Reference VC criteria as markdown table only.

UB700 vibration measurement report for Korea Research Institute of Standards and Science (KRISS) in-house FE SEM; report written 2016-06-21 by Jongwook Lim (DAEIL SYSTEMS). Publication includes the equipment photograph, BASE/TOP sensor placement diagram, VC-Class summary table (ACTIVE Z/X/Y), and vibration-environment Z/X/Y 1/3-octave plots.

UB700 P1 setup report for Korea Research Institute of Standards and Science (KRISS) in-house FE SEM; business trip 16.06.20 by Hyungmoon Choi, Doohyun Kim, and Jongwook Lim; report written 2016.06.20. Publication includes VC-Class Base/Top summary, equipment photograph, UB700 internal-program Z/X/Y plots, and vibration-environment Z/X/Y measurement results; decorative header bitmap (image1) omitted.

Tier-1 Semiconductor Suwon SAIT Cleanroom Building A: DVIA-P7000 (140416R6-1) inspection with Nikon NSR-2205i12D stepper in IDLE state. Summary VC table, transmissibility plots, and April 2023 Turn-off comparison curves.