Tier-1 Semiconductor ZEISS Xradia Versa 730 DVIA-ULF1500 (260223R2) Installation Report
Contents
Customer
Tier-1 Semiconductor
Author
Engineer: Chaewon Lee
Installation date (header)
26.05.07
Report written date
26.05.14
Overview
Tuning and vibration measurements were conducted for the DVIA-ULF1500 installed in the Tier-1 Semiconductor DSR C Tower 3F research laboratory.
Inspection and vibration measurements were performed with the equipment in Turned off state.
Measured data are presented as VC curves, and reference materials on vibration levels are provided.
Vibration isolation platform
Model: DVIA-ULF1500
Serial Number: 260223R2
Engineer
Chaewon Lee — Field Engineer, DAEIL SYSTEMS Co., Ltd.
Tuning date
May 7, 2026
Installation location
Tier-1 Semiconductor DSR C Tower 3F research laboratory
End User
Tier-1 Semiconductor
Customer equipment
Manufacturer: ZEISS
Equipment: X-ray Microscope
Model: Xradia Versa 730
Equipment specification
VC-C
Equipment status
장비 설치 및 Turned off
Vibration measurement equipment
10.1) Data Physics DAQ
Hardware: QUATTRO, Serial Number: 22436
Software: SignalCalc ACE
10.2) Accelerometer
PCB Accelerometer
Model: 393B05
Vibration measurement setup
F Span: 200 Hz
Lines: 3200
Engineering Units: m/s
Window: Hanning
Averaging: FFT Spectrum Averaging
Averaging mode: Exponential, 40
Conclusion
Vibration specifications are met in all directions.
Measurement data
| Measurement site | State | Direction | Vibration spec | Floor vibration | DVIA-ULF1500 | Floor result | DVIA-ULF1500 result |
|---|---|---|---|---|---|---|---|
| Tier-1 Semiconductor DSR C Tower 3F research laboratory 1. Floor vibration 2. DVIA-ULF1500 | Turned off | Vertical | VC-C | VC-B @ 10 Hz | VC-D @ 10 Hz | ✗ FAIL | ✓ PASS |
| Left to Right | VC-E @ 10 Hz | VC-F @ 10 Hz | ✓ PASS | ✓ PASS | |||
| Front to Back | VC-D @ 25 Hz | VC-F @ 25 Hz | ✓ PASS | ✓ PASS |
Data and image
Vertical VC Curves
Vertical Autospectrum
Vertical Transmissibility
Left to Right VC Curves
Left to Right Autospectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Autospecturm
Front to Back Transmissibility
Reference
Generic Vibration Criteria
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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