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Case Studies

DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.

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1246 case studies
HKSTP INNOPARK Dongfang Jingyuan DJEL CD SEM SepA-C310s DVIA-P4000 Installation Report

DVIA-P4000 installation report (serial 250902R8) for the Dongfang Jingyuan Microelectronics DJEL CD SEM SepA-C310s installed at INNOPARK by HKSTP, Microelectronics Centre, 1 Fuk Wang Street, Hong Kong. Tuning and vibration measurement were carried out on June 3, 2026 (1st tuning trial) by DAEIL SYSTEMS engineer Juhyeok Kim, and the report was written on June 15, 2026. The vibration specification is VC-C from 1-100 Hz and VC-D from 100-200 Hz; both the floor and the DVIA-P4000 passed on all three axes. Twelve plots are published — autospectrum, VC curves and transmissibility for two vertical (Z-axis) measurement sets and for the left-to-right (X-axis) and front-to-back (Y-axis) axes. The DAEIL SYSTEMS cover wordmark is omitted from the public copy.

Huahong ASML eScan460 DVIA-P4000 Installation Report
Installation Report
DVIA-P Series
06-11-2026

Huahong ASML eScan460 DVIA-P4000 Installation Report

DVIA-P4000 installation report (serial 251215R5) at Hua Hong FAB 9 for ASML E-beam wafer inspection system eScan460. Engineer Chaewon Lee; tuning May 28, 2026; report written June 11, 2026. Vibration specification VC-D. Published vertical, left-to-right, and front-to-back VC curves only. Word cover graphic (image1) omitted; Equipment Picture unavailable in source; Reference uses the standard Generic Vibration Criteria markdown table.

Shanghai Institute of Technical Physics DVIA-UB700 (180927R1) Installation Report

DVIA-UB700 (S/N 180927R1) vibration worksheet at Shanghai Institute of Technical Physics (SITP), 1st floor site. Setup 18.12.19; measurement 2018.12.19; report written 18.12.26 per worksheet. Posts VC-Class floor vs Above Active summary and MB1000 internal-program plus octave-band (Floor vs Above Active) Z/X/Y plots; decorative title-block images (media/image1, image2) omitted.

Xiamen University of Technology Zeiss Sigma 500 UB700 Installation Report (181019R7)

UB700 (S/N 181019R7) vibration measurement at Xiamen University of Technology—SEM Lab, 1F with Zeiss Sigma 500. Setup 2019-01-03; measurement 2019-01-03 (report written 2019-01-07). Posts VC-Class floor vs Above Active summary and MB1000 internal-program plus octave-band (floor vs active top) screenshots. Decorative Word header/set-up banner images omitted.

Opton ZEISS EVO 15 UB700 Installation Report (181107R4)
Installation Report
DVIA-P Series
05-26-2026

Opton ZEISS EVO 15 UB700 Installation Report (181107R4)

UB700 (S/N 181107R4) vibration measurement at Opton—1st Floor with ZEISS EVO 15. Setup 2018-12-21; measurement 2018-12-18 (report written 2018-12-26). Posts VC-Class floor vs Above Active summary and UB700 internal-program plus octave-band (floor vs active top) screenshots. Decorative Word Opton/set-up banner images omitted.

Guangzhou Bio Island Thermoscientific Axia UB700 P3 (181107R4-2) Installation Report

UB700 P3 (S/N 181107R4-2) active-mounting worksheet for Thermoscientific Axia at guangzhou, 广州生物岛: operator Kim, Doohyun (DAEIL SYSTEMS research engineer), setup and reporting 21.10.25, business trip record 17.12.27~17.12.29 per the form. Publishes Transmissibility summary at 2–3–10 Hz and three MB1000 internal-program screenshots (Z, X, and Y axis). The decorative title-line JPEG paired with the UB700 P3(181107R4-2) heading in Word is omitted on the public page. No Reference section appears in the source.