Case Studies

Hyundai Motor Environmental Technology Research Center Keyence Laser Confocal Microscope VK-3000 DVIA-TD45 installation report — isolator oscillation diagnosed and re-tuned to meet the VC-C requirement; the DVIA-TD45 platform passes on all axes while floor left-to-right fails, with ventilation-duct airflow noted as an additional influence.

Kunshan DeKaiYiTe (Kunshan, China) ZEISS Sigma 360 SEM DVIA-ML1000 installation report — following installation the system was tuned and vibration was measured with the equipment in the IDLE state. On all three axes the floor fails the vibration specification while the DVIA-ML1000 active isolation platform passes. Per-axis Auto Spectrum plots and the client tuning request form are published.

Installation report for the DVIA-T87 (serial 260423R2) supplied to Robocube Tech. After installation in the Robocube Tech assembly room, tuning and vibration measurement were carried out on 17 June 2026 with the unit in the IDLE state. All three axes — vertical (Z), left to right (X) and front to back (Y) — passed on both the floor and the DVIA-T87 top plate, and vibration on the top plate was confirmed to be attenuated relative to the floor on every axis. Per-axis Autospectrum and VC Curves measured with a B&K Front End Type 3050-A-040 and a PCB 393B05 accelerometer are published together with the IEST-RP-CC012.2 vibration criteria reference.

Tier-1 Semiconductor Pyeongtaek P4 3F Line B05 Bruker NM-VI DVIA-P4000 installation report — feedback controller retuning after vibration alert; VC-D met on all axes.

DVIA-P4000 installation report (serial 240424R1) at Huahong FAB 9 for ASML E-beam wafer inspection system eScan460 via YIMO. Second tuning trial; tuning 2026-05-28, report written 2026-06-01. Data Physics QUATTRO DAQ; vibration specification VC-D. Equipment installed on the platform in IDLE state. Publishes vertical, left-to-right, and front-to-back VC curves. Word cover graphic omitted; Reference uses the standard Generic Vibration Criteria markdown table.

DVIA-P7000 installation report (serial 250131R4) at Huahong FAB 9 for Dongfang Jingyuan Electron Limited E-beam wafer inspection system (SEpA_i515). Source: DVIA-P7000_250131R4 installation report_26.05.27.docx; 2nd tuning trial, tuning 2026-05-27, report written 2026-06-01. Published VC curves for vertical, left-to-right, and front-to-back axes. Word letterhead graphic (image1) omitted from public copy; Reference uses the site VC criteria table (image5.emf not published).