Vibration Isolation Case Studies

DVIA-ML3000 (260319R2) installation report at Tier-1 Semiconductor Giheung campus S1 Line, 1F laboratory — ZEISS X-ray Microscope Xradia 520 Versa. VC-C equipment spec; B&K Front End Type 3040-A-040 with Pulse Labshop22 and a PCB 393B05 accelerometer; per-axis VC Curves and Autospectrum for vertical, left-to-right, and front-to-back; standard Reference vibration criteria as a markdown table.

(End User Citic Metal, Beijing, China) Thermo Fisher Scientific FIB-SEM Helios 5CX DVIA-ULF1000 installation report — after installation, tuning and vibration measurement were performed with the equipment in the IDLE state and represented in VC Curve format against the VC-F specification. On the DVIA-ULF1000 platform all three axes (Vertical, Left-to-Right, Front-to-Back) passed; on the floor all three axes failed. The tuning request capture, per-axis VC Curves, and an installation photo are published.

Field analysis report (VOC26-049) for the DVIA-PB2200 vibration isolation system, serial 250122R1-1, supplied to Korea Institute of Machinery & Materials (KIMM). Report written date July 7, 2026. Investigates the 28 Hz peak measured on the X axis and the resonance peaks in the 50 to 90 Hz band: on-site measurement under three floor support conditions (Levelfoot with Footmaster, Levelfoot only, Footmaster only), FEM modal analysis of the isolator table top, levelness, center of gravity and noise checks, Open-Loop frequency response function, Passive transmissibility, Autospectrum, VC Curves, Active-On data, a Passive versus Active comparison, and compliance measurements at the payload support frame, pump drive structure, chamber and isolator table top and base plate. Instrumentation: PULSE 22, impact hammer and a PCB 393B05 accelerometer. 97 figures from the report are published.

YDRICQS (Quantum Science and Technology Yangtze River Delta Industrial Innovation Center, Suzhou, China) Thermo Fisher Scientific Helios 5CX FIB-SEM DVIA-ML1000 installation report — the active isolation platform meets the VC-F vibration specification on all axes (floor fails only on vertical; the DVIA-ML1000 platform passes vertical, left-to-right, and front-to-back). Per-axis Auto Spectrum and VC curves, the client tuning request form, and the installation photo are published.

Tier-1 Semiconductor Giheung NRD K-Line 4F Hitachi In-Line SEM XF-1000 DVIA-P10000 periodic inspection (VOC26-125) — measurement performed with the equipment Turned on/IDLE; vertical and left-to-right axes PASS on both floor and platform, front-to-back floor FAIL while the DVIA-P10000 platform meets the requirement on all axes.

Korea Institute of Science and Technology (Building L0, Room 184) TESCAN Clara FE-SEM DVIA-ULFB700 installation report — a revisit inspection prompted by upper-door open/close noise. The noise was traced to the spring contacting the top-plate groove with no impact on performance, and all X/Y/Z axes met the required vibration specification. Per-axis Autospectrum and VC curves are published.