Installation Report

09-09-2026

Pharrics BV MPI Corporation Probe Station MPI TS150 DVIA-T67 (260402R1) Installation Report

DVIA-T Series

Installation Report

Pharrics BV

MPI Corporation

MPI TS150

Probe station

DVIA-T67

260402R1

Overview

After the installation of the DVIA-T67 in Leuven, tuning and vibration measurements were performed.

The measurements were taken with the equipment in the idle state.

The results are presented as Autospectrum and VC Curve plots, together with reference material on vibration criteria levels.

Vibration Isolation System Information

Model: DVIA-T67

Serial Number: 260402R1

Engineer

Taehun Kim · DAEIL SYSTEMS

Tuning Date

2026.09.08

End User

Pharrics BV

Number of Tuning Trial

1st

Site

Leuven

Equipment

Manufacturer: MPI Corporation

Equipment: Probe station

Model: MPI TS150

Vibration Specification

No vibration specification defined.

Equipment Condition

Idle

Conclusion

After the installation of the DVIA-T67 in Leuven, tuning and vibration measurements were performed.

The measurements were taken with the MPI TS150 probe station mounted on the system, with the equipment in the idle state.

The results are presented as Autospectrum and VC Curve plots, together with reference material on vibration criteria levels.

Measurement Data Obtained via UI Program

Vertical

Vertical — Autospectrum

Image 1 — Pharrics BV MPI Corporation Probe Station MPI TS150 DVIA-T67 (260402R1) Installation Report

Vertical — VC Curves

Image 2 — Pharrics BV MPI Corporation Probe Station MPI TS150 DVIA-T67 (260402R1) Installation Report

Left to Right

Left to Right — Autospectrum

Image 3 — Pharrics BV MPI Corporation Probe Station MPI TS150 DVIA-T67 (260402R1) Installation Report

Left to Right — VC Curves

Image 4 — Pharrics BV MPI Corporation Probe Station MPI TS150 DVIA-T67 (260402R1) Installation Report

Front to Back

Front to Back — Autospectrum

Image 5 — Pharrics BV MPI Corporation Probe Station MPI TS150 DVIA-T67 (260402R1) Installation Report

Front to Back — VC Curves

Image 6 — Pharrics BV MPI Corporation Probe Station MPI TS150 DVIA-T67 (260402R1) Installation Report

Reference

The table below classifies vibration levels based on IEST-RP-CC012.2.

Criterion Curve	Description	Amplitude¹ μm/s (μin/s)	Detail Size² μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances. Usually adequate for computer equipment, hospital recovery rooms, semiconductor probe test equipment, and microscopes less than 40x.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable in most instances for surgical suites, microscopes to 100x and for other equipment of low sensitivity.	100 (4,000)	25
VC-A	Adequate in most instances for optical microscopes to 400x, microbalances, optical balances, proximity and projection aligners, etc.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment (including steppers) to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate standard for optical microscopes to 1000x, lithography and inspection equipment (including moderately sensitive electron microscopes) to 1μm detail size. TFT-LCD stepper/scanner processes.	12.5 (500)	1-3
VC-D	Suitable in most instances for demanding equipment, including many electron microscopes (SEMs and TEMs) and E-Beam systems.	6.25 (250)	0.1-0.3
VC-E	A challenging criterion to achieve. Assumed to be adequate for the most demanding of sensitive systems including long path, laser-based, small target systems, E-Beam lithography systems working at nanometer scales, and other systems requiring extraordinary dynamic stability.	3.12 (125)	<0.1
VC-F	Appropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.	1.56 (62.5)	N/A
VC-G	Appropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.	0.78 (31.3)	N/A

¹ As measured in one-third octave bands of frequency over the frequency 8 to 80 Hz (VC-A and VC-B) or 1 to 80 Hz (VC-C through VC-G).

² The detail size refers to the width in the case of microelectronics fabrication, the particle (cell) size in the case of medical and pharmaceutical research, etc. It is to imaging associated with probe technologies, AFMs, and nanotechnology.

The information given in this table is for guidance only. In most instances, it is recommended that the advice of someone knowledgeable about applications and vibration requirements of the equipment and processes be sought.

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