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Installation Report
DVIA-T Series
03-03-2026

Youngil Precision Keyence VR-6000 DVIA-T67 DEMO Inspection Report

DVIA-T Series
Installation Report
Youngil Precision
KEYENCE
VR-6000
DVIA-T67
DEMO

Customer

Youngil Precision

Author

Engineer: Chaewon Lee

Installation Date

February 27, 2026

Report Written Date

March 3, 2026

Overview

Tuning and vibration measurement were performed because intermittent problems occurred while using the DVIA-T67 DEMO unit installed in the 5F OQA room at Youngil Precision Ansan site.

Tuning and vibration measurement were performed with the equipment Turned on/IDLE.

Data are presented as VC curves, and Reference materials are provided for the vibration levels.

Vibration Isolation Platform

Model: DVIA-T67

Serial number: N/A

Engineer

Chaewon Lee from DAEIL SYSTEMS, field engineer

Tuning Date

February 27, 2026

Installation Site

Youngil Precision Ansan site 5F OQA room

End User

Youngil Precision

Customer Equipment

Manufacturer: Keyence

Equipment: 3D Profile Measurement System

Model: VR-6000

Equipment Specification

N/A

Equipment Status

Equipment installed and Turned on/IDLE

Measuring Equipment

10.1) Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

10.2) Accelerometer

PCB Accelerometer

Model: 393B05

Vibration Measurement Setup

F Span: 200 Hz

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

Conclusion

Vertical: Residential Area → vibration is attenuated to VC-F.

Left to Right: Operating Theatre → vibration is attenuated to VC-E.

Front to Back: VC-A → vibration is attenuated to VC-G.

Excellent isolation performance was observed in all directions across the full band.

However, intermittent equipment faults are judged to stem from strong vibration momentarily entering from outside.

The equipment is installed on the 5th floor, a structurally high floor-vibration environment. Measurements confirmed vibration above ISO Operating Theatre in the Vertical and Left to Right directions.

The isolator effectively attenuates floor vibration at those ISO levels to VC-E–VC-F. However, if strong vibration perceptible to people (Workshop class) enters momentarily, post-attenuation levels may reach VC-D.

According to site personnel, very large vibration occurs occasionally when external press equipment operates, likely injecting Workshop-class floor vibration at those moments.

Therefore the cause is not isolator performance but structural factors causing intermittently very high floor vibration. Under normal conditions isolation is sufficient, but momentary strong vibration may affect equipment drive stability.

Measurement Data

Place of MeasurementStatusDirectionFloorDVIA-T67
Youngil Precision Ansan site 5F OQA room
1. Floor vibration
2. DVIA-T67
Turned on/IDLEVerticalResidential Area @ 12.5 HzVC-F @ 12.5 Hz
Left to RightOperating Theatre @ 12.5 HzVC-E @ 12.5 Hz
Front to BackVC-A @ 25 HzVC-G @ 25 Hz

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Reference

Criterion CurveDescriptionAmplitude
μm/s (µin/s)
Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-T Series
Date03-03-2026
Tags
DVIA-T Series
Installation Report
Youngil Precision
KEYENCE
VR-6000
DVIA-T67
DEMO