Installation Report

DVIA-T Series

12-26-2024

QRT DVIA-T67 DEMO (241213R2) Inspection Report — MSTech MST8500 Probe Station

DVIA-T Series

Installation Report

QRT

Korea Institute of Nano Technology

MSTech

MST8500

DVIA-T67

DEMO

241213R2

Customer

QRT

Author

Engineers: Chaewon Lee, Jonghwa Seo

Installation Date

24.12.20

Report Written Date

24.12.26

Overview

Tuning and vibration measurement were conducted for DEMO equipment DVIA-T67 shipped to the 3rd floor QRT laboratory at Korea Institute of Nano Technology.

After equipment was set in place, vibration measurement and tuning were performed with the equipment Turned off.

During vibration measurement after tuning, personnel were walking nearby; this may affect the measurement results.

Data are presented as VC curves, and Reference materials are provided for vibration levels.

Vibration Isolation Platform

Model: DVIA-T67

Serial Number: 241213R2

Engineer

DAEIL SYSTEMS field engineers Chaewon Lee, Jonghwa Seo

Tuning Date

December 20, 2024

Installation Site

Korea Institute of Nano Technology 3F QRT

Equipment Status

Equipment installed and Turned off

Customer Equipment

Manufacturer: MSTech

Equipment: Probe Station

Model: MST8500

Measuring Equipment

8.1) Brüel & Kjær LAN-XI DAQ Type 3050 DAQ

Hardware: B&K Front End Type 3050-A-040

Software: B&K Pulse Labshop 22 Version

8.2) Accelerometer

PCB Accelerometer

Model: 393B05

Vibration Measurement Setup

Bandwidth: 200 Hz

Lines: 3200

Engineering Units: m/s

Averaging: Spectrum Averaging

Window: Hanning

Overlap: Max

Conclusion

DVIA-T67 & Table

Vertical: At 16 Hz, vibration at VC-C attenuates to VC-G.

Left to Right: At 16 Hz, vibration at VC-B attenuates to VC-F.

Front to Back: At 1 Hz, vibration at VC-B attenuates to VC-D.

Measurement Data

Place of Measurement	Status	Direction	Table	DVIA-T67
Korea Institute of Nano Technology 3F QRT laboratory 1. Table 2. DVIA-T67	장비설치/IDLE	Vertical	VC-B @ 1 Hz	VC-D @ 1 Hz
		Left to Right	VC-B @ 16 Hz	VC-F @ 16 Hz
		Front to Back	VC-B @ 1 Hz	VC-D @ 1 Hz

Data and Image

1) DVIA-T67 & Table

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospecturm

Front to Back Transmissibility

Equipment Photo

Reference

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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