Installation Report

DVIA-T Series

03-14-2025

QRT DVIA-T67 (250204R2) Installation Report — MSTech MST8500 Probe Station

DVIA-T Series

Installation Report

QRT

Korea Institute of Nano Technology

MSTech

MST8500

DVIA-T67

250204R2

Author

Engineer: Jonghwa Seo

Installation Date

25.03.14

Report Written Date

25.03.14

Overview

Tuning and vibration measurement were performed per customer request to tune the DVIA-T67 delivered to the 3F QRT lab at Korea Institute of Nano Technology for site Probing characteristics.

After equipment placement, tuning and vibration measurement were performed with the equipment Turned on.

Data are presented as VC curves, and Reference materials are provided for vibration levels.

Vibration Isolation Platform

Model: DVIA-T67

Serial Number: 250204R2

Engineer

DAEIL SYSTEMS field engineer Jonghwa Seo

Tuning Date

March 14, 2025

Installation Site

Korea Institute of Nano Technology 3F QRT

End User

QRT

Equipment Status

장비 설치 및 Operation

Customer Equipment

Manufacturer: MSTech

Equipment: Probe Station

Model: MST8500

Vibration specification

Not held by the customer

Measuring Equipment

1) Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

2) Accelerometer

PCB Accelerometer

Model: 393B05

Vibration Measurement Setup

F Span: 200

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Average Mode: Exponential, 40

Conclusion

Vertical: At 10 Hz, vibration at VC-C attenuated to VC-D.

Left to Right: At 16 Hz, vibration at VC-B attenuated to VC-F.

Front to Back: At 16 Hz, vibration at VC-B attenuated to VC-F.

Tuning optimized for the specific Probing environment per customer request, even with some reduction in isolation performance.

Measurement Data

Place of Measurement	Status	Direction	Floor	DVIA-T67
Korea Institute of Nano Technology 3F QRT lab 1. Floor 2. DVIA-T67	장비설치/Operation	Vertical	VC-C@ 10 Hz	VC-D@ 10 Hz
		Left to Right	VC-B@ 16 Hz	VC-F@ 16 Hz
		Front to Back	VC-C@ 16 Hz	VC-F@16 Hz

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospecturm

Front to Back Transmissibility

Installation Photos

Reference

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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