Installation Report

DVIA-T Series

01-07-2025

QRT DVIA-T67 DEMO (241213R2) Installation Report — MSTech MST8500 Probe Station

DVIA-T Series

Installation Report

QRT

Korea Institute of Nano Technology

MSTech

MST8500

DVIA-T67

DEMO

241213R2

Author

Engineers: Chaewon Lee, Jonghwa Seo

Installation Date

25.01.07

Report Written Date

25.01.07

Overview

DVIA-T67 DEMO isolator with the 150 kg spring option was shipped to Korea Institute of Nano Technology QRT laboratory on the 3rd floor; tuning and vibration measurement were performed afterward.

After equipment placement, tuning and vibration measurement were performed with the equipment Turned on.

Data are presented as VC curves, and Reference materials are provided for vibration levels.

Vibration Isolation Platform

Model: DVIA-T67 150kg

Serial Number: 241213R2

Engineer

DAEIL SYSTEMS field engineers Chaewon Lee, Jonghwa Seo

Tuning Date

January 7, 2025

Installation Site

Korea Institute of Nano Technology 3F QRT

End User

QRT

Equipment Status

장비 설치 및 Turned on

Customer Equipment

Manufacturer: MSTech

Equipment: Probe Station

Model: MST8500

Vibration specification

Not held by the customer

Measuring Equipment

10.1) Data Physics DAQ

-Hardware: QUATTRO, Serial Number: 22436

-Software: SignalCalc ACE

10.2) Accelerometer

PCB Accelerometer

Model: 393B05

Vibration Measurement Setup

F Span: 200

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Average Mode: Exponential, 40

Conclusion

Vertical: At 63 Hz, vibration at VC-C attenuated to VC-F.

Left to Right: At 20 Hz, vibration at VC-C attenuated to VC-G.

Front to Back: At 16 Hz, vibration at VC-C attenuated to VC-F.

Measurement Data

Place of Measurement	Status	Direction	Floor	DVIA-T67
Korea Institute of Nano Technology 3F QRT lab 1. Floor 2. DVIA-T67	장비설치/Turned on	Vertical	VC-C@ 63 Hz	VC-F@ 63 Hz
		Left to Right	VC-C@ 20 Hz	VC-G@ 20 Hz
		Front to Back	VC-C@ 16 Hz	VC-F@16 Hz

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospecturm

Front to Back Transmissibility

Equipment Photo

Reference

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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