QRT MST8500 Probe Station DVIA-T67 (250204R2) Installation Report
Contents
Customer
QRT
Author
Engineer: Chaewon Lee
Measurement date: March 7, 2025
Report written date: March 7, 2025
Overview
Tuning and vibration measurement were performed because noise occurred on the equipment image when operating the DVIA-T67 Active mode delivered to the 3F QRT laboratory at Korea Institute of Nano Technology.
After installation, tuning and vibration measurement were performed with the equipment Turned on.
Data are presented as VC curves, and Reference materials are provided for vibration levels.
Vibration Isolation Platform
Model: DVIA-T67
Serial number: 250204R2
Engineer
DAEIL SYSTEMS field engineer Chaewon Lee
Measurement Date
March 7, 2025
Installation Site
Korea Institute of Nano Technology, 3F QRT
End User
QRT
Equipment Status
장비 설치 및 Operation
Customer Equipment
Manufacturer: MSTech
Equipment: Probe Station
Model: MST8500
Vibration specification
Not held by the customer
Measuring Equipment
10.1) Data Physics DAQ
Hardware: QUATTRO, Serial Number: 22436
Software: SignalCalc ACE
10.2) Accelerometer
PCB Accelerometer
Model: 393B05
Vibration Measurement Setup
F Span: 200
Lines: 3200
Engineering Units: m/s
Window: Hanning
Averaging: FFT Spectrum Averaging
Average Mode: Exponential, 40
Conclusion
Vertical: At 10 Hz, vibration at VC-C attenuates to VC-F.
Left to Right: At 16 Hz, vibration at VC-B attenuates to VC-E.
Front to Back: At 20 Hz, vibration at VC-B attenuates to VC-F.
Measurement Data
| Place of Measurement | Status | Direction | Floor | DVIA-T67 |
|---|---|---|---|---|
| Korea Institute of Nano Technology 3F QRT lab 1. Floor 2. DVIA-T67 | 장비설치/Operation | Vertical | VC-C@ 10 Hz | VC-F@ 10 Hz |
| Left to Right | VC-B@ 16 Hz | VC-E@ 16 Hz | ||
| Front to Back | VC-B@ 20 Hz | VC-F@20 Hz |
Data and Image
Vertical VC Curves
Vertical Autospectrum
Vertical Transmissibility
Left to Right VC Curves
Left to Right Autospectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Autospecturm
Front to Back Transmissibility
Equipment Photo
Reference
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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