Installation Report

DVIA-T Series

05-04-2026

Pukyong National University DVIA-T67 (221012R8) Installation Report

DVIA-T Series

Installation Report

Pukyong National University

SEMILAB

DVIA-T67

221012R8

Customer

Pukyong National University

Author

Engineer: Chaewon Lee

Installation Date

April 30, 2026

Report Written Date

May 4, 2026

Overview

Tuning and vibration measurement were performed after installing the DVIA-T67 in the first-floor analysis lab, advanced practice building, Yongdum campus, Pukyong National University.

Inspection and vibration measurements were conducted with the equipment in a turned-off state.

Data are presented as VC curves, and Reference materials are provided for the vibration levels.

Vibration Isolation Platform

Model: DVIA-T67

Serial number: 221012R8

Engineer

Chaewon Lee from DAEIL SYSTEMS, field engineer

Tuning Date

April 30, 2026

Installation Site

First-floor analysis lab, advanced practice building, Yongdum campus, Pukyong National University

End User

Pukyong National University

Customer Equipment

Manufacturer: Semilab

Equipment: Atomic Force Microscope

Model: AFM-1000

Equipment Specification

N/A

Equipment Status

Equipment installed / Turned off

Measuring Equipment

1) Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

2) Accelerometer

PCB Accelerometer

Model: 393B05

Vibration Measurement Setup

F Span: 200 Hz

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

Conclusion

Very low vibration below VC-F was measured in all directions across the full band.

Measurement Data

Place of Measurement	Status	Direction	Floor	DVIA-T67
Pukyong National University Yongdum campus, advanced practice building, first-floor analysis lab 1. Floor vibration 2. DVIA-T67	Turned off	Vertical	VC-A @ 16 Hz	VC-G @ 16 Hz
		Left to Right	VC-D @ 16 Hz	VC-G @ 16 Hz
		Front to Back	VC-D @ 6.3 Hz	VC-G @ 6.3 Hz

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Installation Photos

Reference

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A