Installation Report

DVIA-T Series

11-11-2025

Olympus OLS4100 DVIA-T67 (170718R8) Tier-1 Semiconductor Cheongju Installation Report — November 2025

DVIA-T Series

Installation Report

Tier-1 Semiconductor

LNSTECH

Olympus

OLS4100

DVIA-T67

170718R8

Customer

LNSTECH (엘앤에스텍)

Author

Engineer: Chaewon Lee

Report Written Date

November 11, 2025

Overview

Inspection and vibration measurement were performed on the DVIA-T67 installed at Tier-1 Semiconductor Cheongju campus P&T6 4th-floor cleanroom K16.

Tuning and vibration measurement proceeded with the equipment installed and Turned on/IDLE.

Data are expressed as VC curves, and Reference information on vibration levels is provided.

Vibration Isolation Platform

Model: DVIA-T67

Serial number: 170718R8

Engineer

Chaewon Lee from DAEIL SYSTEMS, field engineer

Tuning Date

November 3, 2025

Installation Site

Tier-1 Semiconductor Cheongju campus P&T6 4th-floor cleanroom K16

End User

Tier-1 Semiconductor

Customer Equipment

Manufacturer: Olympus

Equipment: 3D Measuring Razer Microscope

Model: OLS4100

Equipment Specification

Equipment Status

Equipment installed and Turned on/IDLE

Measuring Equipment

10.1) Data Physics DAQ

-Hardware: QUATTRO, Serial Number: 22436

-Software: SignalCalc ACE

10.2) Accelerometer

PCB Accelerometer

Model: 393B05

Vibration Measurement Setup

F Span: 200 Hz

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

Conclusion

Across all directions, approximately 90% vibration isolation performance is observed in the 2–10 Hz band, and 95% or more isolation appears beyond 10 Hz.

Measurement Data

Measurement site	State	Direction	Floor vibration	DVIA-T67
Tier-1 Semiconductor Cheongju 1st Campus P&T6 4th-floor Cleanroom K16 1. Floor vibration 2. DVIA-T67	Turned on/IDLE	Vertical	VC-A @ 40 Hz	VC-G @ 40 Hz
		Left to Right	Residential Area @ 6.3 Hz	VC-D @ 6.3 Hz
		Front to Back	Operating Theatre @ 6.3 Hz	VC-C @ 6.3 Hz

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospecturm

Front to Back Transmissibility

Reference

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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