Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
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TF AMD Microelectronics Penang TESCAN AMBER X GMH FIB-SEM DVIA-ML1000 Installation Report
TF AMD Microelectronics (Penang, Malaysia) TESCAN AMBER X GMH FIB-SEM DVIA-ML1000 installation report — the active isolation platform meets the vibration specification on all axes (floor vertical fails while the DVIA-ML1000 platform passes); vertical/left-to-right/front-to-back autospectrum, VC curves, and transmissibility published.

Korea Institute of Science and Technology JEOL JBX-A9 E-Beam Lithography DVIA-P4000 Installation Report
Korea Institute of Science and Technology (KIST) L3 Building 1F Line JEOL JBX-A9 E-Beam Lithography DVIA-P4000 installation report — tuning and vibration measurement performed with the equipment Turned On, IDLE; all axes (vertical, left-to-right, front-to-back) PASS on both the floor and the DVIA-P4000 platform. The system was tuned for long-term operational stability due to an unstable site air supply.

YIMO TECH Epin Instruments Technology STM DVIA-MO1000 Installation Report
DVIA-MO1000 installation report for the STM at Epin Instruments Technology Co., Ltd. in Shanghai, China, delivered through the YIMO TECH channel — isolator serial 241101R2, installed and written up on June 22, 2026 on the 2nd tuning trial. The report records no official vibration specification for the site, and the measurement summary reads the floor as VC-C vertical, VC-F left to right and VC-E front to back, with the platform reaching VC-F vertical and VC-G on both horizontal axes. All nine UI-program plots (Autospectrum, VC Curves and Transmissibility for each of the three axes) and the photograph of the STM standing on the platform are published.

YIMO TECH Fuyang University of Technology Thermo Fisher Apreo 2C SEM DVIA-ML1000 Installation Report
Thermo Fisher Scientific Apreo 2C SEM at Fuyang University of Technology in Fuyang, China, delivered through the YIMO TECH channel — DVIA-ML1000 installation report for the 1st tuning trial, tuned and written up on June 22, 2026. The measurement summary classifies both the floor and the DVIA-ML1000 platform as VC-G on the vertical, left to right and front to back axes. Because Thermo Fisher Scientific issues site-specific ambient vibration requirements from its own SE-Tools site survey, the applicable specification follows that survey report. The tuning request work order, the per-axis Autospectrum, VC Curves and Transmissibility plots from the UI program, and the photograph of the Apreo 2C standing on the DVIA-ML1000 are published.

Coxem Schottky Field Emission SEM DVIA-ULFB700 (260423R1-1) Installation Report
Coxem (research institute demo room) Schottky Field Emission SEM (FX-2000) DVIA-ULFB700 installation report, serial 260423R1-1. After installation, tuning and vibration measurement were performed in the IDLE state against a VC-E requirement. On the floor the vertical (Z) and left-to-right (X) axes exceeded VC-E while the front-to-back (Y) axis was already within it; on the isolated DVIA-ULFB700 platform all three axes passed, and SPEC-In was confirmed. Per-axis VC Curves and Autospectrum plots are published.
Tier-1 Semiconductor Giheung Hitachi In-Line SEM XF-1000 DVIA-P10000 Installation Report
Tier-1 Semiconductor Giheung NRD K-Line 4F Hitachi In-Line SEM XF-1000 DVIA-P10000 installation report — periodic inspection with the equipment Turned on/IDLE; vertical and left-to-right axes PASS on both floor and platform, front-to-back floor FAIL while the DVIA-P10000 platform meets the requirement on all axes.