Vibration Isolation Case Studies

DVIA-ML3000 (S/N 251125R4) installation report at Ansteel Iron and Steel Research Institute in Anshan, China — Thermo Scientific TEM Talos, supplied. Published figures: the tuning request work order and the vertical / left-to-right / front-to-back VC curves obtained via the UI program, plus the onsite installation photo. Vibration specification is 1.56 µm/s RMS horizontal and 3.12 µm/s RMS vertical over 1-100 Hz; the Measurement Summary cites See Section 9, with all three axes FAIL on the floor and PASS on the DVIA-ML3000 platform.

Installation report for the DVIA-P4000 vibration isolation system, serial 260204R5, installed beneath an Advantest DR-SEM (E5610) on the 3rd floor of the V1 line at a Tier-1 Semiconductor site in Hwaseong. Tuning and vibration measurement were carried out on 2026-07-22 with the equipment installed and turned on. The top plate of the isolation table met the required specification (1.0 µm p-p or less at 0.5~10 Hz, 0.1 or less at 10~25 Hz, 0.03 or less at 25~100 Hz) in all three axes, while the floor exceeded the specification in the vertical (Z-axis) and front-back (Y-axis) directions and was measured as Fail.

YOUSHIZE TECH ZEISS GeminiSEM 360 FIB-SEM DVIA-ML1000 installation report — following installation at Yancheng for end user Yancheng High-tech Zone, the DVIA-ML1000 active vibration isolation platform was tuned and measured with the equipment in the IDLE state, with the floor and the DVIA-ML1000 platform both passing on the vertical, left-to-right, and front-to-back axes. The tuning request, vibration specification, per-axis Autospectrum plots, and the installation photo are published.

Sensofar Sneox optical profilometer DVIA-ULFD350 installation report — after installation at Suzhou for end user Heihe Electronics Co., Ltd., the DVIA-ULFD350 active vibration isolation platform was tuned and measured with the equipment in the IDLE state. The floor measured VC-E vertically and VC-F left-to-right and front-to-back, while on the DVIA-ULFD350 platform all three axes reached VC-G. The tuning request work-order form, per-axis Autospectrum and VC Curves plots, and the installation photo are published.

Thermo Fisher Scientific Apreo 2S SEM DVIA-ML1000 installation report — following installation at Shizuishan for end user Ningxia Orient Tantalum Industry Co. Ltd., the DVIA-ML1000 active vibration isolation platform meets the VC-F vibration specification (the floor fails on vertical, left-to-right, and front-to-back, while the DVIA-ML1000 platform passes all three axes). The tuning request form, per-axis VC Curves, and the installation photo are published.

DVIA-ML3000S (S/N 260406R2-1) installation report at Biel Crystal Manufactory Limited in Huiyang, China — Raith EBPG5200 Plus E-Beam Lithography system, supplied. Published figures: the tuning request work order and the vertical / left-to-right / front-to-back Autospectrum data obtained via the UI program. The horizontal and vertical vibration specifications run from 8 µm/s RMS at 1 Hz to 12.5 µm/s RMS at 100 Hz; the Measurement Summary cites See Section 9, with all three axes PASS on both the floor and the DVIA-ML3000S platform.